HYDROXYPHENYL COPOLYMER OR PHOTORESIST CONTAINING THE SAME

    公开(公告)号:JP2000284483A

    公开(公告)日:2000-10-13

    申请号:JP2000038851

    申请日:2000-01-12

    Applicant: SHIPLEY CO LLC IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a resist which exhibits excellent nature and is capable of forming a resist image of high resolution by using a photoresist composition containing a photosensitive component as well as a group unstable to an acid, resin containing a polymer having m-hydroxyphenyl group and p-hydroxyphenyl group. SOLUTION: This composition contains the three distinct repeating units; 1) the unit containing the group unstable to the acid, 2) the unit containing the m-hydroxyphenyl group by the polymerization of m-hydroxystyrene or m- hydroxy α-methylstyrene and 3) the p-hydroxyphenyl group by the polymerization of p-hydroxystyrene or p-hydroxy α-methylstyrene. The desirable copolymer is denoted by formula. In the formula, W denotes the unit containing the photoacid unstable group; R1 and R2 denote substituents exclusive of hydrogen; R3, R4, R5 denote hydrogen or (substituted)alkyl; m and n denote 0 to 4 and x, y and z respectively denote the molar fractions or molar per cent of the respective units of the polymers.

    RADIATION-SENSITIVE RESIN COMPOSITION
    55.
    发明专利

    公开(公告)号:JP2004012551A

    公开(公告)日:2004-01-15

    申请号:JP2002162110

    申请日:2002-06-03

    Applicant: JSR CORP IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition having high transparency to a radiation, excellent in basic properties as a resist, such as sensitivity, resolution, dry etching resistance and pattern shape and suitable for use as a chemically amplified resist. SOLUTION: The radiation-sensitive resin composition comprises (A) a resin which contains a repeating unit derived from α-perfluoroalkylacrylic esters typified by t-butyl α-trifluoromethylacrylate and a repeating unit derived from a norbornene compound typified by 5-ä2-hydroxy-2, 2-di(trifluoromethyl)ethyl}bicyclo[2.2.1]hept-2-ene or a compound of formula 7 as essential units and becomes alkali-soluble by the action of an acid and (B) a radiation-sensitive acid generator. COPYRIGHT: (C)2004,JPO

    RECORDING DEVICE USING RECORDING DISK, RECORDING SYSTEM AND ITS BACKUP METHOD

    公开(公告)号:JP2003256148A

    公开(公告)日:2003-09-10

    申请号:JP2002047838

    申请日:2002-02-25

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a recording device and a recording system shortening the backup time by reducing reading and writing during backup on invalid data such as erased data. SOLUTION: The recording devices 41, 42 are provided with data storage parts 12, 22 using storage media of disk shape; data arrangement storage parts 13, 23 storing arrangement information on the respective storage data; control parts 51, 61 carrying out writing and reading of data using the arrangement information of the data arrangement storage parts 13, 23; and operating condition storage parts 52, 62 for storing operating condition information showing whether the respective storage regions of the data storage parts 12, 22 are effective regions with data written or invalid regions without data written. In the case of receiving a read request stored in the data storage parts 12, 22, the control parts 51, 61 select only the effective region to read the data, using the operating condition information of the operating condition storage parts 52, 62. COPYRIGHT: (C)2003,JPO

    SYSTEM, METHOD AND PROGRAM FOR MACHINE TRANSLATION

    公开(公告)号:JP2002259375A

    公开(公告)日:2002-09-13

    申请号:JP2001059031

    申请日:2001-03-02

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To enable a user 15 to efficiently know a suitable translated word concerning an unknown word when a word, which is not registered on a dictionary 48, or unknown word as a compound word exists in a machine translation system 40. SOLUTION: A translated sentence preparing means 45 prepares a translated sentence, with which unknown words are not translated while keeping original descriptions and only known words are translated. A translated sentence display means 51 displays the translated sentence prepared by the translated sentence preparing means 45. Concerning the unknown words in the translated sentence under displaying, a link setting means 52 sets the link of retrieval performance in a retrieval field corresponding to the field of the subject of original sentences in the search field of a prescribed Internet connected search engine.

Patent Agency Ranking