公开(公告)号：DE50010475D1

公开(公告)日：2005-07-07

申请号：DE50010475

申请日：2000-09-28

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  ELBRECHT LUEDER ,  MARKSTEINER STEPHAN ,  SAENGER ANNETTE ,  TIMME HANS-JOERG

IPC: A61B8/00 ,  G10K11/20 ,  H03H3/02

Abstract: An acoustic mirror is described which is formed of at least one first insulating layer, a first metal layer disposed thereon, a second insulating layer disposed thereon and a second metal layer disposed thereon. An auxiliary layer is produced on the first insulating layer whereby a recess extending as far as the first insulating layer is created therein. The first metal layer is substantially deposited and removed by chemical/mechanical polishing until the parts of the first metal layer disposed outside the recess are no longer present. The second metal layer is also produced in a recess with the aid of chemical/mechanical polishing. More than two insulating layers and two metal layers can be provided. The first metal layer and the second metal layer can be produced in the same recess.

公开(公告)号：DE50202232D1

公开(公告)日：2005-03-17

申请号：DE50202232

申请日：2002-06-04

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  ELBRECHT LUEDER ,  MARKSTEINER STEPHAN ,  TIMME HANS-JOERG

IPC: H01L41/09 ,  H01L41/187 ,  H03H9/02 ,  H03H9/17

Abstract: A resonator apparatus has a piezoelectric resonator as well as an acoustic reflector which has a layer having a high acoustic impedance and a layer having a low acoustic impedance. The thickness of one layer is set different from a quarter of the wavelength in this layer at the operating frequency due to technological limitations in the manufacturing of this layer, and the thickness of the other layer is set dependent from the one layer, such that a predetermined minimum quality of the acoustic reflector is attained.

公开(公告)号：DE10155927A1

公开(公告)日：2003-06-05

申请号：DE10155927

申请日：2001-11-14

Applicant: INFINEON TECHNOLOGIES AG

Inventor： TIMME HANS-JOERG ,  NIKLAS ALFRED ,  AIGNER ROBERT ,  MECKES ANDREAS ,  ELBRECHT LUEDER ,  NESSLER WINFRIED ,  EHRLER GUENTER

IPC: H03H3/04 ,  H03H9/02 ,  H03H9/17 ,  H03H9/58