公开(公告)号：EP4379767A1

公开(公告)日：2024-06-05

申请号：EP22852708.1

申请日：2022-06-23

Applicant: Denka Company Limited ,  National Institute for Materials Science

Inventor： CHATANI, Hiromitsu ,  ISHIKAWA, Daisuke ,  TANG, Jie ,  OHKUBO, Tadakatsu ,  TANG, Shuai ,  UZUHASHI, Jun ,  HONO, Kazuhiro

IPC: H01J37/06 ,  H01J9/02 ,  H01J9/04 ,  H01J1/148

CPC classification number: H01J9/02 ,  H01J37/06 ,  H01J1/148 ,  H01J9/04

Abstract: A manufacturing method for an electron source according to the present disclosure includes steps of: (A) cutting out a chip from a block of an electron emission material, (B) fixing a first end portion of the chip to a distal end of a support needle, and (C) sharpening a second end portion of the chip. The step (A) includes forming first and second grooves which constitute first and second surfaces of the chip in the block by irradiating a surface of the block with an ion beam. The first end portion of the chip includes the first surface and the second surface with the surfaces forming an angle α of 10 to 90°. The step (B) includes forming a joint between the distal end of the support needle and the first end portion of the chip.

公开(公告)号：EP2680294B1

公开(公告)日：2015-09-09

申请号：EP11859058.7

申请日：2011-02-25

Applicant: Param Corporation

Inventor： YASUDA, Hiroshi

IPC: H01J1/148 ,  H01J1/26 ,  H01J37/075 ,  H01J37/317 ,  H01J37/065 ,  H01J37/07 ,  H01J37/26 ,  B82Y10/00 ,  B82Y40/00

CPC classification number: H01J29/485 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/148 ,  H01J1/26 ,  H01J37/065 ,  H01J37/07 ,  H01J37/075 ,  H01J37/26 ,  H01J37/3174

公开(公告)号：EP1564774B1

公开(公告)日：2012-04-25

申请号：EP04029003.3

申请日：2004-12-07

Applicant: NuFlare Technology, Inc.

Inventor： Katsap, Victor

IPC: H01J1/148 ,  H01J1/15 ,  H01J9/04

CPC classification number: H01J9/042 ,  H01J1/148 ,  H01J1/15 ,  H01J2201/19 ,  H01J2237/06308

公开(公告)号：US20240161993A1

公开(公告)日：2024-05-16

申请号：US18388122

申请日：2023-11-08

Applicant: Kimball Physics, Inc.

Inventor： George Douglas Calvey

IPC: H01J1/15 ,  H01J1/148 ,  H01J9/04

CPC classification number: H01J1/15 ,  H01J1/148 ,  H01J9/04

Abstract: A cathode device including an emitter element for generating electrons. The emitter element can have an outer periphery and a distal tip. The tip can have a first angled surface that angles inwardly from the outer periphery, and a second angled surface that angles inwardly and is separated and inwardly offset from the first angled surface by a shoulder. A graphite cap which can be solid, extends around the emitter element and has an internal angled surface that engages the first angled surface of the tip of the emitter element, forming a gap of a controlled size separating the internal angled surface of the graphite cap from the second angled surface of the tip of the emitter element.

公开(公告)号：US09490098B1

公开(公告)日：2016-11-08

申请号：US14992870

申请日：2016-01-11

Applicant: Applied Physics Technologies, Inc.

Inventor： William A. Mackie ,  Gerald G. Magera

IPC: H01J1/146 ,  H01J1/148 ,  H01J19/10 ,  H01J1/14

CPC classification number: H01J1/148 ,  H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J37/06 ,  H01J2201/196 ,  H01J2201/2889 ,  H01J2201/30484 ,  H01J2201/317 ,  H01J2237/06316

Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。

公开(公告)号：US20140139100A1

公开(公告)日：2014-05-22

申请号：US14047827

申请日：2013-10-07

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Ryoei KOBAYASHI

IPC: H01J1/148 ,  H01J9/04

CPC classification number: H01J1/148 ,  H01J9/04 ,  H01J37/065 ,  H01J2237/06308 ,  H01J2237/26 ,  H01J2237/31754

Abstract: A thermionic cathode of an embodiment includes a carbon coating applied to an outer surface of the side, the carbon coating comprising a contiguous extended portion surrounding the upper section and spaced apart from said upper section by a gap having 1 μm or more and 10 μm or less in width and having a difference of 1 μm or less in the width between a maximum value and a minimum value in a periphery of the electron emitting surface.

Abstract translation: 实施方案的热离子阴极包括施加到侧面的外表面的碳涂层，碳涂层包括围绕上部的邻接的延伸部分并且与上部分隔开具有1μm或更大和10μm的间隙，或 宽度较小，并且在电子发射表面的周围的最大值和最小值之间的宽度上具有1μm或更小的差。

公开(公告)号：US20140055025A1

公开(公告)日：2014-02-27

申请号：US14000988

申请日：2011-02-25

Applicant: Hiroshi Yasuda

Inventor： Hiroshi Yasuda

IPC: H01J29/48

CPC classification number: H01J29/485 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/148 ,  H01J1/26 ,  H01J37/065 ,  H01J37/07 ,  H01J37/075 ,  H01J37/26 ,  H01J37/3174

Abstract: An electron gun cathode (104) is column shaped, and emits electrons by being heated. A holder (103), which covers the bottom and sides of the electron gun cathode, has electrical conductivity and holds the electron gun cathode, and is composed of a material that does not easily react with the electron gun cathode when in a heated state, is provided. The tip of the electron gun cathode (104) protrudes from the holder (103) so as to be exposed, and electrons are emitted from the tip toward the front by applying an electric field to the tip.

Abstract translation: 电子枪阴极（104）为柱状，通过加热发射电子。 覆盖电子枪阴极的底部和侧面的保持器（103）具有导电性并保持电子枪阴极，并且由处于加热状态时不易与电子枪阴极反应的材料构成， 被提供。 电子枪阴极（104）的尖端从保持器（103）突出以露出，并且通过向尖端施加电场，从尖端向前方发射电子。

公开(公告)号：US20120248959A1

公开(公告)日：2012-10-04

申请号：US13075325

申请日：2011-03-30

Applicant: Wolfram Buehler ,  Volker Drexel

Inventor： Wolfram Buehler ,  Volker Drexel

IPC: H01J61/52 ,  H01J29/64 ,  H01J29/46

CPC classification number: H01J3/022 ,  H01J1/148 ,  H01J1/3044 ,  H01J1/50 ,  H01J3/02 ,  H01J37/073 ,  H01J2237/06383 ,  H01J2237/24465 ,  H01J2237/24557

Abstract: An electron beam source includes a base and a tip fixed to the base and extending from the base. The tip includes a core and a coating applied to the core. The core has a surface that includes a first material. The coating includes a second material which is different from the first material. The second material forms a surface of the tip, and the second coating includes more than 30% by weight of a lanthanide element.

Abstract translation: 电子束源包括基部和固定到基部并从基部延伸的尖端。 尖端包括芯和施加到芯的涂层。 芯具有包括第一材料的表面。 涂层包括与第一材料不同的第二材料。 第二材料形成尖端的表面，第二涂层包含超过30重量％的镧系元素。

公开(公告)号：US20070090764A1

公开(公告)日：2007-04-26

申请号：US11254991

申请日：2005-10-20

Applicant: Gopi Ramachandran ,  Alok Srivastava ,  Timothy Sommerer ,  Suchismita Sanyal ,  Prasanth Nammalwar ,  Holly Comanzo ,  William Beers ,  Madras Shankar

Inventor： Gopi Ramachandran ,  Alok Srivastava ,  Timothy Sommerer ,  Suchismita Sanyal ,  Prasanth Nammalwar ,  Holly Comanzo ,  William Beers ,  Madras Shankar

IPC: H01J17/04

CPC classification number: H01J61/0677 ,  H01J1/14 ,  H01J1/148 ,  H01J1/15 ,  H01J1/304 ,  H01J9/025 ,  H01J9/042 ,  H01J61/0672 ,  H01J61/0732 ,  H01J61/0737

Abstract: An electron emissive material comprises an alkaline earth metal halide composition and operable to emit electrons on excitation. A lamp including an envelope, an electrode including an alkaline earth metal halide electron emissive material and a discharge material, is also disclosed

Abstract translation: 电子发射材料包括碱土金属卤化物组合物并且可在激发时发射电子。 还公开了一种包括外壳，包括碱土金属卤化物电子发射材料的电极和放电材料的灯

公开(公告)号：US20030085645A1

公开(公告)日：2003-05-08

申请号：US09985737

申请日：2001-11-06

Applicant: Denki Kagaku Kogyo Kabushiki Kaisha

Inventor： Yoshinori Terui ,  Shinpei Hirokawa ,  Katsuyoshi Tsunoda

IPC: H01J029/46

CPC classification number: H01J3/02 ,  H01J1/148 ,  H01J1/15 ,  H01J37/065

Abstract: An electron gun comprising an electron emission cathode, a control electrode and an extractor wherein the electron emission cathode is mode of rare earth hexaboride and a tip of the electron emission cathode is located between the control electrode and the extractor.

Abstract translation: 一种电子枪，包括电子发射阴极，控制电极和提取器，其中电子发射阴极是稀土六硼化物的模式，电子发射阴极的尖端位于控制电极和提取器之间。