公开(公告)号：EP2639545A1

公开(公告)日：2013-09-18

申请号：EP12004989.5

申请日：2012-07-05

Applicant: Kabushiki Kaisha TOPCON

Inventor： Yuan, Zhijia ,  Wang, Zhenguo ,  Chan, Kinpui

IPC: G01B9/02 ,  A61B3/10

CPC classification number: G01B9/02091 ,  A61B3/102 ,  G01B9/02004 ,  G01B9/0201 ,  G01B9/02069 ,  G01B9/02078

Abstract: An optical imaging method in an embodiment includes: a scanning step to scan each of a plurality of A-lines of an object with a signal light while alternately changing the phase difference between the signal light and a reference light to two preset phase differences; a detection step to detect the interference light of the signal light passing through the A-line and the reference light; and an imaging step to generate a complex interference spectrum based on the detection results of the interference lights corresponding to the plurality of A-lines sequentially obtained in the detection step according to the scanning, and form, based on the complex interference spectrum, the tomographic image along the arrangement of the plurality of A-lines in which a complex conjugate artifact is substantially removed.

Abstract translation: 一个实施例中的光学成像方法包括：扫描步骤，用信号光扫描物体的多个A线中的每一个，同时交替改变信号光和参考光之间的相位差为两个预设相位差; 检测步骤，检测通过A线和参考光的信号光的干涉光; 以及成像步骤，用于基于根据扫描在检测步骤中顺序获得的与多条A线相对应的干涉光的检测结果来生成复合干涉光谱，并且基于复合干涉光谱形成断层照相 图像沿复数共轭伪影基本上被去除的多个A线的排列。

公开(公告)号：EP2175258A1

公开(公告)日：2010-04-14

申请号：EP08765011.5

申请日：2008-06-03

Applicant: Hamamatsu Photonics K.K.

Inventor： IWAI, Hidenao ,  YAMAUCHI, Toyohiko

IPC: G01N21/45 ,  G01B9/02

CPC classification number: G01B9/02069 ,  G01B9/0201 ,  G01B11/06 ,  G01B2290/35 ,  G01N21/45

Abstract: An optical property measurement apparatus 1 includes a light source unit 10, a first optical coupler 21, a second optical coupler 22, a lens 31, a lens 32, a phase modulation unit 40, a drive unit 41, an optical path length difference adjustment unit 50, a control unit 51, a light receiving unit 60, a synchronization detection unit 70, and a measurement unit 80. The phase modulation unit 40 carries out phase modulation with a frequency f. The synchronization detection unit 70 outputs a first signal having a value corresponding to a magnitude of a component of the frequency f included in an electrical signal output from the light receiving unit 60, and also outputs a second signal having a value corresponding to a magnitude of a component of the frequency 2f included in the electrical signal. The control unit 51 controls the optical path length difference adjusted by the optical path length difference adjustment unit 50 to be a predetermined value based on the first signal or the second signal output from the synchronization detection unit 70.

公开(公告)号：EP1789832A1

公开(公告)日：2007-05-30

申请号：EP05787149.3

申请日：2005-08-31

Applicant: OTI-Ophthalmic Technologies Inc.

Inventor： PODOLEANU, Adrian, Gh. ,  ROGERS, John, A.

IPC: G02B26/06 ,  G02B21/00 ,  G01N21/84 ,  G01B9/02 ,  A61B3/13

CPC classification number: A61B3/102 ,  G01B9/0201 ,  G01B9/02091 ,  G01B2290/20 ,  G01B2290/35 ,  G01B2290/65 ,  G01N21/4795 ,  G02B17/023 ,  G02B26/06

Abstract: A method for axial scanning to be used in transmission in one of the arms of OCT interferometers, with reduced walk-off and loss. Procedures are disclosed of using the scanning delay line in conjunction with the transverse scanners to generate B and C - scan OCT images.

公开(公告)号：EP1524491A1

公开(公告)日：2005-04-20

申请号：EP03447256.3

申请日：2003-10-16

Applicant: UNIVERSITE LIBRE DE BRUXELLES

Inventor： Dubois, Frank ,  Yourassowsky, Catherine

IPC: G01B9/02

CPC classification number: G03H1/0005 ,  G01B9/0201 ,  G01B9/0203 ,  G01B9/02032 ,  G01B9/02047 ,  G01B9/02091 ,  G01B9/04 ,  G02B21/16 ,  G02B21/22 ,  G02B21/36 ,  G03H1/0443 ,  G03H1/0866 ,  G03H2001/005 ,  G03H2001/0445 ,  G03H2001/0458 ,  G03H2222/13 ,  G03H2222/24

Abstract: The present invention is related to an apparatus and a process for the visualisation of a sample, said apparatus comprising as elements at least:

(i) a sample cell (2) able to contain a sample to be studied;
(ii) an illumination source (1) for illuminating said sample and creating thereby an incident sample beam;
(iii) a microscope (3,4) coupled to an interferometer (5) for generating an interference pattern from said incident sample beam by splitting said beam into a first output beam and a second output beam following two different optical paths in the interferometer and by recombining said output beams;
(iv) imaging means (7) for detecting said interference pattern,
said apparatus being characterised in that the apparatus further comprises optical tilting means located in one of the optical paths of the interferometer so as to create a tilt between the first output beam and the second output beam said tilt resulting into a shift between the first output beam and the second output beam on the imaging means (7), and the relative arrangement of said optical tilting means and the other elements of the apparatus being such as to obtain a differential interference pattern on said imaging means (7).

Abstract translation: 本发明涉及一种用于样品可视化的装置和方法，所述装置至少包括：（i）能够容纳待研究样品的样品池（2）; （ii）用于照亮所述样品并由此产生入射样品束的照明源（1）; （iii）耦合到干涉仪（5）的显微镜（3,4），用于通过将所述光束分成第一输出光束和在干涉仪中的两个不同光路之后的第二输出光束，从而从所述入射采样光束产生干涉图案;以及 通过重组所述输出光束; （iv）用于检测所述干涉图案的成像装置（7），所述装置的特征在于，所述装置还包括位于干涉仪的一个光路中的光学倾斜装置，以便在第一输出光束和 第二输出光束，所述倾斜导致成像装置（7）上的第一输出光束和第二输出光束之间的偏移，并且所述光学倾斜装置和装置的其它元件的相对布置使得获得差分 所述成像装置（7）上的干涉图案。

公开(公告)号：EP0985902B1

公开(公告)日：2004-11-24

申请号：EP99402227.5

申请日：1999-09-10

Applicant: CSEM Centre Suisse d'Electronique et de Microtechnique SA -Recherche et Développement

Inventor： Seitz, Peter ,  Bourquin, Stéphane ,  Salathe, René-Paul

IPC: G01B9/02 ,  G01B11/02 ,  G01B11/24 ,  G01B11/22

CPC classification number: G01B9/02028 ,  G01B9/0201 ,  G01B9/0209 ,  G01B11/026 ,  G01B11/22 ,  G01B11/2441 ,  G01B2290/45

公开(公告)号：EP1362252A1

公开(公告)日：2003-11-19

申请号：EP02708993.7

申请日：2002-01-11

Applicant: Board of Regents,The University of Texas System

Inventor： DAVE, Digant, P. ,  MILNER, Thomas E,Univ. Texas Elect. & Computer En ,  TELENKOV, Sergey

IPC: G02B6/26 ,  G02B6/27 ,  G01B9/02

CPC classification number: G01P5/26 ,  A61B5/0066 ,  A61B5/0261 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02028 ,  G01B9/02045 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/4795 ,  G01P5/001

Abstract: One form of the present invention is a dual channel optical reflectometer composed of four separate paths (100, 102, 104 and 106), interconnected through a path coupler (108). The source path (100), optically connected to the path coupler (108), is comprised of a light source (110) that is optically coupled to a birefringent optical fiber (112). A depolarizer (114) is placed in-line in the optical fiber (112) and is of sufficient length (116) to insure complete decorrelation with independent phase components that are separated by virtue of the birefringent nature of the optical fiber (112). The reference path (102) is comprised of another birefringent optical fiber (118) that is optically connected to the path coupler (108) on one end, and has the other end optically aligned with a collimating lens (120) that collimates the light emitted from the second end of optical fiber (118) into a scanning delay line (122).

公开(公告)号：EP0738871A3

公开(公告)日：1997-04-16

申请号：EP96100363.9

申请日：1996-01-11

Applicant: Hewlett-Packard Company

Inventor： Kalem, Lee ,  Wilson, Robert L.

IPC: G01B9/02

CPC classification number: G01B9/02083 ,  G01B9/0201 ,  G01B2290/45

Abstract: A laser interferometer measurement system (2) eliminates detection of "false" zero crossings in the measurement signal. The measurement signal is shifted in phase by an integrator or a differentiator (24). The positive portion of the shifted measurment signal is used to determine falling portions of the measurement signal while the negative portion of the shifted measurement signal is used to determine the rising portions of the measurment signal. Each portion is compard to the reference signal. A SR latch (38) receives the result of each comparator (30, 34). The output signal of the SR latch reflects the zero crossings of the measurement signal without the effects of noise.

Abstract translation: 激光干涉仪测量系统消除在测量信号“假”的过零点的检测。 所述测量信号的相位由在积分器或微分器移位。 移位测量信号的正部分使用而移位的测量信号的负部分被用于确定性矿井测量信号的上升部分，以确定性矿落入测量信号的部分。 每一部分相比于参考信号。 甲SR锁存器接收每个比较的结果。 SR锁存器的输出信号反映了过零点测量信号的无噪音的影响。

公开(公告)号：EP0614067A1

公开(公告)日：1994-09-07

申请号：EP93119047.4

申请日：1993-11-25

Applicant: JENOPTIK GmbH

Inventor： Dammann, Ehrhard ,  Bauer, Jürgen

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02028 ,  G01B9/02051 ,  G01B2290/45

Abstract: Die Erfindung betrifft ein phasenmoduliertes Interferometer mit neuartiger Ansteuerung und Signalaufbereitung.
Die Aufgabe, bei einem phasenmodulierten Interferometer ohne komplizierte Ansteuerung des Phasenmodulators zu auswertefähigen Überlagerungssignalen zu gelangen, wird erfindungsgemäß gelöst, indem dem bekannten Phasenmodulator (2) ein sinusförmiges Ansteuersignal mit einer Modulationsfrequenz (ω o ) und einer Amplitude (φ o ) zugeführt wird, eine multiplikative Mischung des im Interferometer erzeugten Überlagerungssignals aus Meß- und Referenzarm mit einem bezüglich des Ansteuersignals phasen- und frequenzstarr gekoppelten Sinussignal, das eine bestimmte Mischfrequenz (ω M ) besitzt, erfolgt und in einem elektronischen Bandpaßfilter (9), bei dessen Filterfrequenz (ω F ) die Summen- und Differenzfrequenzen aus zwei Harmonischen der Modulationsfrequenz (ω o ) und der Mischfrequenz (ω M ) gleiche Werte annehmen, ein in üblicher Weise zur Auswertung der Phasenverschiebung verwendetes Kosinussignal ausgefiltert wird, wenn die Amplitude (φ o ) des Ansteuersignals die Bedingung für einen geeigneten Arbeitspunkt des Phasenmodulators (2) erfüllt.
Die Erfindung findet Anwendung in phasenmodulierten Interferometern, insbesondere für Präzisionslängenmeßgeräte mit vorzugsweise heterodynem Auswerteverfahren.

Abstract translation: 本发明涉及具有新颖的控制和信号调理的相位调制干涉仪。 根据本发明，通过馈送已知的相位调制器（2）具有调制频率为（ω0）的正弦控制信号，实现了在没有相位调制器的复杂控制的相位调制干涉仪中实现可评估叠加（外差）信号的目的 ）和振幅（phi 0），通过在干涉仪中产生的叠加信号与测量和参考臂进行乘法混合，其中正弦信号相对于控制信号被锁相在相位和频率上，并且具有 特定混合频率（ω-M），并且以滤波器频率（ω-F）滤波掉在电子带通滤波器（9）中以正常方式使用的余弦信号以评估相移，其中聚合和差分 如果控制信号的振幅（phi 0）为0，则调制频率（ω= 0）和混频（ω-M）的两个谐波的频率取相同的值 l满足相位调制器（2）的合适工作点的条件。 本发明适用于相位调制干涉仪，特别是对于优选使用外差评估方法的精密长度测量装置。

公开(公告)号：KR20180039743A

公开(公告)日：2018-04-18

申请号：KR20187009582

申请日：2016-08-18

Applicant: KLA TENCOR CORP

Inventor： LEVINSKI VLADIMIR ,  PASKOVER YURI ,  LUBASHEVSKY YUVAL ,  MANASSEN AMNON

IPC: G01N21/47 ,  G01J3/44

CPC classification number: G01B11/272 ,  G01B9/0201 ,  G01N21/4788 ,  G03F7/70633

Abstract: 메트롤로지측정방법및 툴이제공되며, 이는고정된조명원에의해고정된회절타겟을조명하고, 0차회절신호와 1차회절신호의합으로구성된신호를측정하고, 상기회절타겟과상기조명원을고정되게유지하면서상기 0차회절신호와상기 1차회절신호사이의복수의관계에대하여상기측정단계를반복하며, 측정된합으로부터상기 1차회절신호를유도한다. 조명은간섭성일수 있고, 측정은동공평면에있을수 있거나, 조명은비간섭성일수 있고, 측정은필드평면에있을수 있으며, 어느경우이든, 0차및 1차회절차수의부분중첩이측정된다. 조명은환형일수 있으며, 회절타겟은중첩영역을분리하기위해상이한피치를갖는주기적구조를갖는 1(one) 셀 SCOL 타겟일수 있다.

公开(公告)号：KR101544968B1

公开(公告)日：2015-08-19

申请号：KR1020130078751

申请日：2013-07-05

Applicant: 한국표준과학연구원

Inventor： 김재완 ,  김종안 ,  강주식 ,  진종한

IPC: G01B11/06

CPC classification number: G01B11/06 ,  G01B9/0201 ,  G01B9/02081 ,  G01B11/14 ,  G01N21/211 ,  G01N21/45 ,  G01N2021/213 ,  G01S17/36

Abstract: 본발명은두께측정장치및 두께측정방법을제공한다. 두께측정방법은제1 파장(λ)의제1 레이저빔을투명기판에조사시키고, 상기투명기판을투과한제1 레이저빔의세기를측정하는단계; 제2 파장(λ)의제2 레이저빔을상기투명기판을투과키고, 투과한제2 레이저빔의세기를측정하는단계; 및상기투명기판을투과한상기제1 레이저빔과상기제2 레이저빔을이용한리사주(Lissajous) 그래프에서회전각을추출하는단계;를포함한다. 상기제1 레이저빔의다중내부반사에의한이웃한레이들(rays) 사이의위상차이와상기제2 레이저빔의다중내부반사에의한이웃한레이들(rays) 사이의위상차이는π/2를유지한다.