公开(公告)号：DE69932516D1

公开(公告)日：2006-09-07

申请号：DE69932516

申请日：1999-09-10

Applicant: ST MICROELECTRONICS SRL

Inventor： ZERBINI SARAH ,  VIGNA BENEDETTO ,  GARAVAGLIA MASSIMO ,  TOMESI GIANLUCA

IPC: G01P15/10 ,  B81B3/00 ,  G01P15/00 ,  G01P15/097 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84

Abstract: The inertial sensor (1) comprises an inner stator (2) and an outer rotor (3) which are electrostatically coupled together by means of mobile sensor arms (5) and fixed sensor arms (9a, 9b). The rotor (3) is connected to a calibration microactuator (12) comprising four sets (27) of actuator elements (13) arranged one for each quadrant of the inertial sensor. There are two actuator elements (13) making up each set, which are identical to each other, are angularly equidistant, and each of which comprises a mobile actuator arm (15) connected to the rotor (3) and bearing a plurality of mobile actuator electrodes (16), and a pair of fixed actuator arms (17a, 17b) which are set on opposite sides with respect to the corresponding mobile actuator arm and bear a plurality of fixed actuator electrodes (19a, 19b). The mobile actuator electrodes (16) and fixed actuator electrodes (19a, 19b) are connected to a driving unit (20) which biases them so as to cause a preset motion of the rotor (3), the motion being detected by a sensing unit (24) connected to the fixed sensor arms (9a, 9b).

公开(公告)号：DE69830789D1

公开(公告)日：2005-08-11

申请号：DE69830789

申请日：1998-07-30

Applicant: ST MICROELECTRONICS SRL

Inventor： VIGNA BENEDETTO ,  ZERBINI SARAH ,  SASSOLINI SIMONE ,  MENESCARDI CARLO

IPC: G11B5/596 ,  G11B21/02 ,  G11B21/10 ,  H02N1/00

Abstract: The microactuator (30) comprises a motor element (32) including a stator (38) and a rotor (40) capacitively coupled to the stator (38); an actuator element (34) having a circular structure; and a transmission structure (36) interposed between the motor element (32) and the actuator element (34) to transmit a rotary movement of the motor element (32) into a corresponding rotary movement of the actuator element (34). In particular, the transmission structure (36) comprises a pair of transmission arms (80, 81) identical to each other, arranged symmetrically with respect to a symmetry axis (A) of the microactuator (30). The transmission arms (80, 81) extend between two approximately diametrically opposed regions of the rotor (40) to diametrically opposed regions (84) of the actuator element (34).

公开(公告)号：DE69828962D1

公开(公告)日：2005-03-17

申请号：DE69828962

申请日：1998-07-30

Applicant: ST MICROELECTRONICS SRL

Inventor： SASSOLINI SIMONE ,  ZERBINI SARAH ,  VIGNA BENEDETTO ,  MASTROMATTEO UBALDO

IPC: G11B5/11 ,  G11B5/60 ,  G11B5/55

Abstract: The microactuator (9) is attached to a first face (43) of a coupling (8) formed on a suspension (5), so that the R/W transducer (6) projects from the opposite face (44). A hole (41; 56) in the coupling (8) permits passage of an adhesive mass (42) interposed between the rotor (11) of the microactuator (9) and the R/W transducer (6). A strip (40) of adhesive material extends between the die (25) accommodating the microactuator (9) and the coupling (8), and externally surrounds the microactuator (9). The coupling (8) acts as a protective shield for the microactuator (9), both mechanically and electrically; it covers the microactuator (9) at the front, and prevents foreign particles from blocking the microactuator (9); in addition it electrically insulates the R/W transducer (6), sensitive to magnetic fields, from regions of the microactuator biased to a high voltage. With the gimbal (8), the strip (40) forms a sealing structure, which in practice surrounds the microactuator (9) on all sides.

公开(公告)号：DE69826242D1

公开(公告)日：2004-10-21

申请号：DE69826242

申请日：1998-05-05

Applicant: ST MICROELECTRONICS SRL

Inventor： MASTROMATTEO UBALDO ,  MURARI BRUNO ,  VIGNA BENEDETTO ,  ZERBINI SARAH

IPC: G11B5/596 ,  G11B5/55 ,  G11B5/58 ,  G11B21/10 ,  H02N1/00 ,  G11B5/00

Abstract: The method comprises the steps of: forming an integrated device (54) including a microactuator (10) in a semiconductor material wafer (29); forming an immobilisation structure (45,47) of organic material on the wafer; simultaneously forming a securing flange (51) integral with the microactuator (10) and electrical connections for connecting the integrated device to a read/write head; bonding a transducer (6,55) supporting the read/write head to the securing flange (51); connecting the electrical connections to the read/write head; cutting the wafer into dices; bonding the actuator unit to a suspension; and removing the immobilisation structure (45,47).

公开(公告)号：IT1321065B1

公开(公告)日：2003-12-30

申请号：ITTO20001067

申请日：2000-11-14

Applicant: ST MICROELECTRONICS SRL

Inventor： VIGNA BENEDETTO ,  SASSOLINI SIMONE ,  ZERBINI SARAH ,  BALDO LORENZO

IPC: G11B5/596

Abstract: Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.

公开(公告)号：ITTO20001067D0

公开(公告)日：2000-11-14

申请号：ITTO20001067

申请日：2000-11-14

Applicant: ST MICROELECTRONICS SRL

Inventor： VIGNA BENEDETTO ,  SASSOLINI SIMONE ,  ZERBINI SARAH ,  BALDO LORENZO

IPC: G11B5/596

Abstract: Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.