METHOD FOR PRODUCING ANTI-REFLECTIVE TEXTURED SURFACE USING ADDITIVE THIN FILM

    公开(公告)号:US20240061152A1

    公开(公告)日:2024-02-22

    申请号:US18234506

    申请日:2023-08-16

    Applicant: Thorlabs, Inc.

    CPC classification number: G02B1/111 G02B1/118 B05D3/148

    Abstract: In a method of producing an anti-reflective surface, instead of etching subwavelength structures directly onto the substrate, a thin film layer of topcoat is deposited onto the surface of the substrate, and the anti-reflective surface is created by etching the structures into the topcoat. Because the thin film can be applied to substrates made of a large number of different materials, only common etching recipes need to be developed for a few thin film materials. The present method overcomes the shortcoming that existing methods of etching structures directly on a substrate would require a different etching recipe for each substrate made of a different material.

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