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公开(公告)号：KR100454460B1
公开(公告)日：2004-10-28
申请号：KR1020020019109
申请日：2002-04-09
Applicant: 한국전자통신연구원
IPC: H01L21/00
Abstract: PURPOSE: A micro actuating apparatus for controlling fluid and a micro fluid control apparatus using the same are provided to be capable of optimizing the transfer of a biomass sample having a high viscosity and conductivity, improving response speed, and operating at low temperature. CONSTITUTION: A micro actuating apparatus for controlling fluid is provided with a silicon substrate(100a), an outer wall(101) formed at the upper portion of the silicon substrate by sequentially depositing a silicon oxide layer and a silicon layer, a mobile structure(102) including at least one pair of leaf springs having a restoring force, connected with the outer wall through both ends of the mobile structure, and an actuator formed at the upper portion of the silicon substrate for driving backward or forward the mobile structure by using the expansion of a heating element(106) due to the supply of voltage.
Abstract translation: 目的：提供一种用于控制流体的微动装置和使用该微动装置的微流体控制装置，以便能够优化具有高粘度和导电率的生物质样品的转移，提高响应速度并且在低温下操作。 组成：用于控制流体的微致动装置设置有通过顺序地沉积一氧化硅层和硅层，移动结构（形成在硅衬底的上部的硅衬底（100A），外壁（101） 102），其包括至少一对具有恢复力的板簧，其通过移动结构的两端与外壁连接;以及致动器，其形成在硅衬底的上部，用于通过使用来驱动移动结构向后或向前 由于电压供应而使加热元件（106）膨胀。
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公开(公告)号：KR100439423B1
公开(公告)日：2004-07-09
申请号：KR1020020002495
申请日：2002-01-16
Applicant: 한국전자통신연구원
IPC: H02K33/10
CPC classification number: H01H53/06 , B81B3/0021 , B81B2201/038 , B81B2203/0109 , B81B2203/051 , B81B2203/056 , B81B2203/058 , G02B6/266 , G02B6/3546 , G02B6/3572 , H01H1/0036 , H01H2001/0078
Abstract: The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.
Abstract translation: 本发明涉及一种微机电致动器。 本发明的电磁型微机电致动器具有形成在磁性物质的上侧的微电子基板中的导电束，使得导电束能够平行于微型地移动到平面内模式 电子基板取决于电流流动的方向。 因此，微机电致动器可应用于需要面内模式的大多数电磁微机电系统。
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公开(公告)号：KR1020040050586A
公开(公告)日：2004-06-16
申请号：KR1020020078443
申请日：2002-12-10
Applicant: 한국전자통신연구원
IPC: G02B5/20
CPC classification number: G02B26/001 , G01J3/26 , G02B5/0833 , G02B6/29361 , G02B6/29389 , G02B6/29395
Abstract: PURPOSE: A variable wavelength optical filter and its fabrication method are provided, which have a Fabry-Perot structure using a mirror of high reflectivity stacked with a silicon film and an oxide film. CONSTITUTION: A bottom mirror(180) is formed by stacking silicon film and oxide film in sequence and a silicon film is stacked on the uppermost layer. A top mirror(182) is separated from the bottom mirror and is formed by stacking silicon films and oxide films in sequence, and a silicon film is stacked on the uppermost layer. A connection unit(155) connects the bottom mirror and the top mirror to a semiconductor substrate(100). And electrode pads(140,142) control a gap between the bottom mirror and the top mirror with electrostatic force.
Abstract translation: 目的：提供一种可变波长光学滤波器及其制造方法，其具有使用层叠有硅膜和氧化物膜的高反射率的镜面的法布里 - 珀罗结构。 构成：依次层叠硅膜和氧化膜形成底镜（180），在最上层层叠硅膜。 顶镜（182）与底镜分离，依次层叠硅膜和氧化膜形成，在最上层层叠硅膜。 连接单元（155）将底部反射镜和顶部反射镜连接到半导体衬底（100）。 并且电极焊盘（140,142）利用静电力来控制底部反射镜和顶部反射镜之间的间隙。
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公开(公告)号：KR100420954B1
公开(公告)日：2004-03-02
申请号：KR1020020016686
申请日：2002-03-27
Applicant: 한국전자통신연구원
IPC: G02B26/00
Abstract: PURPOSE: An optical switching element, a fabricating method thereof, and an array structure thereof are provided to form the optical switching element by using an active matrix method and form a mirror portion by using an X-ray lithography method. CONSTITUTION: An optical switching element includes a substrate, a TFT(300), the first insulating layer, the first driving electrode(440), the second driving electrode(445a), an actuator, a support portion, and a mirror portion. The TFT(300) is formed on the substrate. The TFT(300) is coated with the first insulating layer. The first driving electrode(440) is connected to a drain of the TFT(300). The second driving electrode(445a) is formed at an upper portion of the first insulating layer. The actuator is formed with a conductive layer. The support portion is extended from the actuator. The mirror portion is formed on the support portion.
Abstract translation: 目的：提供光开关元件及其制造方法及其阵列结构，以通过使用有源矩阵方法形成光开关元件并通过使用X射线光刻方法形成镜部分。 构成：光开关元件包括基板，TFT（300），第一绝缘层，第一驱动电极（440），第二驱动电极（445a），致动器，支撑部分和镜面部分。 TFT（300）形成在基板上。 TFT（300）涂覆有第一绝缘层。 第一驱动电极（440）连接到TFT（300）的漏极。 第二驱动电极（445a）形成在第一绝缘层的上部。 致动器形成有导电层。 支撑部分从致动器延伸。 镜面部分形成在支撑部分上。
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公开(公告)号：KR100413522B1
公开(公告)日：2004-01-03
申请号：KR1020010085040
申请日：2001-12-26
Applicant: 한국전자통신연구원
IPC: G02B26/08
Abstract: PURPOSE: A method for fabricating a buried inductor magnetically-induced optical switch is provided wherein it is easy and simple to process and assemble a substrate without assembling a number of substrates and optical components. CONSTITUTION: According to the method for fabricating an optical switch which changes a light path by being aligned vertically on a substrate(100) supporting a mirror(300) by a magnetic force of an inductor, a groove(210) where a mirror pocket(200) and the inductor are to be buried is formed on the substrate by etching a back of the substrate. The inductor wound with coil in parallel with the substrate is buried into the groove. Then, the mirror aligned to the mirror pocket and a torsion bar(110) supporting the mirror are formed in a body, by processing a front surface of the substrate, and then the mirror pocket is opened completely.
Abstract translation: 目的：提供一种用于制造埋入式电感器磁感应光开关的方法，其中在不组装基板和光学组件的情况下处理和组装基板容易且简单。 本发明的目的在于提供一种光电开关的制造方法，该光开关通过在通过电感器的磁力支承反射镜（300）的基板（100）上垂直取向来改变光路，其特征在于，槽（210） 通过蚀刻衬底的背面而在衬底上形成要埋入的感应器。 缠绕有与基板平行的线圈的电感器埋入凹槽中。 然后，通过对基板的前表面进行加工，将与镜槽对准的反射镜和支撑反射镜的扭杆（110）形成为一体，然后完全打开镜槽。
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Patent Agency Ranking
公开(公告)号：KR1020030080468A
公开(公告)日：2003-10-17
申请号：KR1020020019109
申请日：2002-04-09
Applicant: 한국전자통신연구원
IPC: H01L21/00
Abstract: PURPOSE: A micro actuating apparatus for controlling fluid and a micro fluid control apparatus using the same are provided to be capable of optimizing the transfer of a biomass sample having a high viscosity and conductivity, improving response speed, and operating at low temperature. CONSTITUTION: A micro actuating apparatus for controlling fluid is provided with a silicon substrate(100a), an outer wall(101) formed at the upper portion of the silicon substrate by sequentially depositing a silicon oxide layer and a silicon layer, a mobile structure(102) including at least one pair of leaf springs having a restoring force, connected with the outer wall through both ends of the mobile structure, and an actuator formed at the upper portion of the silicon substrate for driving backward or forward the mobile structure by using the expansion of a heating element(106) due to the supply of voltage.
Abstract translation: 目的：提供一种用于控制流体的微型致动装置和使用其的微流体控制装置，其能够优化具有高粘度和电导率，改善响应速度和在低温下操作的生物质样品的转移。 构成：用于控制流体的微型致动装置设置有硅衬底（100a），通过依次沉积硅氧化物层和硅层而形成在硅衬底的上部的外壁（101），移动结构（ 102），其包括具有恢复力的至少一对板簧，通过移动结构的两端与外壁连接，以及形成在硅衬底的上部的致动器，用于通过使用来驱动移动结构 由于电压的供给导致的加热元件（106）的膨胀。
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公开(公告)号：KR101863968B1
公开(公告)日：2018-06-04
申请号：KR1020120059148
申请日：2012-06-01
Applicant: 한국전자통신연구원
IPC: H02J17/00
CPC classification number: H02J50/12 , H02J17/00 , H02J50/00 , H02J50/40 , H02J50/80 , Y10T307/25 , Y10T307/297
Abstract: 본발명은, 에너지전송시스템에서무선에너지송수신장치및 그방법에관한것으로, 무선에너지신호를생성하는송신제어기; 상기무선에너지신호를제공하는송신공진체포트; 및상기송신공진체포트를통해제공된무선에너지신호를복수의수신장치들로송신하는송신공진체를포함하며, 상기송신제어기는상기복수의수신장치들의전송특성을고려하여상기복수의수신장치들의수신공진체포트들각각의임피던스를제어하기위한임피던스제어신호를송신한다.
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公开(公告)号：KR1020170053555A
公开(公告)日：2017-05-16
申请号：KR1020160067550
申请日：2016-05-31
Applicant: 한국전자통신연구원 , 순천대학교 산학협력단
IPC: H01B13/00 , H01B5/14 , H01L31/0224 , H01L31/0216 , H01L31/0236 , G06F3/041 , G02F1/1343
CPC classification number: Y02E10/50
Abstract: 본발명의실시예에따른투명전도성산화물박막의제조방법은, 제1 폴리머용액을준비하는단계와, 제2 폴리머용액을준비하는단계와, 상기제1 폴리머용액과상기제2 폴리머용액을혼합한제3 폴리머용액을형성하는단계와, 상기제3 폴리머용액을기판상에코팅하는단계와, 상기기판을건조시켜상기기판상에박막을형성하는단계, 및수소플라즈마처리공정을통해상기박막의표면처리를실시하는단계를포함할수 있다.
Abstract translation: 根据本发明的一个实施方式的透明导电氧化物薄膜的制造方法包括制备聚合物溶液的第一步骤，和第二，包括以下步骤：制备聚合物溶液，其特征在于，所述第一聚合物溶液中，两种聚合物溶液的第二混合物 通过干燥步骤的薄膜的表面上，所述衬底涂覆的阶段和所述第三聚合物溶液中以形成通过的工序的基板上的第三聚合物溶液中，并在基板上形成的薄膜的氢等离子体处理步骤 并执行一个过程。
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