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公开(公告)号：KR101756325B1
公开(公告)日：2017-07-10
申请号：KR1020160007397
申请日：2016-01-21
Applicant: 한국표준과학연구원
Abstract: 본발명은플라즈마진단장치를제공한다. 이평면형플라즈마진단장치는주파수가가변되는초고주파를플라즈마에방사하는방사안테나; 및상기방사안테나와인접하게배치되고상기플라즈마로부터상기초고주파를수신하는수신안테나를포함한다.
Abstract translation: 本发明提供一种等离子体诊断设备。 不规则表面型等离子体诊断设备包括：辐射天线，用于向等离子体辐射具有可变频率的微波; 并且接收天线被设置成与辐射天线接触并从等离子体接收微波。
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公开(公告)号：KR101473371B1
公开(公告)日：2014-12-16
申请号：KR1020130051027
申请日：2013-05-07
Applicant: 한국표준과학연구원
IPC: H05H1/46
Abstract: 본발명은유도결합플라즈마발생용안테나구조체를제공한다. 이안테나구조체는접지전극판, 접지전극판의측면에연결되고접지전극판의주위에배치된유도결합안테나, 및유도결합안테나에전력을분배하는전력분배부를포함한다. 유도결합안테나는접지전극판에각각연결되고접지전극판의중심을기준으로제1 사분면내지제4 사분면에각각배치된제1 내지제4 보조안테나들을포함한다. 제2 보조안테나는제1 보조안테나가시계방향으로 90도회전한형상으로배치된다. 보조안테나는홀수개의안테나브랜치들및 안테나브랜치들을서로연결하는안테나연결부들을포함한다. 이웃한안테나브랜치들의전류는서로반대방향으로흐른다.
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公开(公告)号：KR101384537B1
公开(公告)日：2014-04-17
申请号：KR1020130015153
申请日：2013-02-13
Applicant: 한국표준과학연구원
Abstract: The present invention provides a vacuum measuring apparatus and a vacuum measuring method. A vacuum measuring apparatus comprises: a vacuum chamber connected to an outside vacuum apparatus to be measured; a rotation body placed in the vacuum chamber, having symmetrically arranged wings, rotating on the central shaft, and made of non-magnetic conductive materials; a levitation coil placed in the vacuum chamber, arranged to wrap around the rotation body thereby electromagnetic-levitating the rotation body; alternating current power for supplying alternating current to the levitation coil; a light source for rotation incident to wings and providing a rotational force; a speed measuring unit for measuring rotation speed of the rotation body; a pressure calculation unit which uses rotation speed according to time of the rotation body and calculates pressure inside the vacuum chamber.
Abstract translation: 本发明提供一种真空测量装置和真空测量方法。 真空测量装置包括：与要测量的外部真空装置连接的真空室; 旋转体设置在真空室中，具有对称布置的翼，在中心轴上旋转，并由非磁性导电材料制成; 放置在真空室中的悬浮线圈布置成围绕旋转体包裹，从而电磁浮动旋转体; 用于向悬浮线圈提供交流电的交流电力; 用于旋转的光源入射到翼并提供旋转力; 用于测量旋转体的旋转速度的速度测量单元; 压力计算单元，其根据旋转体的时间使用旋转速度，并计算真空室内的压力。
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公开(公告)号：KR1020140022124A
公开(公告)日：2014-02-24
申请号：KR1020120088125
申请日：2012-08-13
Applicant: 한국표준과학연구원
CPC classification number: C23C14/24
Abstract: The present invention provides an evaporation and deposition apparatus. The apparatus includes: an integrating sphere which includes an inlet which receives steam, a baffle which is arranged around the inlet and changes the direction of the steam, a spherical or an elliptical cavity which reflects the steam, and an outlet which radially discharges the steam which is reflected or scattered in the cavity several times by a point source; a crucible which stores evaporation materials inside and supplies steam which is evaporated through a first opening part to the inlet of the integrating sphere; and a heating unit which surrounds the integrating sphere and the crucible and heats the crucible and the integrating sphere. The integrating sphere is made of conductive materials. The evaporation materials are scattered because the inner surface of the crucible is rough.
Abstract translation: 本发明提供一种蒸发沉积装置。 该装置包括：积分球，其包括接收蒸汽的入口，围绕入口布置并改变蒸汽方向的挡板，反射蒸汽的球形或椭圆形空腔;以及将蒸汽径向排出的出口 它被点源反射或分散在腔中多次; 将蒸发材料储存在内并将蒸发的蒸汽通过第一开口部分蒸发到积分球的入口的坩埚; 以及包围积分球和坩埚并加热坩埚和积分球的加热单元。 积分球由导电材料制成。 由于坩埚的内表面粗糙，因此蒸发材料是分散的。
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公开(公告)号：KR101310753B1
公开(公告)日：2013-09-24
申请号：KR1020120043578
申请日：2012-04-26
Applicant: 한국표준과학연구원
IPC: H05H1/46 , H01L21/3065
CPC classification number: H01J37/3211 , H01Q1/02 , H01Q1/366 , H01Q7/00 , H05H1/46 , H05H2001/4667
Abstract: PURPOSE: An inductive antenna is provided to improve power transfer efficiency about plasma by generating inductively coupled plasma. CONSTITUTION: A conductive antenna (130) comprises a first power supply line (131), a second power supply line (132), a core antenna (133), ground outer skins (134), insulation jackets (135) and conductive bridges (136). The first power supply line includes a first core conductive line, a first dielectric body inner skin covering the first core conductive line and a first conductive outer skin covering the first dielectric body inner skin and has a coaxial cable structure. The second power supply line includes a second conductive line, a second dielectric body inner skin covering the second core conductive line and a second conductive outer skin covering the second dielectric body inner skin and has a coaxial cable structure. The core antenna is connected to the first center core conductive line and the second core conductive line and forms a loop. The multiple ground outer skins cover a part of the core antenna and are arranged to be separated from each other. The insulation jackets are arranged between the core antenna and the ground outer skins and cover the core antenna. The conductive bridges connect the ground outer skins which are adjacent to each other.
Abstract translation: 目的：提供感应天线，以通过产生电感耦合等离子体来提高关于等离子体的功率传递效率。 导电天线（130）包括第一电源线（131），第二电源线（132），核心天线（133），接地外皮（134），绝缘护套（135）和导电桥 136）。 第一电源线包括第一芯导电线，覆盖第一芯导电线的第一绝缘体内表皮和覆盖第一绝缘体内皮的第一导电外皮，并具有同轴电缆结构。 第二电源线包括第二导电线，覆盖第二芯导电线的第二介电体内表皮和覆盖第二介电体内表皮的第二导电外皮，并具有同轴电缆结构。 核心天线连接到第一中心芯导电线和第二芯导电线并形成环。 多个地面外皮覆盖核心天线的一部分并且被布置成彼此分离。 绝缘护套布置在核心天线和地面外皮之间，并覆盖核心天线。 导电桥连接彼此相邻的地面外皮。
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Patent Agency Ranking
公开(公告)号：KR101104093B1
公开(公告)日：2012-01-12
申请号：KR1020100029120
申请日：2010-03-31
Applicant: 한국표준과학연구원
Abstract: 본 발명은 내부 안테나 및 플라즈마 발생 장치를 제공한다. 이 내부 안테나는 진공용기의 내부에 직접 삽입되어 플라즈마를 발생시킨다. 내부 안테나는 일단에 전력이 공급되고 타단에서 전력이 4갈래로 분배되는 전원 공급부, 전원 공급부와 수직하게 배치된 전력 분배 평면에 배치되고 전원 공급부의 타단에서 대칭적으로 4 갈래로 갈라지는 주 방사상(main radial) 브랜치들, 인접한 주 방사상 브랜치들을 서로 연결시키는 외곽 브랜치들, 외곽 브랜치들의 중심 영역에서 전원 공급부의 타단 방향으로 연장되는 보조 방사상 브랜치들(sub radial), 및 보조 방사상 브랜치들에 각각 연결되고 전원 공급부와 평행하게 연장되는 접지부들을 포함한다.
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公开(公告)号：KR1020110121790A
公开(公告)日：2011-11-09
申请号：KR1020100041241
申请日：2010-05-03
Applicant: 한국표준과학연구원
CPC classification number: H01J37/3211 , H01F27/427 , H01J37/32183 , H01J37/32577 , H05H1/46 , H05H2001/4667 , H05H2001/4682
Abstract: PURPOSE: A plasma generating apparatus and a transformer are provided to generate the symmetric plasma of high density by serially and/or parallely combining CCP(Capacitively Coupled Plasma) with ICP(Inductively Coupled Plasma) in various types. CONSTITUTION: A plasma generating apparatus comprises an internal antenna(122) which is inserted in a plasma chamber(101) and a transformer(110) which supplies power to the internal antenna. The transformer includes a center conducting wire(114) and a plurality of coaxial cables which includes the cladding conducting wires(112) surrounding the center conducting wire. One end of the center conducting wire is connected to RF power(132). The other end of the center conducting wire is grounded. The cladding conducting wires are serially connected each other. The internal antenna is connected to one end of the center conducting wire and the cladding conducting wires. The plasma chamber includes a lid(102) and a cylindrical chamber(104).
Abstract translation: 目的：提供等离子体发生装置和变压器，通过串联和/或并联组合CCP（电容耦合等离子体）与各种类型的ICP（感应耦合等离子体）来产生高密度的对称等离子体。 构成：等离子体产生装置包括插入在等离子体室（101）中的内部天线（122）和向内部天线供电的变压器（110）。 变压器包括中心导线（114）和多个同轴电缆，其包括围绕中心导线的包层导线（112）。 中心导线的一端连接到RF电源（132）。 中心导线的另一端接地。 包层导线彼此串联连接。 内部天线连接到中心导线和包层导线的一端。 等离子体室包括盖（102）和圆柱形室（104）。
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公开(公告)号：KR101059962B1
公开(公告)日：2011-08-26
申请号：KR1020090037752
申请日：2009-04-29
Applicant: 한국표준과학연구원
Abstract: 본 발명은 대기압 플라즈마 장치 및 대기압 플라즈마 오염물 처리 장치를 제공한다. 이 대기압 플라즈마 장치는 제1 방향으로 대칭적인 테이퍼 형상을 가지는 테이퍼부를 포함하는 제1 전극, 제1 전극의 테이퍼부의 둘레에 배치되고 제1 방향으로 플라즈마 출구를 포함하는 제2 전극, 및 제1 전극에 전기적으로 연결되는 전원을 포함하되, 테이퍼부와 제2 전극 사이의 간격은 균일하게 유지되고, 간격은 방전 공간을 제공할 수 있다.
대기압 플라즈마, 가변 전극, 세탁, 살균Abstract translation: 本发明提供一种大气压等离子体装置和一种大气压等离子体污染物处理装置。 大气压等离子体装置是设置在所述锥形部的外周的第一电极，第一电极包括具有在第一方向上，包括在第一方向上的等离子体出口的对称锥形的锥形部分的第二电极，和第一电极 其中锥形部分和第二电极之间的间隙保持均匀，并且该间隙可以提供放电空间。
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公开(公告)号：KR100833646B1
公开(公告)日：2008-05-30
申请号：KR1020060126324
申请日：2006-12-12
Applicant: 한국표준과학연구원
IPC: H01L21/3065
CPC classification number: H01J37/32935 , H01J37/32954
Abstract: An apparatus and a method for monitoring pulse plasma electron density and electron temperature are provided to simplify a measuring process and a monitoring process by using a natural frequency detection method. A trigger signal output unit outputs a trigger signal. An electromagnetic wave generator(300) transmits electromagnetic waves of a successive frequency band. An electromagnetic wave transceiver(200) is contacted with pulse plasma within a pulse plasma reaction receptacle(100) so that a frequency of the transmitting electromagnetic wave has a mutual relation to pulse plasma electron density and electron temperature. A frequency analyzer(400) is electrically connected to the electromagnetic wave transceiver in order to be synchronized with the trigger signal of the trigger signal output unit. A computer(500) is electrically connected to the electromagnetic wave generator in order to analyze the electron temperature and the electron density by extracting a cutoff frequency. The electromagnetic wave generator and the frequency analyzer are used for determining the cutoff frequency when a pulse of the pulse plasma is equal to or more than 200Hz. A network analyzer is used for determining the frequency according to the time variation when the pulse of the pulse plasma is equal to or less than 200Hz.
Abstract translation: 提供了用于监测脉冲等离子体电子密度和电子温度的装置和方法，以通过使用固有频率检测方法来简化测量过程和监视过程。 触发信号输出单元输出触发信号。 电磁波发生器（300）发射连续频带的电磁波。 电磁波收发器（200）与脉冲等离子体反应容器（100）内的脉冲等离子体接触，使得发射电磁波的频率与脉冲等离子体电子密度和电子温度有相互关系。 频率分析器（400）电连接到电磁波收发器，以便与触发信号输出单元的触发信号同步。 计算机（500）电连接到电磁波发生器，以通过提取截止频率来分析电子温度和电子密度。 当脉冲等离子体的脉冲等于或大于200Hz时，电磁波发生器和频率分析器用于确定截止频率。 当脉冲等离子体的脉冲等于或小于200Hz时，网络分析仪用于根据时间变化来确定频率。
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公开(公告)号：KR1020080002308A
公开(公告)日：2008-01-04
申请号：KR1020060061055
申请日：2006-06-30
Applicant: 한국표준과학연구원
IPC: H01L21/02 , H01L21/66 , H01L21/3065
CPC classification number: H05H1/0062
Abstract: A device for monitoring an electron density and an electron temperature in a plasma state and a method for monitoring the same are provided to check simultaneously a state of a process device and be utilized as the process device with reliability by being used as a real-time monitoring device for a plasma state. A device for monitoring an electron density and an electron temperature in a plasma state includes an electromagnetic generator(300), an electromagnetic transmitter/receiver(200), a frequency analyzer(400), and a computer(500). The electromagnetic generator continuously transmits an electromagnetic wave of a sequence of a frequency band. The electromagnetic wave is related to the plasma state in a reaction chamber so as to have a correlation between the plasma electron density and the electron temperature, and transmits the electromagnetic wave electrically connected to the electromagnetic generator. The frequency analyzer is electrically connected to the electromagnetic transmitter/receiver so as to analyze the frequency of the electromagnetic wave received from the electromagnetic transmitter/receiver.
Abstract translation: 提供了一种用于监测等离子体状态下的电子密度和电子温度的装置及其监视方法，用于同时检查处理装置的状态，并通过用作实时的可靠性被用作处理装置 用于等离子体状态的监视装置。 用于监测等离子体状态的电子密度和电子温度的装置包括电磁发生器（300），电磁发射器/接收器（200），频率分析器（400）和计算机（500）。 电磁发电机连续发送频带序列的电磁波。 电磁波与反应室中的等离子体状态有关，以使等离子体电子密度与电子温度具有相关性，并且传输与电磁发生器电连接的电磁波。 频率分析仪电连接到电磁发射器/接收器，以分析从电磁发射器/接收器接收的电磁波的频率。
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