公开(公告)号：US20060039007A1

公开(公告)日：2006-02-23

申请号：US11207327

申请日：2005-08-19

Applicant: Seung Kim ,  Hagyong Kihm ,  Jung Park

Inventor： Seung Kim ,  Hagyong Kihm ,  Jung Park

IPC: G01B9/02

CPC classification number: G01B9/02039 ,  G01B9/02076 ,  G01B9/02081 ,  G01B2290/70 ,  G01J2009/0203 ,  G01J2009/0223 ,  G01J2009/0226

Abstract: The present invention relates to vibration-insensitive point-diffraction interferometry. For the purpose of obtaining high immunity to vibration, a single-mode optical fiber is used to generate the reference wave, by means of point diffraction, directly from the measurement wave reflected from test objects. The capability of vibration desensitization is further strengthened by adding a spatial phase-shift devise that enables to obtain four interferograms of different amounts of phase shift simultaneously with no time delay between interferograms. The present invention may be effectively used in the design of measuring systems for in-line applications where measurements need to be performed in the presence of significant level of vibration.

Abstract translation: 本发明涉及振动不敏感点衍射干涉测量。 为了获得高的抗振动性，单模光纤通过点衍射直接从测试对象反射的测量波中产生参考波。 通过添加空间相移装置进一步加强振动脱敏的能力，空间相移装置能够在干涉图之间没有时间延迟的同时获得不同量的相移的四个干涉图。 本发明可以有效地用于在需要在存在显着水平的振动的情况下进行测量的在线应用的测量系统的设计中。

公开(公告)号：US4575247A

公开(公告)日：1986-03-11

申请号：US627363

申请日：1984-07-02

Applicant: Richard J. Tansey

Inventor： Richard J. Tansey

IPC: G01J1/42 ,  G01J9/02 ,  G01J9/04 ,  G01B9/02

CPC classification number: G01J9/04 ,  G01J1/4257 ,  G01J2009/0223 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: A heterodyne phase-determining interferometer comprising a Smartt point diffraction interferometer (PDI) 10 in which the pinhole plate 22 is replaced by a half-wave, partially transmitting plate 22' with a pinhole 20 therein. The output beams 26 and 24 from the pinhole 20 are propagated through a frequency shifter 12 which includes a quarter-wave plate 28 whose axis is at 45.degree. to the polarization axes of the two beams 26 and 24 coming from the PDI 10, a half-wave plate 30 rotating at an angular frequency of .omega., and a linear polarizer which orients the polarization vectors of the two beams in the same direction along the propagation axis. The output of the frequency shifter 12 is a moving interference pattern consisting of alternate light and dark lines. This pattern is projected upon a phase-measuring means 14 comprising an array of photodetectors 34, 36 connected to a plurality of phase-to-voltage converters 38. There is one reference photodetector 34, the rest being test photodetectors. The reference photodetector 34 is connected to all phase-to-voltage converters 38, but each test photodetector 36 is connected to a different phase-to-voltage converter 38. The output of each converter 38 is the phase difference between the light at the point viewed by its associated test photodetector 36 and the light at the point viewed by the reference photodetector 34.

Abstract translation: 一种外差相位确定干涉仪，其包括Smartt点衍射干涉仪（PDI）10，其中针孔板22被其中具有针孔20的半波部分透射板22'代替。 来自针孔20的输出光束26和24通过一个变频器12传播，该变频器12包括一个四分之一波长的板28，该四分之一波片28的轴线相对于来自PDI 10的两个光束26和24的偏振轴为45度， 波片30以ω的角度频率旋转，以及线性偏振器，其沿着传播轴线沿相同方向定向两个光束的偏振矢量。 移频器12的输出是由交替的亮线和暗线组成的移动干涉图案。 该图案被投影在包括连接到多个相电压转换器38的光电检测器34,36的阵列的相位测量装置14上。存在一个参考光电检测器34，其余的是测试光电探测器。 参考光电检测器34连接到所有相电压转换器38，但是每个测试光电检测器36连接到不同的相电压转换器38.每个转换器38的输出是点处的光之间的相位差 通过其相关联的测试光电检测器36观察，以及由参考光电检测器34观察的点处的光。

公开(公告)号：EP3327413A1

公开(公告)日：2018-05-30

申请号：EP16200570.6

申请日：2016-11-24

Applicant: IMEC VZW

Inventor： YURT, Abdulkadir ,  LIN, Ziduo ,  STAHL, Richard ,  VANMEERBEECK, Geert

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J9/0215 ,  G01J2009/0223 ,  G03H1/0443 ,  G03H1/0465 ,  G03H2001/0447 ,  G03H2223/12 ,  G03H2223/19

Abstract: A method of holographic wavefront sensing is disclosed. The method comprises: receiving (302) a light beam (202) on a transparent, flat substrate (102), provided with a lattice (104) of opaque dots (106); detecting (304) by an image sensor (108) an interference pattern (204) formed by diffracted light, being scattered by the opaque dots (106), and undiffracted light of the light beam (202); processing (306) the detected interference pattern (204) to digitally reconstruct a representation of a displaced lattice (206), which would form the interference pattern (204) on the image sensor (108) upon receiving the light with a known wavefront; and comparing (308) the representation of the displaced lattice (206) to a known representation of the lattice (104) to determine a representation of the wavefront form of the received light beam (202).
An apparatus (100) and a system (400) for holographic wavefront sensing are also disclosed.

公开(公告)号：EP1818658A1

公开(公告)日：2007-08-15

申请号：EP06002586.3

申请日：2006-02-08

Applicant: Carl Zeiss SMT AG

Inventor： Mengel, Markus ,  Totzeck, Michael

IPC: G01J4/04 ,  G03F7/20 ,  G01M11/02

CPC classification number: G01J4/04 ,  G01J9/02 ,  G01J9/0215 ,  G01J2009/0223 ,  G01M11/02 ,  G01N21/19 ,  G01N2021/216 ,  G03F7/70566 ,  G03F7/70591

Abstract: A method for approximating an influence of an optical system (12) on the state of polarisation of optical radiation is provided. The method comprises the steps of providing incoming optical radiation (24) for the optical system (12) in several incoming states of polarisation, including at least one incoming state having circularly polarised radiation components; directing the incoming optical radiation (24) onto the optical system (12); measuring at least one characteristic, including a phase distribution, of a resulting outgoing optical radiation (26) emerging from the optical system (12) with respect to each of the incoming states of polarisation, and approximating the influence of the optical system (12) on the state of polarisation of optical radiation by evaluating the measured characteristics of the outgoing optical radiation (26).

Abstract translation: 提供了一种用于近似于上的光辐射的偏振状态的光学系统（12）的影响的方法。 该方法包括：在极化的几个进入的状态下的光学系统（12）提供输入的光辐射（24）的步骤，包括至少一个输入具有状态圆偏振辐射分量; 将传入的光辐射（24）到光学系统（12）; 测量至少一个特性，其中包括的相位分布，从光学系统（12）出现的相对于每个偏振的入射状态的所得输出光辐射（26）的，并且近似光学系统的影响（12） 上通过评估输出光辐射（26）的所测量的特性的光学辐射的偏振状态。

公开(公告)号：EP0468816A2

公开(公告)日：1992-01-29

申请号：EP91306865.6

申请日：1991-07-26

Applicant: RESEARCH DEVELOPMENT CORPORATION OF JAPAN ,  Nagoshi, Toshiyuki ,  Ichimura, Tsutomu

Inventor： Nagoshi, Toshiyuki ,  Ichimura, Tsutomu ,  Inaba, Fumio

IPC: G01J3/45

CPC classification number: G01J3/4532 ,  G01J2009/0223

Abstract: An apparatus for effecting spatial Fourier transform spectroscopic detection of light from a surface luminescent object with high sensitivity by use of a quadrangular common path interferometer comprises a beam splitter (BS) first, second and third reflecting mirrors (M1-M3), a first imaging lents (L2), and a detecting means (D) disposed at a position which is substantially conjugate with the second reflecting mirror (M2) with respect to the first imaging lens (M2), for detecting a one-or two-dimensional distribution image of interference fringes, the beam splitter (BS) and the first to third reflecting mirrors (M1-M3) being disposed respectively at the vertices of a quadrangle, so that the detected interference fringes are subjected to spatial Fourier transform to obtain a spectral distribution of light from a specimen. A light beam from the specimen (1) is converged by a second imaging lens (L) so as to enter the beam splitter (BS), the second imaging lens (L) being disposed so that the focussed image of said specimen (1) is substantially coincident with the position of the second reflecting mirror (M2).

Abstract translation: 一种通过使用四边形公共路径干涉仪来实现来自具有高灵敏度的表面发光物体的光的空间傅里叶变换光谱检测的装置包括分束器（BS）第一，第二和第三反射镜（M1-M3），第一成像 以及设置在相对于第一成像透镜（M2）与第二反射镜（M2）基本共轭的位置处的检测装置（D），用于检测一维或二维分布图像 的干涉条纹，分束器（BS）和第一至第三反射镜（M1-M3）分别设置在四边形的顶点处，使得检测到的干涉条纹经受空间傅里叶变换，以获得 来自标本的光。 来自试样（1）的光束被第二成像透镜（L）会聚，以进入分束器（BS），第二成像透镜（L）被布置成使得所述样本（1）的聚焦图像 基本上与第二反射镜（M2）的位置一致。

公开(公告)号：US09658114B1

公开(公告)日：2017-05-23

申请号：US14986593

申请日：2015-12-31

Applicant: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences

Inventor： Feng Tang ,  Xiangzhao Wang ,  Peng Feng ,  Fudong Guo ,  Yunjun Lu

IPC: G01M11/02 ,  G01J9/02

CPC classification number: G01J9/02 ,  G01J1/0437 ,  G01J2009/0223 ,  G01J2009/0226 ,  G01J2009/0261

Abstract: A device for measuring point diffraction interferometric wavefront aberration having an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. A method for detecting wavefront aberration of the optical system by using the device is also disclosed.

公开(公告)号：US07508527B2

公开(公告)日：2009-03-24

申请号：US11402218

申请日：2006-04-10

Applicant: Henry A. Hill

Inventor： Henry A. Hill

IPC: G01B9/02

CPC classification number: G01J9/02 ,  G01B9/02022 ,  G01B9/02024 ,  G01B9/02056 ,  G01B9/02057 ,  G01J2009/0223 ,  G03F7/706

Abstract: A point diffraction interferometer for measuring properties of a spatial impulse response function, the interferometer including: a source for generating a source beam; an optical system; an optical element including a test object located in an object plane of the optical system, the test object including a diffraction point for generating from the source beam a measurement beam that passes through the optical system, wherein the optical element also generates from the source beam a reference beam that is combined with the measurement beam to generate an interference pattern in an image plane of the optical system, the interference pattern representing the spatial impulse response function of the optical system.

Abstract translation: 1.一种用于测量空间脉冲响应函数的特性的点衍射干涉仪，所述干涉仪包括：用于产生源光束的光源; 光学系统; 包括位于所述光学系统的物平面中的测试对象的光学元件，所述测试对象包括用于从所述源光束产生穿过所述光学系统的测量光束的衍射点，其中所述光学元件还从所述源光束 与测量光束组合以在光学系统的图像平面中产生干涉图案的参考光束，干涉图案表示光学系统的空间脉冲响应函数。

公开(公告)号：US07492439B1

公开(公告)日：2009-02-17

申请号：US10945753

申请日：2004-09-21

Applicant: Kenneth L. Marshall

Inventor： Kenneth L. Marshall

IPC: G02F1/13

CPC classification number: G02F1/1313 ,  G01J9/02 ,  G01J2005/583 ,  G01J2009/0223 ,  G02F1/133504 ,  G02F1/13394 ,  G02F1/13725 ,  G02F2001/133565 ,  G02F2203/22

Abstract: Liquid crystal point diffraction interferometer (LCPDI) systems that can provide real-time, phase-shifting interferograms that are useful in the characterization of static optical properties (wavefront aberrations, lensing, or wedge) in optical elements or dynamic, time-resolved events (temperature fluctuations and gradients, motion) in physical systems use improved LCPDI cells that employ a “structured” substrate or substrates in which the structural features are produced by thin film deposition or photo resist processing to provide a diffractive element that is an integral part of the cell substrate(s). The LC material used in the device may be doped with a “contrast-compensated” mixture of positive and negative dichroic dyes.

Abstract translation: 液晶点衍射干涉仪（LCPDI）系统可以提供实时，相移干涉图，可用于表征光学元件或动态，时间分辨事件中的静态光学性质（波前像差，透镜或楔形） 物理系统中的温度波动和梯度，运动）使用改进的LCPDI单元，其使用“结构化”衬底或衬底，其中通过薄膜沉积或光刻胶处理产生结构特征，以提供衍射元件，该衍射元件是 细胞底物。 在器件中使用的LC材料可以掺杂有正和负二色性染料的“对比度补偿”混合物。

公开(公告)号：US07443514B2

公开(公告)日：2008-10-28

申请号：US11540674

申请日：2006-10-02

Applicant: Nora-Jean Harned ,  Robert D. Harned

Inventor： Nora-Jean Harned ,  Robert D. Harned

IPC: G01B11/02 ,  G01B9/02

CPC classification number: G01B11/2441 ,  G01J2009/0223 ,  G01M11/005 ,  G01M11/025 ,  G01M11/0264 ,  G01M11/0271

Abstract: The present invention is directed to a system and method for using a spatial light modulator (SLM) to perform a null test of an (aspheric) optical surface. In an embodiment, such a system includes an interferometer, an optical element, and an SLM. The interferometer provides electromagnetic radiation. The optical element conditions the electromagnetic radiation to provide a first beam of radiation and a second beam of radiation. The SLM shapes a wavefront of the first beam of radiation resulting in a shaped wavefront corresponding to an optical surface. The shaped wavefront is incident on and conditioned by the optical surface. The shape of the optical surface is analyzed based on a fringe pattern resulting from interference between the shaped wavefront mapped by the optical surface and the second beam of radiation. The system may also include an optical design module that converts a null corrector design corresponding to the optical surface into instructions for the SLM.

公开(公告)号：US07428058B2

公开(公告)日：2008-09-23

申请号：US11383328

申请日：2006-05-15

Applicant: Henry A. Hill

Inventor： Henry A. Hill

IPC: G01B9/02

CPC classification number: G03F7/706 ,  G01J2009/0223 ,  G03F7/70591 ,  G03F7/7085 ,  G03F7/70941

Abstract: Apparatus and methods for in situ and ex situ measurements of spatial profiles of the modulus of the complex amplitude and intensity of flare generated by an optical system. The in situ and ex situ measurements comprise interferometric and non-interferometric measurements that use an array of diffraction sites simultaneously located in an object plane of the optical system to increase signals related to measured properties of flare in a conjugate image plane. The diffraction sites generate diffracted beams with randomized relative phases. In general, the interferometric profile measurements employ phase-shifting point-diffraction interferometry to generate a topographical interference signal and the non-interferometric measurements are based on flare related signals other than topographic interference signals. The topographical interference signal and flare related signals are generated by a detector either as an electrical interference signal or electrical flare related signals or as corresponding exposure induced changes in a recording medium.

Abstract translation: 用于原位和非原位测量由光学系统产生的光斑的复振幅和强度的模量的空间分布的装置和方法。 原位和非原位测量包括使用同时位于光学系统的物平面中的衍射位置阵列的干涉测量和非干涉测量，以增加与共轭图像平面中的测光特性相关的信号。 衍射点产生具有随机相对相位的衍射光束。 通常，干涉测量轮廓测量采用相移点衍射干涉测量法来产生地形干涉信号，并且非干涉测量基于与地形干扰信号不同的闪光相关信号。 地形干扰信号和火炬相关信号由检测器产生，作为电干扰信号或电眩光相关信号，或作为记录介质中相应的曝光引起的变化。