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    Three-dimensional refractively scanning interferometer structure having removable optical cartridge
    71.
    发明公开
    Three-dimensional refractively scanning interferometer structure having removable optical cartridge 失效
    三维干涉仪结构，由折射元件，与设置在可移动的光学盒扫描。

    公开(公告)号：EP0501833A2

    公开(公告)日：1992-09-02

    申请号：EP92301748.7

    申请日：1992-02-28

    Applicant: RESEARCH-COTTRELL TECHNOLOGIES INC.

    Inventor： Ponce, Fred H., c/o Research-Cottrell ,  Pareja, Carlos H., c/o Research-Cottrell ,  Vidrine, Warren D., c/o Research-Cottrell

    IPC: G01J3/453 ,  C11D11/04

    CPC classification number: G01J3/4537

    Abstract: A wedge-type interferometer is supported three-dimensionally by a cast inner shell (180), which contains a readily removable optical cartridge (200) supporting the fixed and movable wedge-shape prisms (78, 74) of the interferometer. The fixed prism is supported from one side of a centerpiece (210) of the cartridge while the movable prism is supported from the other side of the centerpiece for linear, scanning movement. The cartridge may be mechanically and optically aligned prior to insertion into the inner shell, and is easily removed if additional adjustments are required. A first corner cube mirror (82) is supported by a plate (58) secured to one wall of the inner shell and is aligned by micropositioner adjustment in the X-axis. A second corner cube mirror (86) is supported by a plate (64) secured to another wall of the inner shell and is aligned by micropositioner adjustment in the Y-axis. After alignment the inner shell may be mounted in an outer, hermetically-sealed casting (52).

    Abstract translation: 楔形型干涉仪是由其中含有的易除去的光学盒（200），支撑所述干涉仪的固定和可动楔形棱镜（78，74）一铸造内壳（180）所支持的立体形状。 而可动棱镜从中心件为线性扫描运动的另一侧支撑在固定棱镜被从盒的中心件（210）的一侧支撑。 盒可以在插入到内壳之前机械地和光学地对准，并且如果需要额外的调整被容易地除去。 第一立方角镜反射镜（82）被固定到所述内壳的一个壁上的板（58）支撑，并且通过在X轴微定位调整对准。 第二立方角镜反射镜（86）被固定到所述内壳的另一壁的板（64）支撑，并且通过在Y轴微定位调整对准。 对准之后，内壳可以被安装到外，密闭铸件（52）。

    REFRACTIVELY SCANNED INTERFEROMETER
    72.
    发明授权
    REFRACTIVELY SCANNED INTERFEROMETER 失效
    简洁的扫描干涉仪

    公开(公告)号：EP0016147B1

    公开(公告)日：1984-01-25

    申请号：EP79900875.0

    申请日：1978-08-14

    Applicant: DOYLE, Walter M.

    Inventor： DOYLE, Walter M.

    IPC: G01B9/02 ,  G02B5/04

    CPC classification number: G01J3/4537

    Abstract: An interferometer, preferably of the Michelson type, in which the reflectors (19, 21) associated with the interferometer arms (15, 17) are stationary, and scanning is accomplished by motion of a wedge-shaped refractive element (23) in one of the arms, the orientation of the refractive element and its direction of motion (24) being in specific mathematically derived directions which minimize the translatory displacement of the transmitted optical beam.

    POLARISATIONSINTERFEROMETER
    75.
    发明授权
    POLARISATIONSINTERFEROMETER 失效
    POLARISATIONSINTERFEROMETER。

    公开(公告)号：EP0427797B1

    公开(公告)日：1994-09-14

    申请号：EP90901537.2

    申请日：1990-01-15

    Applicant: BÜHLER AG ,  Bran + Lübbe GmbH

    Inventor： WAGNER, Heinz ,  LABHART, Martin ,  GLAUS, Ulrich

    IPC: G01B9/02 ,  G01J3/45

    CPC classification number: G01J3/447 ,  G01B2290/70 ,  G01J3/4537 ,  G01J2009/0261

    Abstract: A polarization interferometer comprises a light source (1), a collimator (2), a first polarization element (3), a system of double-refracting elements (4, 5, 6) and a second polarizing element (7) which polarizes the light emerging from the double-refracting element (4, 5, 6) and directs it to a photon detector (8). The double-refractive element (4, 5, 6) consists of two optical wedges (5, 6) which together constitute a right parallepiped and which are arranged so as to slide relative to each other along opposed side surfaces, and a double-refracting plate (4) with parallel faces which acts as a compensator. The optical axis of the compensator (4) makes a finite angle with those of the two wedges (5, 6) in the plane perpendicular to the light beam, the optical axes of both wedges (5, 6) being coincident. The optical axes of the two polarizers (3, 7) are mutually perpendicular or parallel and are not aligned parallel to the axes of the two wedges (5, 6) of the double-refractive element (4, 5, 6).

    Polarisationsinterferometer
    76.
    发明公开
    Polarisationsinterferometer 失效
    极化干扰仪

    公开(公告)号：EP0605391A3

    公开(公告)日：1994-07-27

    申请号：EP94101353.4

    申请日：1990-01-15

    Applicant: BÜHLER AG ,  Bran + Lübbe GmbH

    Inventor： Wagner, Heinz ,  Labhart, Martin ,  Glaus, Ulrich

    IPC: G01J3/453 ,  G01J3/447

    CPC classification number: G01J3/447 ,  G01B2290/70 ,  G01J3/4537 ,  G01J2009/0261

    Abstract: Das Polarisationsinterferometer weist eine Lichtquelle (1), einen Kollimator (2), ein erstes polarisierendes Element (3), ein System von doppelbrechenden Elementen (4,5,6) und ein zweites polarisierendes Element (7) auf, welches das aus dem doppelbrechenden Element (4,5,6) austretende Licht polarisiert und einem Photonendetektor (8) zuführt. Das doppelbrechende Element (4,5,6) besteht dabei aus zwei, längs entgegengesetzter Seitenflächen gegeneinander verschiebbar angeordneten, sich zu einem Quader ergänzenden, optischen Keile (5,6) und einer als Kompensator dienenden doppelbrechenden planparallelen Platte (4). Die optische Achse des Kompensators (4) ist gegenüber derjenigen der beiden Keile (5,6) in der Ebene senkrecht zum Lichtstrahl um einen endlichen Winkel verdreht, wobei die optischen Achsen der beiden Keile (5,6) übereinstimmen. Die optischen Achsen der beiden Polarisatoren (3,7) stehen senkrecht oder parallel zueinander und sind nicht parallel zu den Achsen der beiden Keile (5,6) des doppelbrechenden Elementes (4,5,6) ausgerichtet. Ein monochromatischer Lichtstrahl (9) wird in den von der Lichtquelle (1) erzeugten parallen Lichtstrahl eingekoppelt und nach Durchquerung mindestens des doppelbrechenden Elementes (4,5,6) wieder ausgekoppelt und auf einen Photonendetektor (13) geführt.

    Three-dimensional refractively scanning interferometer structure having removable optical cartridge
    77.
    发明公开
    Three-dimensional refractively scanning interferometer structure having removable optical cartridge 失效
    具有可拆卸光学盒的三维反射扫描干涉仪结构

    公开(公告)号：EP0501833A3

    公开(公告)日：1993-06-16

    申请号：EP92301748.7

    申请日：1992-02-28

    Applicant: RESEARCH-COTTRELL TECHNOLOGIES INC.

    Inventor： Ponce, Fred H., c/o Research-Cottrell ,  Pareja, Carlos H., c/o Research-Cottrell ,  Vidrine, Warren D., c/o Research-Cottrell

    IPC: G01J3/453 ,  C11D11/04

    CPC classification number: G01J3/4537

    Abstract: A wedge-type interferometer is supported three-dimensionally by a cast inner shell (180), which contains a readily removable optical cartridge (200) supporting the fixed and movable wedge-shape prisms (78, 74) of the interferometer. The fixed prism is supported from one side of a centerpiece (210) of the cartridge while the movable prism is supported from the other side of the centerpiece for linear, scanning movement. The cartridge may be mechanically and optically aligned prior to insertion into the inner shell, and is easily removed if additional adjustments are required. A first corner cube mirror (82) is supported by a plate (58) secured to one wall of the inner shell and is aligned by micropositioner adjustment in the X-axis. A second corner cube mirror (86) is supported by a plate (64) secured to another wall of the inner shell and is aligned by micropositioner adjustment in the Y-axis. After alignment the inner shell may be mounted in an outer, hermetically-sealed casting (52).

    POLARISATIONSINTERFEROMETER
    78.
    发明公开
    POLARISATIONSINTERFEROMETER 失效
    极化干涉。

    公开(公告)号：EP0427797A1

    公开(公告)日：1991-05-22

    申请号：EP90901537.0

    申请日：1990-01-15

    Applicant: BÜHLER AG ,  Bran + Lübbe GmbH

    Inventor： WAGNER, Heinz ,  LABHART, Martin ,  GLAUS, Ulrich

    IPC: G01B9 ,  G01J3 ,  G01J9

    CPC classification number: G01J3/447 ,  G01B2290/70 ,  G01J3/4537 ,  G01J2009/0261

    Abstract: Un interféromètre polarisant comprend une source de lumière (1), un collimateur (2), un premier élément polarisant (3), un système d'éléments biréfringents (4, 5, 6) et un deuxième élément polarisant (7) qui polarise la lumière qui sort de l'élément biréfringent (4, 5, 6) et la transmet à un détecteur (8) de photons. L'élément biréfringent (4, 5, 6) comprend deux coins optiques (5, 6) mobiles l'un par rapport à l'autre le long de faces latérales opposées et qui forment ensemble un carré, ainsi qu'une plaque (4) biréfringente à faces planes et parallèles qui sert de compensateur. L'axe optique du compensateur (4) est décalé d'un angle fini par rapport à l'axe des deux coins (5, 6) sur le plan perpendiculaire au rayon de lumière, les axes optiques des deux coins (5, 6) coïncidant. Les axes optiques des deux polariseurs (3, 7) sont perpendiculaires ou parallèles l'un à l'autre et ne sont pas parallèles aux axes des deux coins (5, 6) de l'élément biréfringent (4, 5, 6).

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