-
公开(公告)号：KR1020140089048A
公开(公告)日：2014-07-14
申请号：KR1020130000282
申请日：2013-01-02
Applicant: 한국기계연구원
Abstract: Disclosed in the present invention are a cutting processing device and a cutting processing method. According to an embodiment of the present invention, the cutting processing device comprises: a cutting tool which moves along a proceeding path on a workpiece in order to process a cutting groove on the workpiece, and rotates on a rotary shaft in a vertical direction; and a control unit which controls the movement and rotation of the cutting tool. The control unit provides a cutting processing device which rotates and controls the cutting tool so that a width direction shaft of the cutting tool can be at a right angle to the proceeding direction of the cutting tool. According to another embodiment of the present invention, the provided cutting processing method comprises as follows: a step of placing a cutting tool on a workpiece; a step of processing a cutting groove on the workpiece while moving the cutting tool on the workpiece along the proceeding direction; and a step of rotating the cutting tool on a rotary shaft in a vertical direction, and rotating and controlling the cutting tool so that a width direction shaft of the cutting tool can be at a right angle to the proceeding direction of the cutting tool.
Abstract translation: 本发明公开了一种切割加工装置和切割加工方法。 根据本发明的实施例，切割处理装置包括：切割工具，其沿着工件上的前进路径移动以便处理工件上的切割槽，并且在垂直方向上在旋转轴上旋转; 以及控制单元，其控制切割工具的移动和旋转。 控制单元提供一种切削加工装置，该切削加工装置旋转并控制切削工具，使得切削工具的宽度方向轴能够与切削工具的前进方向成直角。 根据本发明的另一个实施例，所提供的切割加工方法包括如下步骤：将切削工具放置在工件上; 在沿着行进方向移动所述工件的同时将所述切削工具移动到所述工件上的步骤; 以及将切削工具沿垂直方向旋转在旋转轴上的步骤，以及旋转和控制切削工具，使得切削工具的宽度方向轴可以与切削工具的前进方向成直角。
-
公开(公告)号：KR101409484B1
公开(公告)日：2014-06-18
申请号：KR1020120097885
申请日：2012-09-04
Applicant: 한국기계연구원
Abstract: 본 발명의 일 측면에 따른 팁 연마 장치는 가공대상 팁을 회전시키는 회전 구동부재와, 상기 회전 구동부재와 연결 설치되며 상기 회전 구동부재를 상기 팁을 길이 방향으로 이송시키는 왕복 스테이지와, 상기 왕복 스테이지와 연결 설치되어 상기 팁을 틸팅운동시키는 틸팅부재, 및 상기 팁과 맞닿아 상기 팁을 가공하는 연삭부재를 포함한다.
-
公开(公告)号：KR1020140031016A
公开(公告)日：2014-03-12
申请号：KR1020120097885
申请日：2012-09-04
Applicant: 한국기계연구원
Abstract: According to one aspect of the present invention, a tip grinding apparatus includes: a rotator member which rotates a tip to be ground; a reciprocating stage which is installed to be connected to the rotator member and which transfers the rotator member in the lengthwise direction of the tip; a tilting member which is installed to be connected to the reciprocating stage and which imposes tilting movement to the tip; and a grinding member which comes in contact with the tip and grinds the tip.
Abstract translation: 根据本发明的一个方面，一种尖端磨削装置包括：使待磨削的尖端旋转的旋转体部件; 往复运动台，其被安装成连接到所述旋转体构件，并且在所述尖端的长度方向上传递所述旋转体构件; 倾斜构件，其安装成连接到往复运动台并且向尖端施加倾斜运动; 以及研磨构件，其与尖端接触并研磨尖端。
-
公开(公告)号：KR1020120003118A
公开(公告)日：2012-01-10
申请号：KR1020100063789
申请日：2010-07-02
Applicant: 한국기계연구원
CPC classification number: H02N2/008 , H01L41/09 , H02N2/0055 , H02N2/043 , H02N2/06
Abstract: PURPOSE: An anisotropic vibration actuator is provided to arrange anisotropic movements which only allow vibrations in a specific direction, thereby improving processing performance in a super fine processing process. CONSTITUTION: A driving part(100) is extended in a longitudinal direction. A piezoelectric device(200) is used as a driving source of the driving part in a predetermined region of the driving part. A supporting part(300) is combined in the predetermined region of one side and the other side of the driving part in a height direction. An alignment part(400) is extended to one side of the driving part in the height direction in order to determine directionality of vibrations. The piezoelectric device is fixed in a driving source insertion part(110) which is arranged in one lateral surface of the driving part in the longitudinal direction. The piezoelectric device is inserted in the driving source insertion part in order to arrange the longitudinal direction of the piezoelectric device parallel to the direction of the driving part.
Abstract translation: 目的：提供各向异性振动致动器来布置各向异性运动，这些各向异性运动只允许特定方向的振动，从而提高超细加工过程中的加工性能。 构成：驱动部（100）沿纵向延伸。 压电装置（200）用作驱动部分的预定区域中的驱动部件的驱动源。 支撑部件（300）在驱动部件的一侧和另一侧的高度方向上的预定区域中组合。 对准部件（400）在高度方向上延伸到驱动部件的一侧，以确定振动的方向性。 压电元件固定在驱动源插入部（110）中，该驱动源插入部（110）沿纵向方向布置在驱动部的一个侧面上。 为了将压电元件的纵向平行于驱动部的方向配置，驱动源插入部插入压电元件。
-
公开(公告)号：KR101037899B1
公开(公告)日：2011-05-30
申请号：KR1020100026291
申请日：2010-03-24
Applicant: 한국기계연구원
IPC: G03F7/20 , H01L21/027
CPC classification number: G03F1/54 , G03F1/38 , G03F1/50 , G03F7/70283 , G03F7/70566 , G03F7/2006 , H01L21/0274
Abstract: PURPOSE: A lithography device and a method for the same are provided to obtain reproducible patterning by controlling the amount of light radiated to a photo-resist based on a polarizing phenomenon. CONSTITUTION: A lithography device(100) includes a polarizing filter(120) and a photo mask(130). The polarizing filter converts incident light(l_1) into first polarized light(l_2) with a single polarized direction. The photo mask is composed of a plurality of polarized patterns(131) and a light shielding pattern(132). The polarized patterns include different directional polarized axies in order to convert the first polarized light into second polarized light(l_3). The light shielding pattern is arranged adjacent to at least one polarized pattern.
Abstract translation: 目的：提供光刻设备及其方法，以通过基于偏光现象控制照射到光致抗蚀剂的光量来获得可重现的图案。 构成：光刻设备（100）包括偏振滤光器（120）和光掩模（130）。 偏振滤光器以单个偏振方向将入射光（l_1）转换为第一偏振光（l_2）。 光掩模由多个偏振图案（131）和遮光图案（132）组成。 偏振图案包括不同的方向偏振轴，以便将第一偏振光转换成第二偏振光（l_3）。 遮光图案被布置成与至少一个偏振图案相邻。
-
Patent Agency Ranking
公开(公告)号：KR100964681B1
公开(公告)日：2010-06-21
申请号：KR1020080086924
申请日：2008-09-03
Applicant: 한국기계연구원
IPC: H01L21/027 , G03F7/00
Abstract: 본 발명에 따른 관부재 내면의 패턴 형성 방법은 관형상으로 이루어진 부재의 내측 벽면에 미세 패턴을 용이하게 형성할 수 있도록, 실린더와 상기 실린더의 외측으로 돌출되어 관부재의 내면에 밀착되는 브러쉬를 포함하는 코팅장치를 이용하여 관부재의 내면에 레지스트층을 도포하는 레지스트층 형성 단계와, 레이저를 상기 레지스트층에 조사하여 상기 레지스트층에 패턴을 형성하는 레지스트층 패턴 형성 단계와, 상기 관부재의 내면을 에칭하는 단계, 및 잔류 레지스트층 제거 단계를 포함한다.
관부재, 레지스트, 코팅장치, 레이저빔, 용발-
公开(公告)号：KR100930669B1
公开(公告)日：2009-12-09
申请号：KR1020070119757
申请日：2007-11-22
Applicant: 한국기계연구원
IPC: G03F7/18
Abstract: 본 발명의 일 실시예에 따른 비평면 코팅 장치는 비평면 형상의 기판에 레지스트를 공급하는 레지스트 공급부와, 상기 기판의 아래에 설치되고, 레지스트가 코팅되는 기판의 면과 대향하도록 설치되며 기체 분사구가 형성된 테이블과, 상기 테이블에 연결된 지지축과, 상기 지지축와 연결되어 상기 지지축에 회전력을 인가하는 구동 모터, 및 상기 기체 분사구로 기체를 공급하는 펌프를 포함할 수 있다.
레지스트, 코팅, 비평면, 기체 분사구Abstract translation: 根据本发明实施例的非平面涂覆设备包括：抗蚀剂供应单元，用于将抗蚀剂供应到非平面基板;气体供应口，设置在基板下方并且面向其上涂覆抗蚀剂的基板的表面， 支撑轴连接到工作台，驱动电机连接到支撑轴，用于向支撑轴施加旋转力，以及泵，用于将气体供应到气体注入端口。
-
公开(公告)号：KR100787236B1
公开(公告)日：2007-12-21
申请号：KR1020060035683
申请日：2006-04-20
Applicant: 한국기계연구원
IPC: H01S3/10
Abstract: 본 발명에 따른 극초단 펄스 레이저 가공 장치는 열적 물리적 손상이 없는 정밀한 가공을 수행할 수 있도록, 레이저 펄스를 발생시키는 레이저 발생부와, 상기 발생부에서 발생한 레이저 펄스를 분할하여 서로 다른 길이의 경로로 진행시키는 분할부와, 상기 분할부에서 출사된 레이저 펄스의 진행 경로를 병합하는 병합부, 및 진행 경로가 병합된 상기 레이저 펄스를 이용하여 재료를 가공하는 가공부를 포함한다.
극초단 펄스 레이저, 마스크, 편광변경부재, 빔 분할기, 편광판-
公开(公告)号：KR100784469B1
公开(公告)日：2007-12-11
申请号：KR1020070006232
申请日：2007-01-19
Applicant: 한국기계연구원
Abstract: A device and a method for diagnosing normal cells or cancer cells are provided to prevent destruction of sample cells through an optical diagnosis technique, only require a single sample cell for the diagnosis and very accurately perform the cancer cell diagnosis. A device for diagnosing normal cells and cancer cells comprises a mount(110) in which a sample cell(10) to be diagnosed is mounted; a UV light source(120) which outputs UV light and applies the light through an objective lens(122) applied to the sample cell; a sensor portion(130) which measures a cell pass-through light source which is outputted after the UV light from the UV light source is applied to the sample cell and then passes through the sample cell; and a spectrum outputting portion(140) which outputs spectrum of the cell pass-through light source measured by the sensor portion. A method for diagnosing a normal cell or a cancer cell by using UV absorption spectrum comprises the steps of: (a) outputting UV light applied by a UV light source to a sample cell; (b) measuring a cell pass-through light source which is outputted by the UV light outputted from the UV light source being applied to the sample cell and then passing through the sample cell; and (c) outputting spectrum of the cell pass-through light source measured by the step(b).
Abstract translation: 提供用于诊断正常细胞或癌细胞的装置和方法以通过光学诊断技术来防止样品细胞的破坏，仅需要单个样品池进行诊断并非常准确地进行癌细胞诊断。 用于诊断正常细胞和癌细胞的装置包括其中安装有待诊断的样品池（10）的安装座（110） UV光源（120），其输出UV光并通过施加到样品池的物镜（122）施加光; 测量在来自UV光源的UV光之后输出的单元通过光源的传感器部分（130）被施加到样品池，然后通过样品池; 以及频谱输出部（140），其输出由所述传感器部测量的所述单元贯通光源的光谱。 通过使用紫外吸收光谱来诊断正常细胞或癌细胞的方法包括以下步骤：（a）将由UV光源施加的UV光输出到样品池; （b）测量从被施加到样品池的UV光源输出的UV光输出的单元通过光源，然后通过样品池; 和（c）输出由步骤（b）测量的单元通过光源的光谱。
-
-
-
-
-
-
-
-
-
Search Results
91
records
(took 0.027 seconds)
