公开(公告)号：US4762417A

公开(公告)日：1988-08-09

申请号：US879000

申请日：1986-06-26

Applicant: Shudong Wu ,  Xiangzhen Chen ,  Xiou Tao

Inventor： Shudong Wu ,  Xiangzhen Chen ,  Xiou Tao

IPC: G01J9/02 ,  G01M11/00 ,  G01M11/02 ,  G01B9/02

CPC classification number: G01M11/0271 ,  G01J9/02 ,  G01M11/005 ,  G01J2009/0261

Abstract: A polarization fringe scanning digital interferometer includes an encoder r performing a phase polarization encoding on the wavefront coming from the optical component under test as it passes through the encoder. The encoded wavefront then passes through an analyzer into a video camera to produce electrical signals representing the interference pattern. The encoder includes in sequence, a polarizer having an adjustable polarization axis, a polarization film providing a polarization pinhole through the film and a quarter wave plate that preferably is a Fresnel plate.

Abstract translation: 偏振边缘扫描数字干涉仪包括编码器，用于在通过编码器的被测光学部件的波前对相位偏振编码进行相位偏振编码。 编码波阵面然后通过分析仪进入摄像机，以产生表示干扰图案的电信号。 编码器依次包括具有可调偏振轴的偏振器，通过该膜提供偏振针孔的偏振膜和优选为菲涅耳板的四分之一波片。

公开(公告)号：US20230152163A1

公开(公告)日：2023-05-18

申请号：US17915009

申请日：2021-02-16

Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD. ,  Institute for Laser Technology

Inventor： Koichi HAMAMOTO ,  Tomoya MORIOKA ,  Shingo NISHIKATA ,  Hiroyuki DAIGO ,  Noriaki MIYANAGA

IPC: G01J9/02 ,  G02B5/32 ,  G02B5/30

CPC classification number: G01J9/02 ,  G02B5/32 ,  G02B5/3083 ,  G01J2009/0261

Abstract: A phase difference measuring device is provided with a phase conversion device and a detection device. The phase conversion device converts a first laser beam that passes therethrough so that the first laser beam includes a phase distribution of one cycle in an azimuth direction in a cross section of the first laser beam included in an arbitrary virtual plane perpendicular to an optical axis of the first laser beam. The detection device detects an azimuth angle of an intensity centroid of an interference pattern generated by at least a part of a first laser beam that has passed through the phase conversion device, and a part of a second laser beam that derives from a laser beam as seed light from which the first laser beam derives, of which an optical intensity is same as the at least a part of the first laser beam, and detects an inter-beam phase difference of the second laser beam.

公开(公告)号：US20150253248A1

公开(公告)日：2015-09-10

申请号：US14642655

申请日：2015-03-09

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventor： H. Kumar Wickramasinghe

IPC: G01N21/65 ,  G01J3/45 ,  G01J3/44

CPC classification number: G01N21/65 ,  G01J3/0224 ,  G01J3/44 ,  G01J3/45 ,  G01J3/453 ,  G01J9/0215 ,  G01J2009/0261 ,  G01N2021/655 ,  G01Q30/02

Abstract: An apparatus and method for measuring amplitude and/or phase of a molecular vibration uses a polarization modulated pump beam and a stimulating Stokes beam on a probe of a scanning probe microscope to detect a Raman scattered Stokes beam from the sample. The detected Raman scattered Stokes beam is used to derive at least one of the amplitude and the phase of the molecular vibration.

Abstract translation: 用于测量分子振动的幅度和/或相位的装置和方法使用偏振调制泵浦光束和刺激斯托克斯光束在扫描探针显微镜的探针上以检测来自样品的拉曼散射斯托克斯光束。 检测到的拉曼散射斯托克斯光束用于推导分子振动的振幅和相位中的至少一个。

公开(公告)号：US07561279B2

公开(公告)日：2009-07-14

申请号：US11770582

申请日：2007-06-28

Applicant: Raymond Castonguay ,  Piotr Szwaykowski

Inventor： Raymond Castonguay ,  Piotr Szwaykowski

IPC: G01B9/02

CPC classification number: G01B9/02081 ,  G01B2290/45 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.

Abstract translation: 一种光学测量装置，包括组合的偏振型干涉仪，其包括偏振光束分离器，其中偏振光束被分成垂直偏振的参考和测试光束，一组检测器布置成一行，用于创建多个 相移干涉图，以及用于沿与检测器的长轴垂直的方向移动物体的扫描装置。

公开(公告)号：US07525665B2

公开(公告)日：2009-04-28

申请号：US11587812

申请日：2005-05-11

Applicant: William Ernest Lee

Inventor： William Ernest Lee

IPC: G01B9/02

CPC classification number: G01B9/02019 ,  G01B9/02056 ,  G01B2290/70 ,  G01J2009/0261

Abstract: A polarising double-passed interferometer comprises a polarising beamsplitter (16), a reference mirror (20) in the path of a reference beam (14) and a movable measurement mirror (26) in the path of a measurement beam (12). The reference and measurement beams have different polarisations. An angular beam deflection device such a glass wedge or prism (32) acts to remove or separate out an error beam (30) caused by leakage of light of one polarisation into the path of light of the other polarisation.

Abstract translation: 偏振双向干涉仪包括偏振分束器（16），参考光束（14）的路径中的参考反射镜（20）和测量光束（12）的路径中的可移动测量反射镜（26）。 参考和测量光束具有不同的极化。 诸如玻璃楔形物或棱镜（32）的角度束偏转装置用于去除或分离由一个偏振光的光泄漏到另一个极化的光的路径中引起的误差束（30）。

公开(公告)号：US07468798B2

公开(公告)日：2008-12-23

申请号：US11627153

申请日：2007-01-25

Applicant: Yoshihiro Shiode

Inventor： Yoshihiro Shiode

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G03F7/706 ,  G01J4/00 ,  G01J2009/0261 ,  G03F7/70566

Abstract: A method for irradiating onto a target optical system plural linearly polarized rays having different polarization directions, and for measuring a polarization characteristic of the target optical system including a birefringence amount R and a fast axis Φ includes the steps of irradiating linearly polarized ray having a polarization direction θ onto the target optical system and obtaining a centroid amount P of the ray that has transmitted through the target optical system, and obtaining the birefringence amount R and the fast axis Φ from P=−R·cos(2θ−Φ) or P=R·cos(2θ−Φ).

Abstract translation: 一种用于向目标光学系统照射多个具有不同偏振方向的线性偏振光，并且用于测量包括双折射量R和快轴Phi的目标光学系统的偏振特性的方法包括以下步骤：照射具有极化的线偏振光 方向θ到目标光学系统上，并获得透过目标光学系统的光线的重心量P，并从P = -R.cos（2theta-Phi）或P中获得双折射量R和快轴Phi = R.cos（2ta-Phi）。

公开(公告)号：US07466425B2

公开(公告)日：2008-12-16

申请号：US11112457

申请日：2005-04-22

Applicant: Bogdan Szafraniec

Inventor： Bogdan Szafraniec

IPC: G01B11/02 ,  G01N21/00

CPC classification number: G01M11/337 ,  G01J9/04 ,  G01J2009/0261

Abstract: A method for characterizing a device under test includes propagating multiple optical signals through the device under test and combining the multiple optical signals with a reference optical signal. The multiple optical signals are mixed with the reference optical signal and a relative perturbation between the multiple optical signals from the mixing of the multiple optical signals with the reference optical signal is determined. In another embodiment a modulated optical signal is provided from a local oscillator and the modulated optical signal is combined with the input optical signal. The modulated optical signal is mixed with the input signal to provide a mixed signal and at least one polarization-resolved parameter of the input optical signal is extracted from the mixed signal.

Abstract translation: 用于表征被测器件的方法包括通过被测器件传播多个光信号，并将多个光信号与参考光信号组合。 多个光信号与参考光信号混合，并且确定来自多个光信号与参考光信号的混合的多个光信号之间的相对扰动。 在另一个实施例中，调制的光信号由本地振荡器提供，并且调制的光信号与输入的光信号组合。 调制的光信号与输入信号混合以提供混合信号，并且从混合信号中提取输入光信号的至少一个偏振解析参数。

公开(公告)号：US07280223B2

公开(公告)日：2007-10-09

申请号：US11112375

申请日：2005-04-22

Applicant: Henry A. Hill ,  Gary Womack

Inventor： Henry A. Hill ,  Gary Womack

IPC: G01B11/02

CPC classification number: G01B9/02061 ,  G01B9/02018 ,  G01B9/02027 ,  G01B9/02059 ,  G01B9/02072 ,  G01B9/02084 ,  G01B2290/15 ,  G01B2290/70 ,  G01J2009/0261 ,  G03F7/70775

Abstract: In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly, determining values of a first parameter and a second parameter for different positions of the measurement object from the monitored distances, wherein for a given position the first parameter is based on the monitored distances of the measurement object along each of the three different measurement axes at the given position, and for a given position the second parameter is based on the monitored distance of the measurement object along each of two of the measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from the first and second parameter values.

Abstract translation: 通常，在一个方面，本发明的特征在于，包括在沿着三个不同测量轴中的每一个干涉测量组件和测量对象之间进行干涉测量同时相对于干涉测量组件移动测量对象的干涉测量方法，确定第一参数的值， 测量对象与监测距离的不同位置的第二参数，其中对于给定位置，第一参数基于测量对象沿给定位置处的三个不同测量轴中的每一个的监测距离，以及对于给定位置 位置第二参数是基于测量对象沿着给定位置处的两个测量轴中的每一个的监测距离，以及从第一和第二参数值导出关于测量对象的表面图形的信息。

公开(公告)号：US07196797B2

公开(公告)日：2007-03-27

申请号：US10857053

申请日：2004-05-28

Applicant: John J. Bockman ,  Ludmila M. Golyanskaya ,  Kenneth J. Wayne ,  Miao Zhu

Inventor： John J. Bockman ,  Ludmila M. Golyanskaya ,  Kenneth J. Wayne ,  Miao Zhu

IPC: G01B9/02 ,  G02B5/30

CPC classification number: G01B9/02057 ,  G01B9/02003 ,  G01B9/02007 ,  G01B9/02049 ,  G01B9/02072 ,  G01B2290/70 ,  G01J2009/0261 ,  G02B7/006

Abstract: An interferometer system includes a plane mirror interferometer, a turning mirror, a retardation plate assembly having a retardation plate that can be adjusted and then fixed, and a retroreflector. A light beam travels in a path comprising the plane mirror interferometer, the turning mirror, the retardation plate assembly, and the retroreflector. The retardation plate assembly may include a plurality of bearings, a ring riding on the bearings, the retardation plate mounted to the ring, and a plunger pushing the ring against the bearings. The retardation plate may be fixed by adhesive after determining an orientation that produces little polarization leakage in the system.

Abstract translation: 干涉仪系统包括平面镜干涉仪，转向镜，具有能够被调整然后固定的延迟板的相位差板组件和后向反射器。 光束在包括平面镜干涉仪，转向镜，延迟板组件和后向反射器的路径中行进。 延迟板组件可以包括多个轴承，骑在轴承上的环，安装到环上的相位差板和将环推到轴承上的柱塞。 在确定在系统中几乎不产生极化泄漏的取向之后，可以通过粘合剂固定延迟板。

公开(公告)号：US20050237536A1

公开(公告)日：2005-10-27

申请号：US11112681

申请日：2005-04-22

Applicant: Henry Hill ,  Gary Womack

Inventor： Henry Hill ,  Gary Womack

IPC: G01B9/02 ,  G01B11/02 ,  G01J9/02 ,  G03F7/20

CPC classification number: G01B9/02061 ,  G01B9/02018 ,  G01B9/02027 ,  G01B9/02059 ,  G01B9/02072 ,  G01B9/02084 ,  G01B2290/15 ,  G01B2290/70 ,  G01J2009/0261 ,  G03F7/70775

Abstract: In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly, determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values.

Abstract translation: 通常，在一个方面，本发明的特征在于，在将测量对象相对于干涉测量组件移动的同时，包括干涉测量组件和测量对象之间的距离沿着三个不同测量轴中的每一个进行干涉测量的方法，确定不同的参数的值 测量对象距监测距离的位置，其中对于给定位置，该参数基于测量对象沿给定位置处的三个不同测量轴中的每一个的距离，以及导出关于测量的表面图形轮廓的信息 至少对参数值进行频率变换。