公开(公告)号：EP1294635A4

公开(公告)日：2004-09-15

申请号：EP01927492

申请日：2001-05-02

Applicant: SILVERBROOK RES PTY LTD

Inventor： SILVERBROOK KIA

IPC: B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  B81B3/00 ,  B81C1/00

CPC classification number: B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

Abstract: A thermal bend actuator ( 6 ) is provided with a group of upper arms ( 23, 25, 26 ) and a group of lower arms ( 27, 28 ) which are non planar, so increasing the stiffness of the arms. The arms ( 23, 25, 26,27,28 ) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material

公开(公告)号：EP1317397A2

公开(公告)日：2003-06-11

申请号：EP01968332.5

申请日：2001-08-30

Applicant: 3M Innovative Properties Company

Inventor： WEAVER, Billy, L. ,  GOETZ, Douglas, P. ,  HAGEN, Kathy, L. ,  HAMERLY, Michael, E. ,  SMITH, Robert, G. ,  THEISS, Silva, K.

IPC: B81B3/00 ,  H01H61/04 ,  F03G7/06

CPC classification number: B81B3/0024 ,  B81B3/0037 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/058 ,  B82Y15/00 ,  H01H2061/006 ,  H01H2061/008

Abstract: A micrometer sized, single-stage, vertical thermal actuator with controlled bending capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator bends generally at the flexure so that the member moves away from the substrate when current is applied to at least the hot arm.

公开(公告)号：EP1008161B1

公开(公告)日：2002-07-10

申请号：EP98944626.5

申请日：1998-08-28

Applicant: JDS Uniphase Corporation

Inventor： DHULER, Vijayakumar, R. ,  WOOD, Robert, L. ,  MAHADEVAN, Ramaswamy

IPC: H01H61/00 ,  F15C5/00

CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B3/0054 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0034 ,  F16K99/0044 ,  F16K2099/0071 ,  F16K2099/0074 ,  F16K2099/008 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H9/14 ,  H01H61/00 ,  H01H61/02 ,  H01H67/26 ,  H01H2001/0042 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  Y10T29/49105

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consumming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause futher arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

公开(公告)号：EP1008161A1

公开(公告)日：2000-06-14

申请号：EP98944626.5

申请日：1998-08-28

Applicant: MCNC

Inventor： DHULER, Vijayakumar, R. ,  WOOD, Robert, L. ,  MAHADEVAN, Ramaswamy

IPC: H01H61/00 ,  F15C5/00

CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B3/0054 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0034 ,  F16K99/0044 ,  F16K2099/0071 ,  F16K2099/0074 ,  F16K2099/008 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H9/14 ,  H01H61/00 ,  H01H61/02 ,  H01H67/26 ,  H01H2001/0042 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  Y10T29/49105

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consumming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause futher arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

公开(公告)号：JP2018529537A

公开(公告)日：2018-10-11

申请号：JP2018521452

申请日：2016-07-13

Applicant: イントレピッド ヴィジョンズ インコーポレーテッド ,  INTREPID VISIONS INC.

Inventor： メノン, カルロ ,  コメイリ, モヒタバ

IPC: H01L41/09 ,  H01L41/04 ,  H01L41/053 ,  B81B7/02 ,  B81B3/00

CPC classification number: B81B3/0024 ,  B81B7/02 ,  B81B2201/031 ,  B81B2203/053 ,  F03G7/065 ,  H01H2061/006

Abstract: マイクロ−カンチレバーの適度に高振動のベース励振のためのシステムおよび方法が開示される。マイクロ−カンチレバーはそのべ—スに隣接する1以上のアクチュエータに連結され得る。アクチュエータは、例えば、電熱加熱の効果ため、または圧電効果のため、電流の印可によって膨張および収縮する、バルク材料、ブリッジ、または形成ワイヤを備え得る。単一のアクチュエータまたはアクチュエータの配列は、マイクロ−カンチレバーの周りに置かれ得、それを振動し、かつ作動パルスを印可する。システムおよび方法、および幾何学的パラメータの調整は、システムにおいて基準固有周波数を引き起こすように実行され得る。固有周波数に相当するシグナルを有するアクチュエータの励振は、システムにおいて共鳴を誘導し、および高振幅振動およびマイクロ−カンチレバーのカンチレバー先端の変位量を引き起こし得る。アクチュエータの種々の構造は、棒の異なる周波数をシミュレーションして、および異なる方向および振幅において変位量を誘導して、実行される。

公开(公告)号：JP2018067299A

公开(公告)日：2018-04-26

申请号：JP2017168276

申请日：2017-09-01

Applicant: イマージョン コーポレーション ,  IMMERSION CORPORATION

Inventor： ヴァヒド・コシュカヴァ ,  ファン・マニュエル・クルス−エルナンデス ,  ヴァンサン・レヴェスク

IPC: G06F3/041 ,  G06F3/01

CPC classification number: F03G7/065 ,  B06B1/0688 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/032 ,  C22F1/006 ,  G06F3/016

Abstract: 【課題】媒体の内部の複数の位置において局部的変形をもたらすことができる触覚アクチュエータデバイスを提供する。 【解決手段】触覚アクチュエータデバイスは、、複数の領域の温度を、形状記憶材料の形状記憶転移温度よりも高い温度まで選択的に制御するステップ210と、領域のうちの少なくとも1つを選択的に変形させるステップ220と、少なくとも1つの領域の変形を維持したまま、その領域の温度を形状記憶転移温度未満まで低下させるステップ230と、次に、印加されたストレスを取り除くステップ240と、その後、この少なくとも1つの領域を、形状記憶転移温度よりも高い温度まで加熱して変形前の形状に戻すステップ250とを含む。 【選択図】図2

公开(公告)号：JP5154444B2

公开(公告)日：2013-02-27

申请号：JP2008549042

申请日：2007-01-05

Applicant: サントル ナスィオナル ド ラ ルシェルシュ スィアンティフィク

Inventor： クロード・リュカ ,  フランシス・メニル ,  エレーヌ・デベダ−ヒッケル ,  パトリック・ジネ

IPC: B81C1/00 ,  B81C99/00 ,  H01L41/29 ,  H01L41/39

CPC classification number: B81C99/0095 ,  B81B2201/0271 ,  B81B2201/031 ,  B81B2203/0109 ,  B81B2203/0118 ,  H01L41/107 ,  H01L41/27 ,  H01L41/29 ,  H01L41/314 ,  Y10T29/42 ,  Y10T428/24917 ,  Y10T428/24926

Abstract: The invention relates to the preparation of multilayer microcomponents which comprise one or more films, each consisting of a material M selected from metals, metal alloys, glasses, ceramics and glass-ceramics. The method consists in depositing on a substrate one or more films of an ink P, and one or more films of an ink M, each film being deposited in a predefined pattern selected according to the structure of the microcomponent, each film of ink P and each film of ink M being at least partially consolidated before deposition of the next film; effecting a total consolidation of the films of ink M partially consolidated after their deposition, to convert them to films of material M; totally or partially removing the material of each of the films of ink P. An ink P consists of a thermoset resin containing a mineral filler or a mixture comprising a mineral filler and an organic binder. An ink M consists of a mineral material precursor of the material M and an organic binder. The inks are deposited by pouring or by extrusion.

公开(公告)号：JPWO2003045838A1

公开(公告)日：2005-04-07

申请号：JP2003547301

申请日：2001-11-29

Applicant: アオイ電子株式会社 ,  株式会社テクノネットワーク四国

Inventor： 橋口　原 ,  原 橋口 ,  三原　豊 ,  豊 三原 ,  岳生 吹野 ,  岳生 吹野 ,  原　隆文 ,  隆文 原 ,  藤田　博之 ,  博之 藤田

IPC: B81B3/00 ,  B25J7/00 ,  B25J15/08 ,  B81B7/00 ,  B81C1/00 ,  F03G7/06 ,  G02B21/32

CPC classification number: B81C99/002 ,  B25J7/00 ,  B25J9/0015 ,  B25J15/0253 ,  B81B2201/031 ,  F03G7/06 ,  Y10S977/962

Abstract: 本発明のナノグリッパーは、対向する一対のアーム71、71と、この一対のアーム71、71の先端部における対向面に、先端同士を対向させてそれぞれ形成された一対の突起部72、72とから構成されており、この突起部72の先端が、50ナノメートル以下の曲率である。また、この突起部72は、シリコンの結晶であり、(100)面、(001)面および(111)面で構成された頂点を備えた三角錐の形状である。そして、一対のアーム71、71の先端部同士を接近・離間させる、シリコン製の伸縮自在な一対の熱膨張アクチュエータ75、76が設けられている。

公开(公告)号：US20170113918A1

公开(公告)日：2017-04-27

申请号：US15293147

申请日：2016-10-13

Applicant: Vmicro ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

Inventor： Benjamin WALTER ,  Marc FAUCHER

IPC: B81B3/00

CPC classification number: B81B3/0045 ,  B81B3/0021 ,  B81B3/0024 ,  B81B3/0086 ,  B81B2201/02 ,  B81B2201/031 ,  B81B2203/0118 ,  G01P15/123 ,  G01Q10/045 ,  G01Q20/04

Abstract: A microelectromechanical device comprising a mechanical structure extending along a longitudinal direction, linked to a planar substrate by an anchorage situated at one of its ends and able to flex in a plane parallel to the substrate, the mechanical structure comprises a joining portion, which links it to each anchorage and includes a resistive region exhibiting a first and second zone for injecting an electric current to form a resistive transducer, the resistive region extending in the longitudinal direction from an anchorage and arranged so a flexion of the mechanical structure in the plane parallel to the substrate induces a non-zero average strain in the resistive region and vice versa; wherein: the first injection zone is carried by the anchorage; and the second injection zone is carried by a conducting element not fixed to the substrate and extending in a direction, termed lateral, substantially perpendicular to the longitudinal direction.

公开(公告)号：US20160336941A1

公开(公告)日：2016-11-17

申请号：US14961252

申请日：2015-12-07

Applicant: NATIONAL TSING HUA UNIVERSITY

Inventor： Sheng-Shian LI ,  Kuan-Hsien LEE ,  Cheng-Chi CHEN

IPC: H03L1/02

CPC classification number: H03B5/30 ,  B81B3/0081 ,  B81B2201/031 ,  B81B2203/0109 ,  B81B2203/0163 ,  H03B5/04 ,  H03H9/02259 ,  H03H9/2463 ,  H03H2009/02291 ,  H03H2009/02307 ,  H03H2009/02322

Abstract: An ultra low power thermally-actuated oscillator and driving circuit thereof are provided. The ultra low power thermally-actuated oscillator includes proof masses, thermally-actuated element and a plurality of driving elements. The proof masses is symmetrically disposed and suspended from a substrate by spring structure. The thermally-actuated element is a line structure to effectively reduce the motional impedance and direct current power. Wherein, the thermally-actuated element is connected to the proof masses or the spring structure. The plurality of driving elements are respectively disposed on both sides of the thermally-actuated element to provide a driving current. When the driving current flows through the thermally-actuated element, the thermally-actuated element will be deformed and thus the proof masses will be driven to produce a harmonic oscillation.

Abstract translation: 提供了一种超低功率热驱动振荡器及其驱动电路。 超低功率热致动振荡器包括检测质量块，热致动元件和多个驱动元件。 证明质量通过弹簧结构对称地设置和悬挂在基板上。 热致动元件是有效降低运动阻抗和直流电力的线结构。 其中，热致动元件连接到防弹块或弹簧结构。 多个驱动元件分别设置在热致动元件的两侧以提供驱动电流。 当驱动电流流过热致动元件时，热致动元件将变形，从而驱动检测质量产生谐波振荡。