VERFAHREN ZUR HERSTELLUNG EINER TEILCHENSTRAHLQUELLE
    71.
    发明申请
    VERFAHREN ZUR HERSTELLUNG EINER TEILCHENSTRAHLQUELLE 审中-公开
    制造方法粒子束

    公开(公告)号:WO2008104394A1

    公开(公告)日:2008-09-04

    申请号:PCT/EP2008/001584

    申请日:2008-02-28

    Inventor: SELLMAIR, Josef

    Abstract: Die Erfindung betrifft ein Verfahren zur Herstellung einer mikromechanischen Teilchenstrahlquelle, welche wenigstens eine Feldemitterspitze zur Abstrahlung von Teilchen aufweist, wobei das Verfahren die folgenden Schritte aufweist: Aufbringen mindestens einer Oberflächenlage aus einem elektrisch halbleitenden oder leitenden Material auf die Oberfläche (2) eines Substrates (1); Strukturieren der mindestens einen auf das Substrat (1) aufgebrachten Oberflächenlage dergestalt, dass eine möglichst schmale Bahn von geringer Höhe gefertigt wird; teilweises Abtragen von zwischen den Bahnen liegenden, freiliegenden Bereichen der elektrisch isolierenden Substratoberfläche dergestalt, dass die Bedeckung der Bereiche der neu entstandenen elektrisch isolierenden Substratoberfläche durch die darüber liegenden Oberflächenlagen (3, 4) verhindert wird; Aufbringen einer weiteren leitfähigen Lage (6) auf die so entstandene Oberfläche; und Aufbringen der Feldemitterspitze auf die schmale Bahn und hierbei exakte Positionierung der Feldemitterspitze (8) mit einer Genauigkeit von wenigen nm im Zentrum der optischen Achse der mikromechanischen Teilchenstrahlquelle.

    Abstract translation: 本发明涉及一种用于制造微机械粒子束,其具有用于颗粒的发射的至少一个场致发射体尖端,所述方法包括以下步骤:在基板的表面(2)上施加至少一个半导电或导电材料的表面层(1 ); 图案化的至少一个施加到基板(1)表面的位置,使得尽可能窄的路径由一个低的高度的; 部分除去腹板之间卧,所述电绝缘衬底表面的暴露部分在由所述上覆表层的新形成的电绝缘基板表面的区域的覆盖范围(3,4)防止这样的方式的; 所得到的表面上的另一导电层(6)中的应用; 以及将所述窄路径上的场致发射体尖端,和场致发射体尖端(8)用几nm的微机械粒子束的光轴的中心的准确度的这种精确定位。

    IMPROVED PROBE SYSTEM COMPRISING AN ELECTRIC-FIELD-ALIGNED PROBE TIP AND METHOD FOR FABRICATING THE SAME
    72.
    发明申请
    IMPROVED PROBE SYSTEM COMPRISING AN ELECTRIC-FIELD-ALIGNED PROBE TIP AND METHOD FOR FABRICATING THE SAME 审中-公开
    改进的包含电场对准探头提示的探针系统及其制造方法

    公开(公告)号:WO2007047337A2

    公开(公告)日:2007-04-26

    申请号:PCT/US2006/039824

    申请日:2006-10-10

    Abstract: A mechanically stable and oriented scanning probe tip comprising a carbon nanotube having a base with a gradually decreasing diameter, with a sharp tip at the probe tip. Such a tip or an array of tips is produced by depositing a catalyst metal film on a substrate, depositing a carbon dot on the catalyst metal film, etching away the catalyst metal film not masked by the carbon dot, removing the carbon dot from the catalyst metal film to expose the catalyst metal film and growing a carbon nanotube probe tip on the catalyst metal film. The carbon probe tips can be straight, angled, or sharply bent and have various technical applications.

    Abstract translation: 一种机械稳定和取向的扫描探针尖端,其包括具有逐渐减小的直径的基底的碳纳米管,在探针尖端具有尖锐的尖端。 通过在基板上沉积催化剂金属膜,在催化剂金属膜上沉积碳点,蚀刻未被碳点掩蔽的催化剂金属膜,从催化剂中除去碳点,从而制造这种尖端或尖端阵列 金属膜暴露催化剂金属膜并在催化剂金属膜上生长碳纳米管探针尖端。 碳探针尖端可以是直的,有角度的或急剧弯曲的,并具有各种技术应用。

    FIELD EMISSION DEVICE
    73.
    发明申请
    FIELD EMISSION DEVICE 审中-公开
    场发射装置

    公开(公告)号:WO2004001785A3

    公开(公告)日:2004-04-08

    申请号:PCT/GB0302634

    申请日:2003-06-19

    Abstract: There is disclosed an improved field emission device (30) which finds use in display devices, such as a flat panel displays. Known devices and displays suffer from problems such as complexity of fabrication and limited colour gamut. The device (30) therefore provides a field emission backplate (38) which is made from a substantially semiconductor based material and comprises a plurality of grown tips (32), the device (30) further comprising at least one electro-luminescent and/or photo-luminescent material (34) having a fluorescent material chemically attached thereto, i.e. a fluorescent dye doped material.

    Abstract translation: 公开了一种可用于诸如平板显示器的显示装置中的改进的场致发射装置(30)。 已知的装置和显示器存在制造复杂性和色域有限等问题。 因此,装置(30)提供由基本上半导体的材料制成并包括多个生长的尖端(32)的场发射背板(38),所述装置(30)还包括至少一个电致发光和/或 具有与其化学连接的荧光材料的光致发光材料(34),即荧光染料掺杂材料。

    IMPROVED FIELD EMISSION DEVICE
    74.
    发明申请
    IMPROVED FIELD EMISSION DEVICE 审中-公开
    改进的场发射装置

    公开(公告)号:WO2004001785A2

    公开(公告)日:2003-12-31

    申请号:PCT/GB2003/002634

    申请日:2003-06-19

    Abstract: There is disclosed an improved field emission device (30) which finds use in display devices, such as a flat panel displays. Known devices and displays suffer from problems such as complexity of fabrication and limited colour gamut. The device (30) therefore provides a field emission backplate (38) which is made from a substantially semiconductor based material and comprises a plurality of grown tips (32), the device (30) further comprising at least one electro-luminescent and/or photo-luminescent material (34) having a fluorescent material chemically attached thereto, i.e. a fluorescent dye doped material.

    Abstract translation: 公开了一种可用于诸如平板显示器的显示装置中的改进的场致发射装置(30)。 已知的装置和显示器存在制造复杂性和色域有限等问题。 因此,装置(30)提供由基本上半导体的材料制成并包括多个生长的尖端(32)的场发射背板(38),所述装置(30)还包括至少一个电致发光和/或 具有与其化学连接的荧光材料的光致发光材料(34),即荧光染料掺杂材料。

    Probe System Comprising an Electric-Field-Aligned Probe Tip and Method for Fabricating the Same
    77.
    发明申请
    Probe System Comprising an Electric-Field-Aligned Probe Tip and Method for Fabricating the Same 有权
    包括电场对准探头尖端的探头系统及其制造方法

    公开(公告)号:US20080272299A1

    公开(公告)日:2008-11-06

    申请号:US12088223

    申请日:2006-10-10

    Abstract: A mechanically stable and oriented scanning probe tip comprising a carbon nanotube having a base with gradually decreasing diameter, with a sharp tip at the probe tip. Such a tip or an array of tips is produced by depositing a catalyst metal film on a substrate (10 & 12 in FIG. 1(a)), depositing a carbon dot (14 in FIG. 1(b)) on the catalyst metal film, etching away the catalyst metal film (FIG. 1(c)) not masked by the carbon dot, removing the carbon dot from the catalyst metal film to expose the catalyst metal film (FIG. 1(d)), and growing a carbon nanotube probe tip on the catalyst film (16 in FIG. 1(e)). The carbon probe tips can be straight, angled, or sharply bent and have various technical applications.

    Abstract translation: 一种机械稳定和取向的扫描探针尖端,其包括具有逐渐减小的直径的基底的碳纳米管,在探针尖端具有尖锐的尖端。 通过在衬底(图10中的10和12)(图1(a))上沉积催化剂金属膜( a))沉积碳点(14 在催化剂金属膜上的图1( b)中,蚀刻掉催化剂金属膜(图1)( c ))未被碳点掩蔽,从催化剂金属膜除去碳点以暴露催化剂金属膜(图1( d)),并且生长碳纳米管 探针尖端在催化剂膜上(图1中的16)(图1)( e))。 碳探针尖端可以是直的,有角度的或急剧弯曲的,并具有各种技术应用。

    Field emission device
    78.
    发明授权
    Field emission device 失效
    场发射装置

    公开(公告)号:US07304420B2

    公开(公告)日:2007-12-04

    申请号:US11016346

    申请日:2004-12-17

    Abstract: A field emission device having improved properties and which finds use in display devices, such as a flat panel displays. Known devices and displays suffer from problems such as complexity of fabrication and limited color gamut. The present device provides a field emission backplate which is made from a substantially semiconductor based material and has a plurality of grown tips. The device also includes at least one electro-luminescent or photo-luminescent material having a fluorescent material such as a fluorescent dye doped material chemically attached thereto.

    Abstract translation: 具有改进性能并可用于诸如平板显示器的显示装置中的场致发射装置。 已知的装置和显示器存在制造复杂性和色域有限等问题。 本发明的装置提供了一种场致发射背板,其由基本上为半导体的材料制成并且具有多个生长的尖端。 该装置还包括至少一种具有荧光材料的电致发光或光致发光材料,例如与其化学连接的荧光染料掺杂材料。

    Field emission device and a method of forming such a device
    80.
    发明申请
    Field emission device and a method of forming such a device 审中-公开
    场致发射装置及其形成方法

    公开(公告)号:US20060267475A1

    公开(公告)日:2006-11-30

    申请号:US10554605

    申请日:2004-04-26

    Abstract: A field emission device (1) may be used for emitting electrons in, for example, a field emission display (FED). Field emission tips (40) are used for the emitting of electrons in the field emission device (1). In operation of the field emission device (1) a voltage is applied between a first electrode (4) having electrical contact with the field emission tip (40) and a second electrode (34) to make the field emission tip (40) emit electrons. To form a field emission tip (40) a layer of liquid material is applied on a substrate (2) provided with the first electrode (4). The layer of liquid material is embossed with a patterned stamp and subsequently cured to form a field emission tip structure (20). A conductive film (38) is applied on the field emission tip structure (20) to form a field emission tip (40) that has electrical contact with the first electrode (4).

    Abstract translation: 场发射器件(1)可以用于例如场致发射显示器(FED)中的电子发射。 场发射尖端(40)用于场发射装置(1)中的电子发射。 在场致发射器件(1)的操作中,在与场发射尖端(40)电接触的第一电极(4)和第二电极(34)之间施加电压,以使场发射尖端(40)发射电子 。 为了形成场致发射尖端(40),在设置有第一电极(4)的衬底(2)上施加一层液体材料。 液体材料层被压印有图案化的印模并随后固化以形成场致发射尖端结构(20)。 导电膜(38)被施加到场发射尖端结构(20)上以形成与第一电极(4)电接触的场致发射尖端(40)。

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