公开(公告)号：KR100555513B1

公开(公告)日：2006-03-03

申请号：KR1020030053890

申请日：2003-08-04

Applicant: 삼성전자주식회사

Inventor： 안정훈 ,  이효종 ,  이경태 ,  이경우 ,  이수근 ,  서봉석

IPC: H01L21/28

CPC classification number: H01L21/76877 ,  H01L21/76847

Abstract: 본 발명의 금속배선구조는, 제1 층간절연막 내에 배치된 하부금속배선막패턴을 포함한다. 제1 층간절연막 및 하부금속막패턴 위에는 하부금속막패턴의 일부표면을 노출시키는 비아컨택홀을 갖는 금속간절연막이 배치된다. 금속간절연막 위에는 비아컨택홀을 노출시키는 트랜치를 갖는 제2 층간절연막을 배치시킨다. 비아컨택홀의 측면 및 제2 하부금속배선막패턴의 노출표면 위에는 장벽금속층이 형성된다. 장벽금속층 위에는 비아컨택홀 내부를 채우고 트랜치의 일부를 채우는 제1 상부금속배선막패턴이 배치된다. 제1 상부금속배선막패턴 위에는 보이드확산방지막이 배치된다. 그리고 보이드확산방지막 위에는 트랜치 내부를 모두 채우는 제2 상부금속배선막패턴이 배치된다.

公开(公告)号：KR1020050026272A

公开(公告)日：2005-03-15

申请号：KR1020030063293

申请日：2003-09-09

Applicant: 삼성전자주식회사

Inventor： 이효종 ,  이경우 ,  안정훈 ,  하상록 ,  손홍성 ,  서봉석 ,  홍덕호 ,  정세영 ,  이종원 ,  이수근

IPC: H01L21/28

Abstract: A method of forming a metal line of a semiconductor device is provided to restrain electrical failure of a metal line or a metal plug by using an alloy line. An insulating layer(302) with a damascene pattern composed of a first trench(304a) and a via hole(306) and a second trench(304b) is formed on a lower layer(300). A diffusion barrier(308), a first seed layer, and a first conductive layer are sequentially formed thereon. At this time, the via hole and the second trench are completely filled with the first conductive layer. An additional material layer and a second conductive layer are sequentially formed on the resultant structure to fill completely the first trench. The insulating layer is exposed to the outside by planarizing the resultant structure. An alloy layer(314) is formed in the via hole and the first trench by using a heat treatment.

Abstract translation: 提供形成半导体器件的金属线的方法，以通过使用合金线来抑制金属线或金属插塞的电气故障。 在下层（300）上形成具有由第一沟槽（304a）和通孔（306）和第二沟槽（304b）组成的镶嵌图案的绝缘层（302）。 在其上依次形成扩散阻挡层（308），第一籽晶层和第一导电层。 此时，通孔和第二沟槽被完全填充有第一导电层。 在所得结构上依次形成附加材料层和第二导电层，以完全填充第一沟槽。 通过平坦化所得结构将绝缘层暴露于外部。 通过热处理在通孔和第一沟槽中形成合金层（314）。

公开(公告)号：KR1020020030458A

公开(公告)日：2002-04-25

申请号：KR1020000061094

申请日：2000-10-17

Applicant: 삼성전자주식회사

Inventor： 안정훈 ,  조규철 ,  허태열 ,  강경림

IPC: H01L21/66

Abstract: PURPOSE: A method for inspecting a slip line of a wafer is provided to accurately decide a cause of the slip line and to determine whether the slip line is generated, by determining seven items regarding the cause of the slip line and by synthetically overestimating the items. CONSTITUTION: A crystal structure of the wafer is transformed in the slip line. Whether the slip line is generated by oxygen deposited in a predetermined portion of the wafer during a unit process using the wafer, is determined. Whether the slip line is generated by a planarization degree of the surface of the wafer is determined. Whether the slip line is generated by the position of each fabricating apparatus wherein the respective wafers are transferred, is determined. Whether the slip line is generated by each apparatus for performing a unit process using the wafer is determined. Whether the slip line is generated by the temperature at which the wafer is heated during a unit process using the wafer is determined. Whether the slip line is generated by a crystal growth type of the wafer is determined. Whether the slip line is generated by different vendors of the wafer is determined.

Abstract translation: 目的：提供一种用于检查晶片滑移线的方法，通过确定关于滑线的原因的七个项目，并综合地高估项目的原因，准确地确定滑移线的原因并确定滑移线是否产生 。 构成：晶片的晶体结构在滑移线中变换。 确定在使用晶片的单元处理期间，在晶片的预定部分中沉积的氧是否产生滑移线。 确定滑移线是否由晶片表面的平坦度产生。 确定滑移线是否由其中各个晶片被转印的各个制造装置的位置产生。 确定由用于执行使用晶片的单元处理的每个装置产生滑移线。 确定滑移线是否在使用晶片的单元处理期间由加热晶片的温度产生。 确定滑移线是否由晶体的晶体生长型产生。 确定滑移线是否由晶片的不同供应商产生。

公开(公告)号：KR1020020005940A

公开(公告)日：2002-01-18

申请号：KR1020000039556

申请日：2000-07-11

Applicant: 삼성전자주식회사

Inventor： 심태헌 ,  허태열 ,  강경림 ,  안정훈

IPC: B65B7/02

CPC classification number: H01L21/67376 ,  H01L21/67386

Abstract: PURPOSE: A method for packing wafers without degrading surfaces thereof is provided to effectively prevent the degradation of surfaces of wafers due to the increase of haze or particles on the surfaces when maintaining or transferring the wafers for a long time of about 45 days, thereby smoothing the supply of the wafers. CONSTITUTION: A method for packing wafers without degrading surfaces thereof includes the steps of putting a cassette(100) incorporating wafers into a packing bag by inserting the cassette into a polypropylene bag and next into an aluminium bag(300) after sealing the polypropylene bag loosely, and sealing the packing bag by molding rims of the aluminium bag by mechanical force while tightly contacting the aluminium bag with an outer shape of the cassette, cutting unnecessary rims and sealing the packing bag, wherein the wafers are 300mm.

Abstract translation: 目的：提供一种用于包装晶片而不降低其表面的方法，以便在保持或转移晶片长时间约45天时由于表面上的雾度或颗粒的增加而有效地防止晶片表面的劣化，从而平滑 供应晶圆。 一种用于包装晶片而不降低其表面的方法包括以下步骤：通过将聚丙烯袋松散地密封在一起，将带盒插入聚丙烯袋中并将其放入铝袋（300）中，将包含晶片的盒（100）放入包装袋中 并且通过机械力通过模制铝袋的边缘来密封包装袋，同时将铝袋与盒的外部形状紧密接触，切割不必要的边缘并密封包装袋，其中晶片为300mm。

公开(公告)号：KR1020010017956A

公开(公告)日：2001-03-05

申请号：KR1019990033714

申请日：1999-08-16

Applicant: 삼성전자주식회사

Inventor： 허태열 ,  조규철 ,  안정훈 ,  강경림

IPC: G01N21/84

Abstract: PURPOSE: A distinguishing method is provided to clearly classify a COP(Crystal Originated Particle) and a particle under 0.12 micrometer in a particle count. CONSTITUTION: A vacancy/intersticial mixing wafer(10) having a vacancy abundance area(10a) and an intersticial abundance area(10b) is used as a verifying wafer. A reference particle(32) of a specific size is deposited in the specific location of the intersticial abundance area. A channel mode of the count facility detecting a crystallization defect and the reference particle is evaluated. Thus, a COP and a real particle are divided. The size of a particle distinguished from a COP is detected by using a cheap verifying wafer, not using an expensive pure wafer.

Abstract translation: 目的：提供一种区别的方法，以清晰地分类COP（晶体起源粒子）和颗粒数为0.12微米的颗粒。 构成：使用具有空位丰度区域（10a）和间隙丰度区域（10b）的空位/间隔混合晶片（10）作为验证晶片。 特定尺寸的参考颗粒（32）沉积在间隙丰富区域的特定位置。 评估检测结晶缺陷的计数设备的通道模式和参考颗粒。 因此，COP和真实粒子被分开。 通过使用不使用昂贵的纯晶片的廉价验证晶片来检测与COP区分的粒子的尺寸。

公开(公告)号：KR1020000019546A

公开(公告)日：2000-04-15

申请号：KR1019980037703

申请日：1998-09-12

Applicant: 삼성전자주식회사

Inventor： 안정훈

IPC: F24F13/00

Abstract: PURPOSE: A device and a method for displaying an air conditioner is provided to give a user a sense of the season as well as to increase attentiveness by changing a basic screen color of the display device depending on an indoor and outdoor temperature. CONSTITUTION: A driving controller of the air conditioner is composed of a power device(100), a drive operating device(102), an indoor temperature sensor(104), an indoor heat exchanger sensor(106), an outdoor temperature sensor(108), a microcomputer(110), a wind adjusting wing driving device(112), a compressor driving device(116), an indoor fan driving device(120), an outdoor fan driving device(124), a four way valve driving device(128) and a display device(132). The display device changes the color of a basic screen as well as clears the screen with a blacklight according to the control of the microcomputer.

Abstract translation: 目的：提供一种用于显示空调的装置和方法，以使用户感觉到季节以及通过根据室内和室外温度改变显示装置的基本屏幕颜色来增加注意力。 构成：空调的驱动控制装置由动力装置（100），驱动动作装置（102），室内温度传感器（104），室内热交换器传感器（106），室外温度传感器（108） ），微型计算机（110），风力调节翼驱动装置（112），压缩机驱动装置（116），室内风扇驱动装置（120），室外风扇驱动装置（124），四通阀驱动装置 （128）和显示装置（132）。 显示装置根据微型计算机的控制改变基本屏幕的颜色以及用黑光来清除屏幕。

公开(公告)号：KR1020000008790A

公开(公告)日：2000-02-15

申请号：KR1019980028760

申请日：1998-07-15

Applicant: 삼성전자주식회사

Inventor： 안정훈

IPC: F24F11/00

Abstract: PURPOSE: A duct operation device and the control method thereof for an airconditioner is provided for cooling/beating the space of the area where an airconditioner is not installed. CONSTITUTION: The duct operation device comprises; a power source converted to DC form a commercial AC to meet the requirement of the airconditioner; an operation device(102) to set the operation mode including the volume of wind flow; direction and the temperature of the air discharged from the air vent(7); a control device(104) to control overall motion of the airconditioner by controlling the ventilator motor(33) installed in the duct(31).

Abstract translation: 目的：提供一种用于空调器的管道操作装置及其控制方法，用于冷却/打击未安装空调器的区域的空间。 构成：管道操作装置包括： 转换为DC的电源形成商业AC以满足空调的要求; 操作装置（102），用于设定包括风量的操作模式; 方向和从排气口（7）排出的空气的温度; 通过控制安装在所述管道（31）中的通风机马达（33）来控制所述空调机的整体运动的控制装置（104）。

公开(公告)号：KR1020000007498A

公开(公告)日：2000-02-07

申请号：KR1019980026870

申请日：1998-07-03

Applicant: 삼성전자주식회사

Inventor： 안정훈

IPC: F24F11/00

Abstract: PURPOSE: A purifying work control apparatus is provided to sense the pollution degree of indoor air and to control the purifying work according to the sensed pollution degree of indoor air. CONSTITUTION: The purifying work control apparatus comprises:an indoor pollution degree sensing device(106) sensing the pollution degree of indoor air; and a control device(104) that stops the purifying work by stopping a ventilating fan and an electric dust collector if the pollution degree sensed by the indoor pollution degree sensing device, is over the certain value and keeps over the certain time, and that indicates the mention of ventilation on an indicating device.

Abstract translation: 目的：提供一种净化工作控制装置，用于感测室内空气的污染程度，并根据感测到的室内空气污染程度控制净化工作。 构成：净化工作控制装置包括：感测室内空气污染程度的室内污染度感测装置（106）; 以及控制装置（104），如果由室内污染度感测装置感测到的污染程度超过一定值并停留在一定时间，则停止通风扇和电除尘器的净化工作，并且指示 在指示装置上提及通风。

公开(公告)号：KR200133342Y1

公开(公告)日：1999-05-15

申请号：KR2019930023482

申请日：1993-11-10

Applicant: 삼성전자주식회사

Inventor： 안정훈

IPC: F24F11/02

Abstract: 본 고안은 공기조화기의 직류전력 제어회로에 관한 것으로, 상용전원(1)에 연결되어 상용전원을 정류하여 직류전력으로 변환하는 정류부(2)와, 변환된 직류전력을 평활하는 콘덴서(C1)와, 상기 콘덴서(C1)에 의해 평활되어 정전압의 직류전력을 가변전압, 가변주파수의 3상교류전원으로 변환하는 인버터부(3)와, 상기 인버터부(3)로부터 3상교류전원을 인가받는 압축기(4)를 구비한다. 또한, 본 고안은 태양광으로부터 일사량에 따라 직류전력을 출력하는 태양전지모듈(10)과, 상기 태양전지모듈(10)로부터 출력되는 직류전력의 전압값이 일정전압이상으로 입력될때 태양광으로부터 발생된 직류전력이 상기 인버터부(3)로 인가되도록 하는 인터페이스부(20)를 구비한다. 따라서, 본 고안은 상용전원과 태양광으로부터의 직류전력을 병행하여 사용할 수 있으며, 여름철과 같이 태양전지의 출력특성곡선이 양호한 경우에는 태양광으로부터 변환된 직류전력으로 공기조화기를 운전하므로서 전력소비를 절감하며, 외출시와 같이 공기조화기를 운전정지할 경우에는 스위치를 오프시켜 운용하는등 사용상의 편리를 제공하는 이점이 있다.

公开(公告)号：KR100182651B1

公开(公告)日：1999-05-01

申请号：KR1019950043172

申请日：1995-11-23

Applicant: 삼성전자주식회사

Inventor： 안정훈

IPC: F24F11/02 ,  F24F1/02

Abstract: 본 발명은 필터의 청소시기표시장치 및 방법에 관한 것으로 특히, 운전시간을 누적 적산하여 필터의 청소필요 여부를 판단하고 외부에 청소시기를 표시하는 공기조화기에 있어서, 주변환경에 대한 정보를 입력받는 환경정보입력수단(100)과, 상기 환경정보입력수단(100)에 의해 입력된 환경정보에 상응하여 필터의 청소필요여부를 판단하기 위한 기준시간을 저장한 기준시간저장수단(130)과, 상기 기준시간저장수단(130)에 저장된 기준시간과 상기 누적 적산된 운전시간을 비교하여 필터의 청소필요여부를 판단하여 청소시기이면 외부에 표시하도록 하는 제어수단(140)을 구비하여 주변환경조건에 따라 필터를 청소하기 위한 기준시간을 가변설정할 수 있도록 된 것을 특징으로 한다.