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    HARD DISK DRIVE DEVICE ASSEMBLY METHOD AND HARD DISK DRIVE DEVICE
    1.
    发明专利
    HARD DISK DRIVE DEVICE ASSEMBLY METHOD AND HARD DISK DRIVE DEVICE 失效

    公开(公告)号：JP2000057551A

    公开(公告)日：2000-02-25

    申请号：JP21477999

    申请日：1999-07-29

    Applicant: ST MICROELECTRONICS SRL

    Inventor： SASSOLINI SIMONE ,  ZERBINI SARAH ,  VIGNA BENEDETTO ,  MASTROMATTEO UBALDO

    IPC: G11B5/60 ,  G11B5/11 ,  G11B5/55

    Abstract: PROBLEM TO BE SOLVED: To make a micro-actuator to function sufficiently by connecting the micro-actuator to a first surface of a suspension plate so that an R/W converter is projected from a second surface opposite to the first surface of the suspension plate. SOLUTION: A assembly body to be finally assembled is provided with a gimbal 8, the R/W converter and a die 25. The gimbal 8 (forming a thin layer of a suspension) is provided with a first surface 43 facing to the die 25 and a second surface 44 opposite to this surface, and the R/W converter 6 is projected from the second surface 44. A central circular hole 41 provided on the gimbal 8 has a diameter sufficient to allow the R/W converter 6 beforehand stuck to a rotor to passes through. An adhesive material member 42 is arranged between a member 12 to be suspended and the R/W converter 6. A strip 40 is stuck to the first surface 43 of the gimbal 8, and the die 25 is connected solidly with the R/W converter 6.

    INTEGRATED MICROACTUATOR
    4.
    发明专利
    INTEGRATED MICROACTUATOR 失效

    公开(公告)号：JP2000067539A

    公开(公告)日：2000-03-03

    申请号：JP21666599

    申请日：1999-07-30

    Applicant: ST MICROELECTRONICS SRL

    Inventor： VIGNA BENEDETTO ,  ZERBINI SARAH ,  SASSOLINI SIMONE ,  MENESCARDI CARLO

    IPC: G11B5/596 ,  G11B21/02 ,  G11B21/10 ,  H02N1/00

    Abstract: PROBLEM TO BE SOLVED: To prevent a microactuator from external dust by providing an actuator element being a different body and a transmission structure to be arranged between the actuator element and a motor element and allowing the transmission structure to transmit the motion of the motor element to a motion corresponding to the actuator element to prevent damage and static electric interference. SOLUTION: A microactuator 30 is integrated with the die 31 firmly fixed to gymbals. The microactuator 30 is provided with a motor element 32, an actuator element 34 which is separated from the motor element 32 and also to which R/W transducers 6 are firmly fixed and a transmission structure 36 which is arranged between the motor element 32 and the actuator element 34. The transmission structure 36 transmits the rotational motion of the motor element 32 to the actuator element 34 and the R/W transducers 6 fixed to the element 34. The motor element 32 is provided with the stator 38 of an inner side which is integrated with the die 31 and the rotor 40 of an outer side. The rotor 40 is connected to the actuator element 34 with the transmission structure 36.

    6.
    发明专利
    未知

    公开(公告)号：ITTO20010519A1

    公开(公告)日：2002-12-02

    申请号：ITTO20010519

    申请日：2001-05-31

    Applicant: ST MICROELECTRONICS SRL

    Inventor： SASSOLINI SIMONE ,  VIGNA BENEDETTO

    IPC: G11B5/55 ,  G11B5/60

    Abstract: In an actuator device for hard disks a suspension element carries a slider that is subject to undesired vibrations which give rise to rotations of the slider with respect to a nominal position. An electrostatically controlled position-control structure is arranged between the suspension and the slider and is controlled in an active way so as to generate torsions of the platform that counter the undesired rotations. The position-control structure comprises a platform of conductive material and control electrodes arranged underneath the platform. The platform is connected to a load-bearing structure by spring elements that enable movements of roll and pitch. Four control electrodes are arranged according to the quadrants of a square and can be selectively biased for generating electrical forces acting on the platform.

    7.
    发明专利
    未知

    公开(公告)号：DE60223136D1

    公开(公告)日：2007-12-06

    申请号：DE60223136

    申请日：2002-06-20

    Applicant: ST MICROELECTRONICS SRL

    Inventor： MASTROMATTEO UBALDO ,  MURARI BRUNO ,  FERRARI PAOLO ,  SASSOLINI SIMONE

    IPC: B81B3/00 ,  B81C1/00

    Abstract: A micro-electro-mechanical device (20) formed by a body (4) of semiconductor material having a thickness and defining a mobile part (23, 24, 31) and a fixed part (3, 25, 30). The mobile part is formed by a mobile platform (23), supporting arms (31) extending from the mobile platform to the fixed part (3, 25, 30), and by mobile electrodes (24) fixed to the mobile platform. The fixed part has fixed electrodes (25) facing the mobile electrodes (24), a first biasing region (3) fixed to the fixed electrodes, a second biasing region (30) fixed to the supporting arms (31), and an insulation region (6) of insulating material extending through the entire thickness of the body (4). The insulation region (6) insulates electrically at least one between the first and the second biasing regions (3, 30) from the rest of the fixed part.

    8.
    发明专利
    未知

    公开(公告)号：DE69933370D1

    公开(公告)日：2006-11-09

    申请号：DE69933370

    申请日：1999-07-15

    Applicant: ST MICROELECTRONICS SRL

    Inventor： MASTROMATTEO UBALDO ,  ZERBINI SARAH ,  SASSOLINI SIMONE ,  VIGNA BENEDETTO

    IPC: G11B5/55 ,  G11B5/596 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  G11B5/127 ,  G11B5/56 ,  G11B21/02 ,  G11B21/08 ,  G11B21/10 ,  G11B21/21 ,  H01L21/20 ,  H01L21/304 ,  H01L25/065 ,  H01L25/07 ,  H01L25/18

    Abstract: The process for assembling a microactuator (10) on a R/W transducer (6) comprises the steps of: forming a first wafer (11) of semiconductor material comprising a plurality of microactuators (10) including suspended regions (15) and fixed regions (22) separated from each other by first trenches (24); forming a second wafer (25) of semiconductor material comprising blocking regions (27, 27') connecting mobile (29') and fixed (29") intermediate regions separated from each other by second trenches (33a); bonding the two wafers (11, 25) so as to form a composite wafer (39) wherein the suspended regions (15) of the first wafer (11) are connected to the mobile intermediate regions (29') of the second wafer (25), and the fixed regions (22) of the first wafer are connected to the fixed intermediate regions (29") of the second wafer; cutting the composite wafer (39) into a plurality of units (41); fixing the mobile intermediate region (29') of each unit (41) to a respective R/W transducer (6); and removing the blocking regions (27'). The blocking regions (27') are made of silicon oxide, and the intermediate regions are made of polycrystalline silicon.

    9.
    发明专利
    未知

    公开(公告)号：ITTO20010519D0

    公开(公告)日：2001-05-31

    申请号：ITTO20010519

    申请日：2001-05-31

    Applicant: ST MICROELECTRONICS SRL

    Inventor： SASSOLINI SIMONE ,  VIGNA BENEDETTO

    IPC: G11B5/55 ,  G11B5/60

    Abstract: In an actuator device for hard disks a suspension element carries a slider that is subject to undesired vibrations which give rise to rotations of the slider with respect to a nominal position. An electrostatically controlled position-control structure is arranged between the suspension and the slider and is controlled in an active way so as to generate torsions of the platform that counter the undesired rotations. The position-control structure comprises a platform of conductive material and control electrodes arranged underneath the platform. The platform is connected to a load-bearing structure by spring elements that enable movements of roll and pitch. Four control electrodes are arranged according to the quadrants of a square and can be selectively biased for generating electrical forces acting on the platform.

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