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公开(公告)号：KR102038875B1
公开(公告)日：2019-10-31
申请号：KR1020180016143
申请日：2018-02-09
Applicant: 코리아테크노(주)
IPC: H01L21/677
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公开(公告)号：KR1020170077879A
公开(公告)日：2017-07-07
申请号：KR1020150187116
申请日：2015-12-28
Applicant: 코리아테크노(주)
IPC: H01L21/677
Abstract: 본발명은자박스(jar box)에수납된웨이퍼를풉(FOUP, front opening unified pod)으로이동시킬때, 자박스에서웨이퍼만을안정되게흡착분리시킬수 있고, 웨이퍼에간격부재가붙는것을방지할수 있는웨이퍼플립장치와웨이퍼플립방법에관한것이다. 이를위해웨이퍼플립장치는덮개가개방된자박스가지지되는박스지지유닛과, 자박스에서웨이퍼를인출하여웨이퍼를풉에적층시키는웨이퍼이송유닛에전달하는웨이퍼인출유닛및 웨이퍼인출유닛에의해자박스에서인출되는웨이퍼로부터간격부재를분리시키는웨이퍼분리유닛을포함한다.
Abstract translation: 本发明现在可以盒以移动容纳在（罐箱）脱离（FOUP，前开式盒）的晶片，并sikilsu单独只吸附在字符框稳定晶片，防止间隔构件粘到晶片 晶圆翻转装置和晶圆翻转方法。 为此，在晶片搬送单元晶片倒装装置晶片由晶片取单元传递通过层叠在框中的FOUP晶片支撑单元的晶片，所述盖被拉出取单元和框字符，字符框是开放字符框已经 从要绘制的晶片包括分离单元，用于分离晶片间隔部件。
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公开(公告)号：KR1020120056484A
公开(公告)日：2012-06-04
申请号：KR1020100118052
申请日：2010-11-25
Applicant: 코리아테크노(주)
IPC: H01L21/677 , H01L21/68 , B65G49/07
CPC classification number: H01L21/67733 , H01L21/6773 , H01L21/67772
Abstract: PURPOSE: A front opening unified pod(FOUP) transfer apparatus of a purge system is provided to automatically supply a FOUP transferred along a wafer transfer line to the purge system, thereby improving equipment operation efficiency. CONSTITUTION: A horizontal driving part(110) is arranged in a direction which crosses a stage of a purging system and a transfer line of a FOUP(Front Opening Unified Pod). A first moving body is horizontally transferred using the horizontal driving part. A vertical driving part(130) is arranged on the first moving body in a horizontal direction. A second moving body(140) is vertically transferred using the vertical driving part. A gripper(150) selectively grips the FOUP by being installed on the second moving body.
Abstract translation: 目的：提供清洗系统的前开口统一吊舱（FOUP）传送装置，以自动提供沿着晶片传送线传送到吹扫系统的FOUP，从而提高设备运行效率。 构成：水平驱动部（110）沿与FOUP（前开口统一荚）的清洗系统的台阶和输送线交叉的方向排列。 使用水平驱动部水平地移动第一移动体。 垂直驱动部（130）沿水平方向布置在第一移动体上。 第二移动体（140）使用垂直驱动部垂直传递。 夹具（150）通过安装在第二移动体上选择性地夹紧FOUP。
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公开(公告)号：KR1020120056483A
公开(公告)日：2012-06-04
申请号：KR1020100118051
申请日：2010-11-25
Applicant: 코리아테크노(주)
IPC: H01L21/677 , H01L21/68 , F16H25/20 , H01L21/673
CPC classification number: H01L21/67766 , F16H25/2018 , H01L21/67781 , Y10S414/137
Abstract: PURPOSE: A wafer transfer device of a purge system is provided to improve cleaning performance by washing inside a front opening unified pod without loading a wafer. CONSTITUTION: A base(110) is installed inside a chamber of a purge system. A first moving body(130) is installed in order to be horizontally transferred on a base. A horizontal driving part(120) transfers the first moving body in a horizontal direction. A second moving body is installed on the first moving body in order to be transferred in a vertical direction. A vertical drive part(150) transfers the second moving body in the vertical direction. A wafer load part(160) loads wafer by being formed on the front side of the second moving body.
Abstract translation: 目的：提供清洗系统的晶片转移装置，以通过在前开口统一的容器内洗涤而不加载晶片来提高清洁性能。 构成：底座（110）安装在清洗系统的腔室内。 安装第一移动体（130）以水平地转移到基座上。 水平驱动部（120）在第一移动体的水平方向上移动。 第二移动体安装在第一移动体上以沿垂直方向传送。 垂直驱动部（150）在第二移动体的上下方向移动。 晶片负载部件（160）通过形成在第二移动体的前侧上来加载晶片。
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公开(公告)号：KR100970243B1
公开(公告)日：2010-07-16
申请号：KR1020080031130
申请日：2008-04-03
Applicant: 코리아테크노(주)
IPC: H01L21/687 , H01L21/02 , H01L21/66
CPC classification number: H01L21/67253 , G01N1/28 , G01N2001/2826 , G01N2001/383 , H01L21/67051 , H01L21/68728 , H01L21/68785
Abstract: 본 발명은 반도체 웨이퍼 오염물질 측정장치의 스캔 스테이지에 관한 것으로,
원형의 고정 하우징(11)과, 이 고정하우징(11)의 내측에서 회전가능하게 설치되는 회전체(12)와, 이 회전체(12)의 중심부에서 흡착통로(15)를 형성하되 저부의 진공포트(16)와 연결되는 흡착플레이트(14)와, 상기 회전체(12)를 구동하기 위하여 상기 고정 하우징(11)의 저부에 설치되는 스텝모터(17)로 이루어진 스테이지 본체(10)와, 상기 스테이지 본체(10)의 고정 하우징(11)의 하부공간(a)을 형성하도록 기둥(22)들로 받쳐지게 한 베이스플레이트(20)와, 상기 스테이지 본체(10)의 외측에서 웨이퍼를 받치도록 하는 것으로 도면상 3개를 원형상 3등분하여 배치된 받침지그(30)들을 포함한 것으로 웨이퍼의 받침지그가 상,하 이동가능하게 하여 웨이퍼의 이펙팅이 수월하게 한다.
반도체웨이퍼,오염물질, 측정장치,스캔스테이지,-
Patent Agency Ranking
公开(公告)号：KR1020090125331A
公开(公告)日：2009-12-07
申请号：KR1020080051386
申请日：2008-06-02
Applicant: 코리아테크노(주)
IPC: H01L23/544
CPC classification number: H01L23/544 , H01L21/67242 , H01L2223/54413 , H01L2223/54433
Abstract: PURPOSE: An apparatus for controlling OCR(Optical Character Recognition) position according to wafer size is provided to photograph ID inserted in a wafer by moving an OCR, by detecting the size of a wafer through sensing of sensors and then driving a driving motor with a control signal according to the detected signal. CONSTITUTION: A supporting member(240) supports an OCR(100). A top and a bottom slide bar(230) perform slide-guiding of the supporting member. A ball screw bar(220) is located between the slide bars. A driving part comprises a driving motor(210) rotating the ball screw bar. A first sensor detects the size of a first size wafer. A second sensor detects the size of a second size wafer.
Abstract translation: 目的：根据晶片尺寸控制OCR（光学字符识别）位置的装置通过移动OCR来提供插入到晶片中的照片ID，通过感测传感器检测晶片的尺寸，然后用驱动电机驱动驱动电机 控制信号。 构成：支撑构件（240）支撑OCR（100）。 顶部和底部滑动杆（230）执行支撑构件的滑动引导。 滚珠丝杠（220）位于滑杆之间。 驱动部件包括使滚珠丝杆旋转的驱动马达（210）。 第一传感器检测第一尺寸晶片的尺寸。 第二传感器检测第二尺寸晶片的尺寸。
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公开(公告)号：KR1020090105584A
公开(公告)日：2009-10-07
申请号：KR1020080031128
申请日：2008-04-03
Applicant: 코리아테크노(주)
IPC: H01L21/02
CPC classification number: H01L21/6719 , H01L21/67126 , H01L21/67748 , H01L21/67772
Abstract: PURPOSE: A VPD unit of an auto scanning system and a door opening and closing device are provided to improve wafer yield by increasing the vapor phase decomposition effect of the wafer. CONSTITUTION: A VPD unit of an auto scanning system includes a body(100) and a door. The body is a rectangular cylinder and forms an internal space. A support is formed in the bottom of the body. Gas discharge and suction nozzles are positioned in the body. A transparent window(104) is formed in an upper side of the body. A detection terminal(105) for controlling the inner atmosphere is formed in the center of the body. A wafer slot(106) is formed by opening one side of the body. A door covers or opens the slot of the VPD unit.
Abstract translation: 目的：提供自动扫描系统的VPD单元和门打开和关闭装置，以通过增加晶片的气相分解效果来提高晶片的产量。 构成：自动扫描系统的VPD单元包括主体（100）和门。 身体是一个矩形圆柱体，形成一个内部空间。 在身体的底部形成支撑。 气体放电和吸嘴位于体内。 在身体的上侧形成透明窗（104）。 用于控制内部气氛的检测端子（105）形成在身体的中心。 通过打开主体的一侧来形成晶片槽（106）。 门盖或打开VPD单元的插槽。
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公开(公告)号：KR1020090061838A
公开(公告)日：2009-06-17
申请号：KR1020070128807
申请日：2007-12-12
CPC classification number: G01R31/286 , H01L21/67778 , H01L21/68 , H01L22/30
Abstract: A wafer handling apparatus of the multi sorter is provided, in which the identification of the wafer required for each process is arranged in the wafer cassette at the same time and ID is read. A wafer handling apparatus of the multi sorter comprises the sorter(1) and the location moving part(2). The sorter sets up the align roller, the notch finder, and the step motor(43a) on the pad plate. The sorter circulates the align roller and notch finder to the belt connected to each pulley. The sorter performs the wafer align and notch search. The location moving part sets the location of sorter.
Abstract translation: 提供了一种多分选机的晶片处理装置，其中每个处理所需的晶片的识别同时布置在晶片盒中，并且读取ID。 多分选机的晶片处理装置包括分拣机（1）和位置移动部分（2）。 分拣机将校准辊，取景器和踏板电机（43a）安装在垫板上。 分拣机将校准辊和取样器循环到连接到每个滑轮的皮带。 分拣机执行晶圆对准和凹槽搜索。 位置移动部分设置分拣机的位置。
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公开(公告)号：KR1020090061836A
公开(公告)日：2009-06-17
申请号：KR1020070128805
申请日：2007-12-12
IPC: H01L21/68
Abstract: A stage moving apparatus for use of multi sorter is provided to arrange consecutively wafers and make the internal fabric simple. The stage moving apparatus for use of multi sorter comprises a stage part(110) and a driving part(130). The stage part has a stage(111), a frame, and a driving arm(114) and a rotation axis. The stage mounts the various-size wafer cassettes. The wafer cassette transfers the wafers. The frame is positioned in the bottom side of the stage and unites with the stage into one body. The driving arm is arranged in frame in order to extend from the frame. The driving arm is fixed to the axis of rotation. The driving part rotates the driving arm.
Abstract translation: 提供了一种用于多分选机的舞台移动装置，以连续地布置晶片并使内部织物变得简单。 用于多分选机的舞台移动装置包括舞台部分（110）和驱动部分（130）。 舞台部具有舞台（111），框架，以及驱动臂（114）和旋转轴。 舞台安装各种尺寸的晶片盒。 晶片盒转移晶片。 框架定位在舞台的底部，并与舞台结合成一体。 驱动臂被布置成框架以便从框架延伸。 驱动臂固定在旋转轴上。 驱动部件使驱动臂旋转。
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