公开(公告)号：US20160023889A1

公开(公告)日：2016-01-28

申请号：US14532675

申请日：2014-11-04

Applicant: Silicon Laboratories Inc.

Inventor： Emmanuel P. Quevy ,  Jeremy R. Hui ,  Carrie Wing-Zin Low

IPC: B81B7/00 ,  B81C1/00 ,  B81B3/00

CPC classification number: B81C1/00246 ,  B81B3/0021 ,  B81B7/007 ,  B81B7/0077 ,  B81B7/008 ,  B81B2201/0214 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00158 ,  B81C1/00269 ,  B81C1/00285 ,  B81C1/00333 ,  B81C1/0038 ,  B81C2201/0105 ,  B81C2201/056 ,  B81C2203/0118 ,  B81C2203/0136 ,  B81C2203/0172 ,  B81C2203/019 ,  B81C2203/0735 ,  G01N27/223 ,  G01N27/227

Abstract: Membrane transducer structures and thin-film encapsulation methods for manufacturing the same are provided. In one example, the thin film encapsulation methods may be implemented to co-integrate processes for thin-film encapsulation and formation of microelectronic devices and microelectromechanical systems (MEMS) that include the membrane transducers.

Abstract translation: 提供了用于制造薄膜换能器结构和薄膜封装方法。 在一个示例中，可以实现薄膜封装方法以共同整合用于薄膜封装和形成微电子器件的工艺和包括膜换能器的微机电系统（MEMS）。

公开(公告)号：US20130126022A1

公开(公告)日：2013-05-23

申请号：US13635972

申请日：2011-03-10

Applicant: Christian Schoen ,  Michael Wagner

Inventor： Christian Schoen ,  Michael Wagner

IPC: B01J4/00

CPC classification number: B01J4/001 ,  B01L3/502707 ,  B01L3/502738 ,  B01L3/502746 ,  B01L2200/0621 ,  B01L2200/10 ,  B01L2300/0636 ,  B01L2300/0681 ,  B01L2300/0816 ,  B01L2300/0822 ,  B01L2300/0864 ,  B01L2300/0887 ,  B01L2300/161 ,  B01L2400/0406 ,  B01L2400/0688 ,  B01L2400/088 ,  B81C1/00047 ,  B81C1/00063 ,  B81C2201/0105 ,  B81C2201/0143 ,  B81C2201/0156 ,  Y10T137/85938

Abstract: The invention relates to a component (4) of a biosensor, comprising at least one first device (6) for receiving a sample liquid, wherein the device (6) is connected via a distributor channel (7) to further receiving devices (8 to 11), into each of which a feed channel (71, 72, 73, 74) branching off from the distributor channel (7) opens, and the feed channels (71, 72, 73, 74) are arranged in succession in flow direction (S) of the sample liquid passed on through the distributor channel (7). In accordance with the invention, it is envisaged that, in the distributor channel (7), in each case between two immediately successive feed channels (71, 72; 72, 73; 73, 74) in flow direction (S), at least one region (K) for at least temporary slowing or stoppage of the capillary flow of the sample liquid has been inserted. It is thus possible to control the capillary flow of the sample liquid such that always only one receiving device (8, 9, 10, 11) is filled with the volume flow of sample liquid available before the next is filled, and effectively simultaneous filling of the receiving devices (8, 9, 10, 11) is prevented. This leads to rapid and complete filling of the respective receiving device (8, 9, 10, 11). Additionally presented is a process with which the regions (K) can be inserted into the distributor channel (7) in a simple manner.

Abstract translation: 本发明涉及生物传感器的组件（4），其包括用于接收样品液体的至少一个第一装置（6），其中所述装置（6）经由分配器通道（7）连接到另外的接收装置（8至 其中，从分配器通道（7）分支出的进料通道（71,72,73,74）打开，并且进料通道（71,72,73,74）在流动方向上连续地排列 （S）通过分配器通道（7）通过的样品液体。 根据本发明，设想在分配器通道（7）中，在每种情况下，在流动方向（S）处的两个紧邻的供给通道（71,72; 72,73; 73,74）之间至少 已经插入了用于至少暂时放慢或停止样品液体的毛细管流动的区域（K）。 因此，可以控制样品液体的毛细管流动，使得总是只有一个接收装置（8,9,10,11）填充下一个填充之前可用的样品液体的体积流量，并且有效地同时填充 接收装置（8,9,10,11）被防止。 这导致相应的接收装置（8,9,10,11）的快速和完全的填充。 另外提出了一种可以简单地将区域（K）插入到分配器通道（7）中的过程。

公开(公告)号：KR1020160024361A

公开(公告)日：2016-03-04

申请号：KR1020157036614

申请日：2014-06-11

Applicant: 소이텍

Inventor： 사다카마리암 ,  에스카노트루도빅

IPC: B81C1/00 ,  B81C99/00

CPC classification number: B81C1/00047 ,  B81B1/002 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00158 ,  B81C2201/0105 ,  B81C2201/014 ,  B81C2201/0192

Abstract: 미세전자기계시스템(MEMS: microelectromechanical system) 트랜스듀서의형성에이용될수 있는, 하나이상의공동(106)을포함하는반도체구조를형성하는방법은, 제 1 기판에하나이상의공동(100)을형성하는단계, 하나이상의공동내에희생재료(110)를제공하는단계, 제 1 기판의표면위에제 2 기판(120)을접합하는단계, 제 1 기판의일부를통해희생재료로하나이상의구멍(140)을형성하는단계, 및하나이상의공동내로부터희생재료를제거하는단계를포함한다. 구조및 디바이스는그와같은방법을이용하여제조된다.

公开(公告)号：KR1020060080985A

公开(公告)日：2006-07-12

申请号：KR1020050001278

申请日：2005-01-06

Applicant: 삼성전자주식회사

Inventor： 노광춘 ,  김규식 ,  배기덕

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B2203/0154 ,  B81C1/00142 ,  B81C2201/0105 ,  B81C2201/0132

Abstract: 본 발명의 마이크로미러 액튜에이터는, 일면에 소정 깊이의 트렌치가 형성된 기판과; 트렌치 내에 마련되는 적어도 하나의 하부전극과; 회동위치에 따라서 입사광을 소정 방향으로 반사시키는 마이크로미러와; 마이크로미러를 지지하며, 하나 이상의 하부전극과의 상호작용에 의한 정전력에 의해 회동되는 회동유닛;을 포함하는 것을 특징으로 한다.