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公开(公告)号:KR101603769B1
公开(公告)日:2016-03-16
申请号:KR1020090098777
申请日:2009-10-16
Applicant: 삼성전자주식회사 , 서울대학교산학협력단
CPC classification number: H01Q15/006
Abstract: 입사하는전자기파중에서는특정파장근처의좁은대역의전자기파만을선택하여투과시킬수 있는전자기파투과필터및 이를채용한전자기파카메라를개시한다. 개시된전자기파투과필터는관통된개구를갖는전도성기판및 개구에배치된나선형코일을포함할수 있다. 이러한전자기파투과필터는원하는파장근처의좁은대역의전자기파만을투과시킬수 있으며, 투과전자기파의세기를증가시킬수 있다.
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公开(公告)号:KR101310668B1
公开(公告)日:2013-09-24
申请号:KR1020070074593
申请日:2007-07-25
Applicant: 삼성전자주식회사
IPC: H01L21/306
CPC classification number: H01P11/003 , Y10T428/24802
Abstract: 다단계 기판 식각 방법 및 이를 이용하여 제조된 테라헤르츠 발진기가 개시된다. 본 발명은 제1 기판의 어느 한 면에 제1 마스크 패턴을 형성하는 단계; 상기 제1 마스크 패턴을 식각 마스크로 하여 상기 제1 기판을 식각하여 홀을 형성하는 단계; 식각 하고자 하는 깊이와 동일한 두께를 갖는 제2 기판을 상기 제1 기판과 접합하는 단계; 상기 접합된 제2 기판 위에 제2 마스크 패턴을 형성하는 단계; 상기 제2 마스크 패턴을 식각 마스크로 하여 상기 제2 기판을 식각하여 홀을 형성하는 단계; 및 상기 제1 기판 및 제2 기판 사이의 식각 선택비를 갖는 산화막을 제거하는 단계를 포함한다. 본 발명에 의하면, 깊은 단차에서도 에칭 바닥면을 균일하게 할 수 있고, 가장자리의 곡률 반경을 최소화하며, 벽면의 T-shape 형상 등을 방지하여 에칭 품질을 향상시킬 수 있고, 에칭 깊이를 미리 래핑(lapping) 이나 폴리싱(polishing)을 통해 조절 가능하고, 상하판의 얼라인 키를 이용하여 정확하게 접합할 수 있으며, 멀티 레이어(multi layer) 공정이 가능하여 발진기나 증폭기 구조의 정밀도와 균일도를 얻을 수 있다.
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公开(公告)号:KR1020120048892A
公开(公告)日:2012-05-16
申请号:KR1020100110342
申请日:2010-11-08
Applicant: 삼성전자주식회사
CPC classification number: G02B1/002 , B81C1/00111 , G02F2202/30 , H01Q15/0086 , Y10S977/834 , H01P7/10 , H03H3/02 , H03H9/17
Abstract: PURPOSE: A 3D standing type meta material structure and a manufacturing method thereof are provided to dynamically control transmission, reflection, and absorption properties by using MEMS(Micro-Electro-Mechanical System) and NIMS(Nano-Electro-Mechanical System) processes. CONSTITUTION: A fixing unit(29) is fixed to a substrate(10). A resonator(20) includes the fixing unit and a plurality of arms. The fixing unit and the plurality of arms include conductive layers. One pair of arms(21,22) form a first split-ring. The first split-ring is vertical to the substrate. Another pair of arms form a second split-ring. The resonator includes a dielectric layer formed on the conductive layer.
Abstract translation: 目的:提供3D立体型超材料结构及其制造方法,以通过使用MEMS(微机电系统)和NIMS(Nano-Electro-Mechanical System)工艺来动态地控制透射,反射和吸收特性。 构成:固定单元(29)固定在基板(10)上。 谐振器(20)包括固定单元和多个臂。 固定单元和多个臂包括导电层。 一对臂(21,22)形成第一个分裂环。 第一个分裂环垂直于基底。 另一双手臂形成第二个分裂环。 谐振器包括形成在导电层上的电介质层。
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公开(公告)号:KR1020120035045A
公开(公告)日:2012-04-13
申请号:KR1020100096521
申请日:2010-10-04
Applicant: 삼성전자주식회사
CPC classification number: H01P3/121 , B23K15/0026 , H01J23/24 , H01J25/34 , H01P3/123 , Y10T29/49016 , H01S1/00 , H01S2302/02
Abstract: PURPOSE: A Tera-Herts oscillator circuit of a ridge structure is provided to obtain oscillation having a large output by increasing the electric field intensity of an electromagnetic wave. CONSTITUTION: A waveguide(110) has a shape which periodically becomes folded. An electronic beam tunnel(120) is prepared to pass through the waveguide. The waveguide and the electronic beam tunnel are formed inside a block(100) made of a certain material. The waveguide includes a first ridge portion(115a) projected to inside and a second ridge portion(115b) projected in the inside. A first waveguide portion(111) is thinner than second and third waveguide portions(112,113). Electric field intensity is improved by concentrating an electric field around the first and the second ridge portion.
Abstract translation: 目的:提供一种脊结构的Tera-Herts振荡电路,以通过增加电磁波的电场强度来获得具有大输出的振荡。 构成:波导(110)具有周期性地折叠的形状。 准备电子束通道(120)通过波导管。 波导和电子束通道形成在由某种材料制成的块(100)内部。 波导包括突出到内部的第一脊部(115a)和突出在内部的第二脊部(115b)。 第一波导部分(111)比第二和第三波导部分(112,113)薄。 通过在第一和第二脊部分周围集中电场来提高电场强度。
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公开(公告)号:KR1020120031735A
公开(公告)日:2012-04-04
申请号:KR1020100093293
申请日:2010-09-27
Applicant: 삼성전자주식회사
CPC classification number: G02F1/21 , G02F1/218 , G02F2202/30 , G02F2203/13 , H01P1/2005 , H01P7/082 , H01Q15/0026 , H01Q15/0086
Abstract: PURPOSE: A multi-layered hybrid meta material structure is provided to reinforce a resonant property by arranging a resonator with different resonant frequencies according to each layer of the substrate. CONSTITUTION: A meta material structure includes a first resonator(15) and a second resonator(16) with different resonant frequencies. The first and second resonators are split-ring resonators with one gap. A resonant gap of a first layer is different from the resonant gap of a second layer. A substrate(11) includes a monolayer substrate or different dielectrics.
Abstract translation: 目的:提供多层混合超材料结构,以通过根据基底的每层布置具有不同谐振频率的谐振器来增强谐振特性。 构成:元件结构包括具有不同谐振频率的第一谐振器(15)和第二谐振器(16)。 第一和第二谐振器是具有一个间隙的开环谐振器。 第一层的谐振间隙与第二层的谐振间隙不同。 衬底(11)包括单层衬底或不同的电介质。
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公开(公告)号:KR1020110082419A
公开(公告)日:2011-07-19
申请号:KR1020100002382
申请日:2010-01-11
Applicant: 삼성전자주식회사
CPC classification number: H01J25/34 , H01J25/02 , H01S1/00 , H01S2302/02
Abstract: PURPOSE: A terahertz oscillator and a manufacturing method thereof are provided to integrate a cathode, an anode, an oscillation circuit, and a collector on one board, thereby simplifying complete mechanical/magnetic alignment. CONSTITUTION: A board(11) includes an insulation layer(13) and a board layer(12). The board layer is placed on the insulation layer. The insulation layer is supported by a separate supporting layer(14). A cathode(15) comprises an electron beam emitting surface(151). The electron beam emitting surface is placed on the surface vertical to a cathode area of a board layer. An anode(16) controls an electronic beam(B) emitted from the cathode. An oscillation circuit(17) has an optical crystal structure which has a plurality of protrusions(17a,17b).
Abstract translation: 目的:提供一种太赫兹振荡器及其制造方法,以将阴极,阳极,振荡电路和集电器集成在一个板上,从而简化了完整的机械/磁性对准。 构成:板(11)包括绝缘层(13)和板层(12)。 板层放置在绝缘层上。 绝缘层由单独的支撑层(14)支撑。 阴极(15)包括电子束发射表面(151)。 电子束发射表面放置在垂直于电路板层阴极区域的表面上。 阳极(16)控制从阴极发射的电子束(B)。 振荡电路(17)具有具有多个突起(17a,17b)的光学晶体结构。
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公开(公告)号:KR1020110079222A
公开(公告)日:2011-07-07
申请号:KR1020090136216
申请日:2009-12-31
Applicant: 삼성전자주식회사
CPC classification number: B81C1/00063 , B81B2201/0271 , B81C1/00619 , B81C2201/019 , H01J25/34 , H01L25/50 , H01L2924/0002 , H01P11/003 , B81B7/02 , B81B7/00 , B81C1/00 , H01L2924/00
Abstract: PURPOSE: A MEMS element for a Tera Hz oscillator and a manufacturing method thereof are provided to solving problems with depth deviation of the etching floor and curvature radius of edge, which occur as etching depth becomes deeper when a MEMS element is manufactured. CONSTITUTION: A MEMS element for a Tera Hz oscillator comprises a pattern of a penetrating etching hole(150), a first substrate(110), a second substrate(120) and a first structure(100). The first substrate comprises a first face and a second face and the penetrating etching hole pattern passes through the first and second faces. A first pattern of a non-penetrating etching hole is formed on the first face of the first substrate. The second substrate comprises a third face and a fourth face and a second pattern of a non-penetrating etching hole is formed on the third face to face the penetrating etching hole pattern of the first substrate.
Abstract translation: 目的:提供一种用于Tera Hz振荡器的MEMS元件及其制造方法,用于解决当制造MEMS元件时蚀刻深度变深时出现的腐蚀底板的深度偏差和边缘的曲率半径的问题。 构成:用于Tera Hz振荡器的MEMS元件包括穿透蚀刻孔(150),第一衬底(110),第二衬底(120)和第一结构(100)的图案。 第一基板包括第一面和第二面,并且穿透蚀刻孔图案通过第一和第二面。 在第一基板的第一面上形成非贯通蚀刻孔的第一图案。 第二基板包括第三面和第四面,并且在第三面上形成非穿透蚀刻孔的第二图案,以面对第一基板的穿透蚀刻孔图案。
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公开(公告)号:KR1020100086730A
公开(公告)日:2010-08-02
申请号:KR1020090006113
申请日:2009-01-23
Applicant: 삼성전자주식회사
CPC classification number: G01J5/02 , A61B5/01 , A61B5/015 , G01J5/0025 , G01J5/025 , G01J5/08 , G01J5/0821 , G01J5/0837 , G01J5/0896 , G01J2005/0077 , A61B6/00 , A61B5/00
Abstract: PURPOSE: An electronic mirror and an image displaying method using the same are provided to self-diagnose a health state of a body by observing an image corresponding to the body in real time. CONSTITUTION: An electron mirror comprises a display unit(20), a reflection unit(30), a detection unit(10) and a controller(40). The display unit outputs an image. The detection unit is arranged to be adjacent to one side of the display unit. The detection unit comprises the transparent material and receives a message signal. The controller controls the detection unit and the display unit to output the signal received from the detection unit as the image on the display unit. The reflection unit is adjacent to the other side of the display unit and reflects the light which passes through the detection unit and the display unit.
Abstract translation: 目的:提供电子反射镜和使用其的图像显示方法,以通过实时观察与身体对应的图像来自身诊断身体的健康状态。 构成:电子反射镜包括显示单元(20),反射单元(30),检测单元(10)和控制器(40)。 显示单元输出图像。 检测单元布置成与显示单元的一侧相邻。 检测单元包括透明材料并接收消息信号。 控制器控制检测单元和显示单元输出从检测单元接收的信号作为显示单元上的图像。 反射单元与显示单元的另一侧相邻并且反射通过检测单元和显示单元的光。
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公开(公告)号:KR100846503B1
公开(公告)日:2008-07-17
申请号:KR1020060116040
申请日:2006-11-22
Applicant: 삼성전자주식회사
CPC classification number: H01J9/42 , H01J29/04 , H01J31/127
Abstract: A method for aging a field emission device is provided to decrease an error rate of a display device by repairing a short-circuit portion of the tri-pole field emission device. A tri-pole field emission device includes a cathode electrode(110), an anode electrode(140), a gate electrode(120), an insulation layer(125), and an emitter(130). The gate electrode is laminated on the cathode electrode. The insulation layer is formed between the cathode and gate electrodes. The emitter is formed in an emitter hole, which is formed on the gate electrode. The emitter is formed on the cathode electrode to be connected to the cathode electrode. The emitter is made of one of CNT(Carbon Nano Tube), silicon, and molybdenum.
Abstract translation: 提供一种用于老化场发射器件的方法,通过修复三极场发射器件的短路部分来降低显示器件的误码率。 三极场发射装置包括阴极电极(110),阳极电极(140),栅电极(120),绝缘层(125)和发射极(130)。 栅电极层叠在阴极上。 绝缘层形成在阴极和栅电极之间。 发射极形成在形成在栅电极上的发射极孔中。 发射极形成在阴极上,与阴极连接。 发射极由CNT(碳纳米管),硅和钼制成。
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公开(公告)号:KR100818283B1
公开(公告)日:2008-03-31
申请号:KR1020060107485
申请日:2006-11-01
Applicant: 삼성전자주식회사
CPC classification number: H01J63/02 , G02F2001/133625 , H01J9/247 , H01J1/304 , H01J2201/30469
Abstract: A method of manufacturing a field emission array type light emitting unit is provided to improve optical efficiency as improving uniformity of emitted light. A field emission array type light emitting unit includes a rear substrate(20), a front substrate(10), and plural spacers(33). The rear substrate includes a cathode electrode and a CNT(Carbon Nano Tube) emitter. The front substrate includes an anode electrode and a fluorescent layer(12). The spacers are arranged to maintain a constant distance between the front and rear substrates. Diffusion patterns(11) are formed on a front surface of a glass substrate for the front substrate through a wet etching process. The front surface of the glass substrate is divided into at least two regions. The diffusion patterns having different diffusion ratios are formed on the respective regions on the glass substrate.
Abstract translation: 提供一种制造场致发射阵列型发光单元的方法,以提高发光的均匀性提高光学效率。 场发射阵列型发光单元包括后基板(20),前基板(10)和多个间隔件(33)。 后基板包括阴极电极和CNT(碳纳米管)发射极。 前基板包括阳极电极和荧光层(12)。 间隔件布置成在前基板和后基板之间保持恒定的距离。 扩散图案(11)通过湿蚀刻工艺形成在用于前基板的玻璃基板的前表面上。 玻璃基板的前表面被分成至少两个区域。 具有不同扩散比的扩散图案形成在玻璃基板上的各个区域上。
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