Interferometry systems and methods of using interferometry systems
    61.
    发明申请
    Interferometry systems and methods of using interferometry systems 有权
    干涉测量系统和使用干涉测量系统的方法

    公开(公告)号:US20050248772A1

    公开(公告)日:2005-11-10

    申请号:US11112375

    申请日:2005-04-22

    Abstract: In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly, determining values of a first parameter and a second parameter for different positions of the measurement object from the monitored distances, wherein for a given position the first parameter is based on the monitored distances of the measurement object along each of the three different measurement axes at the given position, and for a given position the second parameter is based on the monitored distance of the measurement object along each of two of the measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from the first and second parameter values.

    Abstract translation: 通常,在一个方面,本发明的特征在于,包括在沿着三个不同测量轴中的每一个干涉测量组件和测量对象之间进行干涉测量同时相对于干涉测量组件移动测量对象的干涉测量方法,确定第一参数的值, 测量对象与监测距离的不同位置的第二参数,其中对于给定位置,第一参数基于测量对象沿给定位置处的三个不同测量轴中的每一个的监测距离,以及对于给定位置 位置第二参数是基于测量对象沿着给定位置处的两个测量轴中的每一个的监测距离,以及从第一和第二参数值导出关于测量对象的表面图形的信息。

    Wavelength dispersion measuring apparatus and polarization dispersion
measuring apparatus
    62.
    发明授权
    Wavelength dispersion measuring apparatus and polarization dispersion measuring apparatus 失效
    波长色散测量装置和偏振色散测量装置

    公开(公告)号:US5995228A

    公开(公告)日:1999-11-30

    申请号:US250089

    申请日:1999-02-16

    Abstract: A first tunable wavelength pulse light source is driven by a reference signal to emit a first optical pulse. An optical demultiplexer demultiplexes a first optical pulse emitted from the first pulse light source into a reference optical pulse and an incident optical pulse to be sent into an object to be measured. An optical multiplexer multiplexes the reference optical pulse and an outgoing optical pulse passing through the object to output multiplexed light. A second pulse light source generates a second optical pulse which is synchronous with the first optical pulse and delays a predetermined time for each period of the first optical pulse. A sampling unit receives the multiplexed light and the second optical pulse to obtain an optical pulse train signal proportional to the intensity of the multiplexed light obtained in synchronism with the second optical pulse. From the optical pulse train signal from the sampling unit, a signal processor obtains an envelope formed by peaks of individual optical pulses forming the optical pulse train. The wavelength dispersion of the object is obtained by measuring the delay time of the outgoing optical pulse passing through the object on the basis of intervals between the peaks of the envelope.

    Abstract translation: 第一可调波长脉冲光源由参考信号驱动以发射第一光脉冲。 光解复用器将从第一脉冲光源发射的第一光脉冲解复用为参考光脉冲和入射光脉冲,以发送到待测物体中。 光复用器复用参考光脉冲和通过物体的输出光脉冲以输出多路复用光。 第二脉冲光源产生与第一光脉冲同步的第二光脉冲,并延迟第一光脉冲的每个周期的预定时间。 采样单元接收复用光和第二光脉冲,以获得与与第二光脉冲同步获得的多路复用光的强度成比例的光脉冲串信号。 从采样单元的光脉冲信号中,信号处理器获得由形成光脉冲串的各个光脉冲的峰值形成的包络。 通过基于信封的峰值之间的间隔测量通过物体的输出光脉冲的延迟时间来获得物体的波长色散。

    Polarization interferometer apparatus using the polarization dependent
phase lag in a birefringent retarder
    63.
    发明授权
    Polarization interferometer apparatus using the polarization dependent phase lag in a birefringent retarder 失效
    在双折射延迟器中使用偏振相位滞后的偏振干涉仪装置

    公开(公告)号:US5841536A

    公开(公告)日:1998-11-24

    申请号:US904535

    申请日:1997-08-01

    CPC classification number: G01J9/0246 G01J2009/0261

    Abstract: An inexpensive and accurate wavemeter for measuring the wavelength of monochromatic light is described. The device uses the wavelength dependent phase lag between principal polarization states of a length of birefringent material (retarder) as the basis for measuring the optical wavelength. The retarder is sandwiched between a polarizer and a polarizing beamsplitter and is oriented such that its principal axes are non-orthogonal to the axis of the polarizer and the principal axes of the beamsplitter. As a result of the disparity in propagation velocities between the principal polarization states of the retarder, the ratio of the optical power exiting the two ports of the polarizing beamsplitter is wavelength dependent. If the input wavelength is known to be within a specified range, the measurement of the power ratio uniquely determines the input wavelength. The device offers the advantage of trading wavelength coverage for increased resolution simply through the choice of the retarder length. Implementations of the device employing both bulk-optic components and fiber-optic components are described.

    Abstract translation: 描述了用于测量单色光的波长的廉价且精确的波长计。 该器件使用双折射材料(延迟器)长度的主极化状态之间的波长相关相位滞后作为测量光学波长的基础。 缓速器被夹在偏振器和偏振分束器之间,并且被定向成使得其主轴与偏振器的轴线和分束器的主轴非正交。 由于延迟器的主极化状态之间的传播速度的差异,离开偏振分束器的两个端口的光功率的比率是波长相关的。 如果已知输入波长在指定范围内,则功率比的测量唯一地确定输入波长。 该器件通过选择延迟器长度,提供交易波长覆盖的优势,以提高分辨率。 描述了采用本体光学部件和光纤部件两者的实现方案。

    Wide field of view coherent light detector and locator
    64.
    发明授权
    Wide field of view coherent light detector and locator 失效
    宽视野相干光检测器和定位器

    公开(公告)号:US5838441A

    公开(公告)日:1998-11-17

    申请号:US899062

    申请日:1997-07-23

    Abstract: The present invention is a wide field of view electro-optic detector and locator of coherent light of unknown wavelength that includes a collecting optic that collimates incoming optical radiation, a common-path electro-optic polarization interferometer placed at an exit pupil plane, an imaging optic, a detector array placed one focal length away from said imaging optic, an image processor that processes the incoming signal in a manner that is independent of the phase of the modulation signal, and an output device. The preferred collecting optic includes a first lens, a field lens, and a collimating lens. The preferred interferometer includes a first polarizer, a liquid crystal variable phase modulator, a fixed phase retarder, and a second polarizer.

    Abstract translation: 本发明是具有未知波长的相干光的电光检测器和定位器的宽视野,其包括准直入射光辐射的收集光学器件,放置在出射光瞳平面处的公共电光偏振干涉仪,成像 远离所述成像光学元件放置一个焦距的检测器阵列,以独立于所述调制信号的相位的方式处理所述输入信号的图像处理器和输出装置。 优选的收集光​​学元件包括第一透镜,场透镜和准直透镜。 优选的干涉仪包括第一偏振器,液晶可变相位调制器,固定相位延迟器和第二偏振器。

    Homodyne interferometric receiver and calibration method having improved
accuracy and functionality
    65.
    发明授权
    Homodyne interferometric receiver and calibration method having improved accuracy and functionality 失效
    零差干涉式接收机和具有改进的精度和功能的校准方法

    公开(公告)号:US5663793A

    公开(公告)日:1997-09-02

    申请号:US523559

    申请日:1995-09-05

    Applicant: Peter de Groot

    Inventor: Peter de Groot

    CPC classification number: G01J9/02 G01J2009/0261

    Abstract: A method and system for measuring the phase difference between two orthogonally polarized components of a test beam as well as the intensities of these two components. A partially-polarizing beamsplitter (101) divides a polarized test beam (103) into first and second spatially-separated beams (154,104). The first beam (154) passes through a wave plate (160) oriented so as to retard the phase of the s polarization component with respect to the p polarization component. The first beam (154) then passes through a first polarizing beamsplitter (155), to produce a first pair of spatially separated output beams (156,157) with mutually-orthogonal linear polarizations. The second beam (104) is likewise passed through a second polarizing beamsplitter (105) to produce a second pair of linearly-polarized output beams (106,107). Photodetectors (108,109,158,159) send an electrical signals proportional to the intensities of the beams (106,107,156,157) to a computer (99). The computer (99) calculates the phase difference between the s and p polarization components of the test beam, as well as the relative intensities of the s and p polarization components of the test beam. The invention also provides methods and means for calibrating the inventive apparatus using polarizing elements (52,53,54) and a beam block (51). The calibration procedure determines the phase retardance of the wave plate (155), the polarizing characteristics of the partially-polarizing beamsplitter (101), and the electrical characteristics of each of the photodetectors (108.109,158,159).

    Abstract translation: 用于测量测试光束的两个正交极化分量之间的相位差以及这两个分量的强度的方法和系统。 部分偏振分束器(101)将偏振测试光束(103)分成第一和第二空间分离的光束(154,104)。 第一光束(154)通过定向成相对于p偏振分量延迟s偏振分量的相位的波片(160)。 第一光束(154)然后通过第一偏振分束器(155),以产生具有相互正交的线性偏振的第一对空间分离的输出光束(156,157)。 第二光束(104)同样通过第二偏振分束器(105),以产生第二对线性偏振输出光束(106,107)。 光检测器(108,109,158,159)将与光束(106,107,156,157)的强度成比例的电信号发送到计算机(99)。 计算机(99)计算测试光束的s和p偏振分量之间的相位差以及测试光束的s和p偏振分量的相对强度。 本发明还提供了使用偏振元件(52,53,54)和光束块(51)校准本发明的装置的方法和装置。 校准过程确定波片(155)的相位延迟,部分偏振分束器(101)的偏振特性和每个光电检测器(108.109,158,159)的电特性。

    Wavefront sensing apparatus, method and applications
    69.
    发明授权
    Wavefront sensing apparatus, method and applications 有权
    波前感测装置,方法和应用

    公开(公告)号:US09500531B2

    公开(公告)日:2016-11-22

    申请号:US14224353

    申请日:2014-03-25

    CPC classification number: G01J9/02 G01J4/04 G01J2009/0261

    Abstract: A wavefront sensing technique using Polarization Rotation INTerferometry (PRINT) provides a self-referencing, high-resolution, direct measurement of the spatially dependent phase profile of a given optical beam. A self-referencing technique is used to create a reference beam in the orthogonal polarization and a polarization measurement to measure the spatial-dependent polarization parameters to directly determine the absolute phase profile of the beam under test. A high-resolution direct measurement of the spatially-resolved phase profile of one or more optical beams is realized.

    Abstract translation: 使用极化旋转INTerferometry(PRINT)的波前感测技术提供给定光束的空间依赖相位曲线的自参考,高分辨率直接测量。 使用自参考技术在正交极化中产生参考光束,并使用偏振测量来测量空间相关的极化参数,以直接确定被测光束的绝对相位分布。 实现了一个或多个光束的空间分辨相位轮廓的高分辨率直接测量。

    Method and apparatus for polarization-independent RF spectrum analysis of an optical source
    70.
    发明授权
    Method and apparatus for polarization-independent RF spectrum analysis of an optical source 失效
    用于光源的偏振无关RF光谱分析的方法和装置

    公开(公告)号:US07555221B2

    公开(公告)日:2009-06-30

    申请号:US11020930

    申请日:2004-12-23

    CPC classification number: H04B10/2507 G01J9/04 G01J2009/0261

    Abstract: A method and apparatus for polarization-independent RF spectrum analysis of an optical source, the apparatus including a coupler for coupling the light from an optical source under test with light from a continuous-wave (CW) laser. A nonlinear apparatus is coupled to the coupler for modulating the electric field of the light from the CW laser using the temporal intensity of the light from the source under test to generate a modulated signal. The nonlinear apparatus is adapted to mitigate or compensate for any phase difference between polarization components of signals propagated through the nonlinear apparatus. A polarizer is coupled to the nonlinear apparatus for generating a linearly polarized signal from the modulated signal. An optical spectrum analyzer is coupled to the polarizer for measuring the optical spectrum of the linearly polarized signal to determine an RF spectrum of the optical source under test.

    Abstract translation: 一种用于光源的偏振无关RF光谱分析的方法和装置,该装置包括用于将来自被测光源的光与来自连续波(CW)激光的光耦合的耦合器。 非线性装置耦合到耦合器,用于使用来自被测源的光的时间强度来调制来自CW激光的光的电场,以产生调制信号。 非线性装置适于减轻或补偿通过非线性装置传播的信号的极化分量之间的任何相位差。 偏振器耦合到非线性装置,用于从调制信号产生线偏振信号。 光谱分析仪耦合到偏振器,用于测量线偏振信号的光谱,以确定被测光源的RF频谱。

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