公开(公告)号：US20090309023A1

公开(公告)日：2009-12-17

申请号：US12482577

申请日：2009-06-11

Applicant: Simon Page

Inventor： Simon Page

IPC: G01N23/00

CPC classification number: H01J37/05 ,  G01N23/2273 ,  H01J37/08 ,  H01J37/295 ,  H01J37/30 ,  H01J2237/05 ,  H01J2237/08 ,  H01J2237/0815

Abstract: The present invention provides an electron spectroscopy apparatus (12) comprising a high energy particle source (12) for irradiating a sample, an electron detector system (16) (e.g. including a delay line detector) for detecting electrons emitted from the sample and an ion gun (8) for delivering a polycyclic aromatic hydrocarbon (PAH) ion beam to the sample, wherein the ion gun comprises a polycyclic aromatic hydrocarbon ion source, for example comprising coronene. In an embodiment, the PAH is located in a heated chamber (22) and vaporised to produce gas phase PAH. The gas phase PAH molecules are then ionised by electron impact, extracted from the ion source via an extraction field and focussed using ion optics. The PAH ion beam can be used for surface cleaning and depth analysis.

Abstract translation: 本发明提供了一种包括用于照射样品的高能粒子源（12），用于检测从样品发射的电子的电子检测器系统（16）（例如包括延迟线检测器）的电子分光装置（12） 用于将多环芳烃（PAH）离子束输送到样品的枪（8），其中所述离子枪包括多环芳族烃离子源，例如包含芳烃。 在一个实施方案中，PAH位于加热室（22）中并蒸发以产生气相PAH。 气相PAH分子然后通过电子轰击电离，通过提取场从离子源提取，并使用离子光学聚焦。 PAH离子束可用于表面清洁和深度分析。

公开(公告)号：US20090095894A1

公开(公告)日：2009-04-16

申请号：US11872576

申请日：2007-10-15

Applicant: Bon Woong Koo ,  Frank Sinclair

Inventor： Bon Woong Koo ,  Frank Sinclair

IPC: H05H3/02

CPC classification number: H01J37/026 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/04 ,  H01J2237/05

Abstract: Techniques for commensurate cusp-field for effective ion beam neutralization are disclosed. In one particular exemplary embodiment, the techniques may be realized as a charged particle injection system comprising a beamguide configured to transport an ion beam through a dipole field. The charged particle injection system may also comprise a first array of magnets and a second array of magnets configured to generate a multi-cusp magnetic field, positioned along at least a portion of an ion beam path, the first array of magnets being on a first side of the ion beam path and the second array of magnets being on a second side of the ion beam path. The charged particle injection system may further comprise a charged particle source having one or more apertures configured to inject charged particles into the ion beam path. The charged particle injection system may furthermore align the one or more apertures with at least one of the first array of magnets and the second array of magnets to align the injected charged particles from the charged particle source with one or more magnetic regions for an effective charged particle diffusion into the ion beam path.

Abstract translation: 公开了用于有效离子束中和的相应尖点的技术。 在一个特定的示例性实施例中，技术可以被实现为带电粒子注入系统，其包括配置成将离子束传送通过偶极子场的波导。 带电粒子注入系统还可以包括第一磁体阵列和配置成产生沿离子束路径的至少一部分定位的多尖点磁场的第二磁体阵列，第一磁体阵列位于第一 离子束路径的一侧和第二磁体阵列位于离子束路径的第二侧上。 带电粒子注入系统还可以包括具有一个或多个孔的带电粒子源，其被配置为将带电粒子注入到离子束路径中。 带电粒子注入系统还可以将一个或多个孔与第一磁体阵列和第二磁体阵列中的至少一个对准，以将来自带电粒子源的注入的带电粒子与一个或多个磁性区域对准，用于有效带电 粒子扩散入离子束路径。

公开(公告)号：US20060033041A1

公开(公告)日：2006-02-16

申请号：US11203002

申请日：2005-08-11

Applicant: Shian-Jyh Lin ,  Yuan-Song Tai

Inventor： Shian-Jyh Lin ,  Yuan-Song Tai

IPC: B01D59/44

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J2237/05 ,  H01J2237/24405 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24507 ,  H01J2237/31703

Abstract: An ion beam energy monitor system and method thereof. A physical field generator generates a physical field in a direction not parallel to an ion beam, refracting the ion beam, and a receiving device located on the path of the refracted ion beam receives the ion beam and calculates the energy thereof according to a collision distribution of ions of the ion beam. The output energy of the ion beam is thus being well adjusted.

Abstract translation: 一种离子束能量监测系统及其方法。 物理场发生器在不平行于离子束的方向上产生物理场，折射离子束，位于折射离子束路径上的接收装置接收离子束并根据碰撞分布计算其能量 的离子束离子。 因此，离子束的输出能量被很好地调节。

公开(公告)号：US20040135083A1

公开(公告)日：2004-07-15

申请号：US10621444

申请日：2003-07-18

Inventor： Hiroshi Kakibayashi ,  Shigeyuki Hosoki ,  Yuji Takagi ,  Ryo Miyake ,  Kuniyasu Nakamura ,  Mitsugu Sato ,  Hiroyuki Kobayashi

IPC: G01N023/04 ,  G01N023/225

CPC classification number: H01J37/22 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/2809 ,  H01J2237/2813

Abstract: A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specified energy region of the electron beams transmitting the specimen. 3) Similarity between an observed image such as virus or protein in the specimen and a reference image such as known virus or protein is subjected to quantitative analysis by image processing. 4) A preparation protocol of the bio specimen is made into a chip using an MEMS technique, which is then mounted on a specimen stage part of an electron microscope to conduct specimen introduction, preparation and transfer onto a specimen holder.

Abstract translation: 一种生物电子显微镜和观察方法，可以通过低损伤和高对比度观察生物样品，进行高精度图像分析，并进行高通量样品制备。 1）在可能传输在预定条件下获得的样品的临界电子加速电压的1.2至4.2倍的加速电压下观察样品。 2）在样品和电子检测器之间提供小而简化结构的电子能过滤器，用于通过电子束在传输样品的电子束的规定能量区域内的电子束进行成像。 3）通过图像处理对样本中的观察图像（例如病毒或蛋白质）与已知病毒或蛋白质等参考图像之间的相似性进行定量分析。 4）使用MEMS技术将生物样品的制备方案制成芯片，然后将其安装在电子显微镜的样品台部分上，以将样品引入，准备和转移到样品架上。

公开(公告)号：US06281512B1

公开(公告)日：2001-08-28

申请号：US09339871

申请日：1999-06-25

Applicant: Ki-cheol Choi

Inventor： Ki-cheol Choi

IPC: H01J37317

CPC classification number: H01J37/3171 ,  H01J2237/05 ,  H01J2237/0827

Abstract: A pre-acceleration or post-acceleration ion implantation system includes an AC (alternating current) power source supplying power in tandem with a DC (direct current) power source. The combined AC and DC power may be supplied, in alternative embodiments, to an ion accelerator and/or an ion extractor of the system.

Abstract translation: 预加速或加速后离子注入系统包括与DC（直流）电源串联供电的AC（交流）电源。 在替代实施例中，组合的AC和DC功率可以被提供给系统的离子加速器和/或离子提取器。

公开(公告)号：US20160365221A1

公开(公告)日：2016-12-15

申请号：US15183061

申请日：2016-06-15

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Dirk Preikszas

IPC: H01J37/28 ,  H01J37/21 ,  H01J37/147 ,  H01J37/10

CPC classification number: H01J37/28 ,  H01J37/10 ,  H01J37/1475 ,  H01J37/21 ,  H01J37/244 ,  H01J2237/05 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/2449

Abstract: An analysis device, possibly having an electrostatic and/or magnetic lens, analyzes the energy of charged particles and has an opposing field grid device to which a voltage is applied in such a way that a portion of the charged particles is reflected by the opposing field grid device. Another portion of the charged particles passes through the opposing field grid device and is detected by a detector. The opposing field grid device has a curvature. A center of curvature is an intersection point of an optical axis with the opposing field grid device. The curvature has a radius of curvature which is given by the section between the center of curvature and a starting point on the optical axis. The opposing field grid device is curved in the direction of the starting point as viewed from the center of curvature and/or is arranged to be displaceable along the optical axis.

Abstract translation: 可能具有静电和/或磁性透镜的分析装置分析带电粒子的能量，并且具有相反的场栅装置，以这样的方式施加电压，使得一部分带电粒子被相对场反射 网格设备。 带电粒子的另一部分通过相对的场栅装置并由检测器检测。 相对的栅格装置具有曲率。 曲率中心是光轴与相对的场格栅装置的交点。 曲率具有由曲率中心与光轴起始点之间的部分给出的曲率半径。 相对的栅格装置在从曲率中心观察时在起始点的方向上弯曲和/或被布置成沿着光轴可移位。

公开(公告)号：US09245722B2

公开(公告)日：2016-01-26

申请号：US14483204

申请日：2014-09-11

Applicant: Georgia Tech Research Corporation

Inventor： Andrei G. Fedorov ,  Peter Arthur Kottke

IPC: H01J49/04 ,  H01J49/00 ,  H01J37/28

CPC classification number: H01J49/0431 ,  H01J37/28 ,  H01J49/0004 ,  H01J2237/05 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/285

Abstract: SMS probe imaging systems, methods of use thereof, and the like are disclosed. Embodiments of the present disclosure can use direct interrogation of objects (e.g., cells or tissue) within a small pool/droplet of liquid, optional thermal, mechanical, electrical, optical and chemical manipulation, followed immediately by liquid sampling, optional sample conditioning, and soft ionization of biomolecules.

Abstract translation: 公开了SMS探针成像系统及其使用方法等。 本公开的实施例可以使用在小池/液滴中的物体（例如，细胞或组织）的直接询问，可选的热，机械，电学，光学和化学操作，随后通过液体取样，可选的样品调节和 生物分子的软电离。

公开(公告)号：US20160004152A1

公开(公告)日：2016-01-07

申请号：US14768899

申请日：2014-02-25

Applicant: Sean R. KIRKPATRICK

Inventor： Sean R. Kirkpatrick

IPC: G03F1/80 ,  G03F1/50

CPC classification number: G03F1/80 ,  G03F1/50 ,  G03F1/82 ,  H01J2237/0041 ,  H01J2237/05 ,  H01L21/02046 ,  H01L21/02065 ,  H01L2924/0002 ,  H01L2924/00012

Abstract: A method for treating a substrate surface uses Neutral Beam irradiation derived from a gas-cluster ion-beam and articles produced thereby including lithography photomask substrates. One embodiment provides a method of treating a surface of a substrate that contains one or more embedded particles or contains sub-surface damage, comprising the steps of: providing a reduced pressure chamber; forming a gas-cluster ion-beam comprising gas-cluster ions within the reduced pressure chamber; accelerating the gas-cluster ions to form an accelerated gas-cluster ion-beam along a beam path within the reduced pressure chamber; promoting fragmentation and/or dissociation of at least a portion of the accelerated gas-cluster ions along the beam path; removing charged particles from the beam path to form an accelerated neutral beam along the beam path in the reduced pressure chamber; holding the surface in the beam path; and treating at least a portion of the surface of the substrate by irradiation.

Abstract translation: 用于处理基板表面的方法使用源自气体簇离子束的中性光束照射和由此制备的物品包括光刻光掩模基板。 一个实施方案提供了一种处理含有一种或多种嵌入颗粒或含有亚表面损伤的基材表面的方法，包括以下步骤：提供减压室; 在所述减压室内形成包含气体簇离子的气体簇离子束; 加速气体簇离子以在减压室内沿着光束路径形成加速的气体簇离子束; 促进至少一部分加速的气团离子沿着光束路径的分裂和/或解离; 从所述光束路径去除带电粒子以在所述减压室中沿所述光束路径形成加速的中性光束; 将表面保持在光束路径中; 以及通过照射处理所述基材的至少一部分表面。

公开(公告)号：US20130126730A1

公开(公告)日：2013-05-23

申请号：US13679181

申请日：2012-11-16

Applicant: National University of Singapore

Inventor： Anjam KHURSHEED ,  Hung Quang Hoang

IPC: H01J3/26 ,  H01J37/26

CPC classification number: H01J49/48 ,  H01J3/26 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J49/44 ,  H01J2237/05 ,  H01J2237/0535 ,  H01J2237/24485

Abstract: A sequential radial mirror analyser (RMA) (100) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen (112) is disclosed. The RMA comprises a 0V equipotential exit grid (116), and a plurality of electrodes (119, 120a, 120b, 120c) electrically configured to generate corresponding electrostatic fields for deflecting at least some of the charged particles of a single energy level to exit through the exit grid (116) to form a second-order focal point on a detector (106). The second-order focal point is associated with the single energy level, and the detector (106) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.

Abstract translation: 公开了一种用于促进由入射在样本（112）上的带电束引起的带电粒子的旋转对称检测的顺序径向镜分析器（RMA）（100）。 RMA包括0V等电位出口格栅（116），以及多个电极（119,120a，120b，120c），其被电配置为产生相应的静电场，用于偏转单个能级的至少一些带电粒子以便通过 出口格栅（116）以在检测器（106）上形成二阶焦点。 二阶焦点与单个能级相关联，并且检测器（106）设置在相应静电场的外部。 还公开了相关方法。

公开(公告)号：US08334512B2

公开(公告)日：2012-12-18

申请号：US13217013

申请日：2011-08-24

Applicant: Uwe Luecken ,  Frank Jeroen Pieter Schuurmans ,  Cornelis Sander Kooijman

Inventor： Uwe Luecken ,  Frank Jeroen Pieter Schuurmans ,  Cornelis Sander Kooijman

IPC: H01J47/00 ,  G01N23/00

CPC classification number: H01J37/244 ,  H01J37/05 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/2802 ,  H01J2237/2817

Abstract: A detector system for a transmission electron microscope includes a first detector for recording a pattern and a second detector for recording a position of a feature of the pattern. The second detector is preferably a position sensitive detector that provides accurate, rapid position information that can be used as feedback to stabilize the position of the pattern on the first detector. In one embodiment, the first detector detects an electron energy loss electron spectrum, and the second detector, positioned behind the first detector and detecting electrons that pass through the first detector, detects the position of the zero-loss peak and adjusts the electron path to stabilize the position of the spectrum on the first detector.

Abstract translation: 用于透射电子显微镜的检测器系统包括用于记录图案的第一检测器和用于记录图案的特征位置的第二检测器。 第二检测器优选地是位置敏感检测器，其提供精确，快速的位置信息，其可以用作反馈以稳定图案在第一检测器上的位置。 在一个实施例中，第一检测器检测电子能量损失电子光谱，并且第二检测器位于第一检测器后面并检测通过第一检测器的电子，检测零损耗峰值的位置并调整电子通路 稳定第一检测器上的光谱位置。