公开(公告)号：KR1020120005938A

公开(公告)日：2012-01-17

申请号：KR1020110043717

申请日：2011-05-11

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 마쯔오까노부아끼 ,  미야따아끼라 ,  하야시신이찌 ,  에노끼다스구루

IPC: H01L21/027

CPC classification number: H01L21/6715 ,  H01L21/67178 ,  H01L21/67288 ,  H01L21/67745 ,  H01L21/0274

Abstract: PURPOSE: A coating, developing apparatus, coating and developing method, and storage medium are provided to laminate a plurality of unit blocks for processing a developing treatment process on a laminated body, thereby suppressing the installation area of the apparatus. CONSTITUTION: A carrier block(S1) comprises a loading table(11) loading a carrier(C), an opening and closing part, and a transfer arm(13). The transfer arm comprises five wafer maintenance support parts(14) in up and down directions. A processing block(S2) comprises unit blocks(B1-B6) which perform a liquid processing process on a wafer. The unit block comprises a heating module, a main arm, and a return area. A shelf unit(U10) is comprised by a plurality of modules laminated each other. A shelf unit(U11) is installed in an interface block(S4).

Abstract translation: 目的：提供一种涂布，显影装置，涂布和显影方法以及存储介质以层叠多个单元块，以对叠层体进行显影处理处理，从而抑制装置的安装面积。 构成：载体块（S1）包括装载载体（C）的装载台（11），打开和关闭部分以及传送臂（13）。 传送臂在上下方向上包括五个晶片维护支撑部件（14）。 处理块（S2）包括对晶片执行液体处理处理的单元块（B1-B6）。 单元块包括加热模块，主臂和返回区域。 搁板单元（U10）由彼此层叠的多个模块构成。 一个搁板单元（U11）安装在接口块（S4）中。

公开(公告)号：KR1020110009031A

公开(公告)日：2011-01-27

申请号：KR1020100069751

申请日：2010-07-20

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 모리까와가쯔히로 ,  노부꾸니지까라 ,  에노끼다스구루

IPC: H01L21/027

CPC classification number: H01L21/0274 ,  G03F7/16

Abstract: PURPOSE: A coating-developing apparatus is provided to increase the productivity of the device by allowing a substrate to be fed while other substrates are processed. CONSTITUTION: A carrier receives a plurality of substrates. A feeding unit(3c) supplies the substrates automatically. An interface block is allowed in between a process module and an exposure apparatus. The interface block includes a loading tool transferring the substrate.

Abstract translation: 目的：提供一种涂料显影装置，通过允许在加工其它基材的同时进料基板来提高装置的生产率。 构成：载体接收多个基板。 进给单元（3c）自动地供给基板。 在处理模块和曝光装置之间允许接口块。 接口块包括传送衬底的加载工具。