公开(公告)号：WO2007100978A3

公开(公告)日：2007-10-18

申请号：PCT/US2007062101

申请日：2007-02-14

Applicant: IBM ,  TROMP RUDOLF M

Inventor： TROMP RUDOLF M

IPC: H01J37/05 ,  G01N23/20 ,  G01N23/227 ,  H01J37/153

CPC classification number: H01J37/153 ,  H01J37/05 ,  H01J37/252 ,  H01J37/295 ,  H01J2237/055 ,  H01J2237/1534 ,  H01J2237/2538 ,  H01J2237/2544

Abstract: An aberration-correcting microscopy instrument is provided. It has a first magnetic deflector (206) disposed for reception of a first non-dispersed electron diffraction pattern. The first magnetic deflector is also configured for projection of a first energy dispersed electron diffraction pattern in an exit plane (A2) of the first magnetic deflector. An electrostatic lens (224) is disposed in the exit plane of the first magnetic deflector. A second magnetic deflector (222) substantially identical to the first magnetic deflector is disposed for reception of the first energy dispersed electron diffraction pattern from the electrostatic lens. The second magnetic deflector is also configured for projection of a second non-dispersed electron diffraction pattern in a first exit plane (B2) of the second magnetic deflector. An electron mirror (226) is configured for correction of one or more aberrations in the second non-dispersed electron diffraction pattern. The electron mirror is disposed for reflection of the second non-dispersed electron diffraction pattern to the second magnetic deflector for projection of a second energy dispersed electron diffraction pattern in a second exit plane (B3) of the second magnetic deflector.

Abstract translation: 提供了一种像差校正显微镜仪器。 它具有设置用于接收第一非分散电子衍射图案的第一磁偏转器（206）。 第一磁偏转器还被配置为在第一磁偏转器的出射平面（A2）中投射第一能量分散电子衍射图案。 静电透镜（224）设置在第一磁偏转器的出射平面中。 设置与第一磁偏转器基本相同的第二磁偏转器（222），用于从静电透镜接收第一能量分散电子衍射图案。 第二磁偏转器还被配置用于在第二磁偏转器的第一出射平面（B2）中投影第二非分散电子衍射图案。 电子反射镜（226）被配置用于校正第二非分散电子衍射图案中的一个或多个像差。 电子反射镜被设置用于将第二非分散电子衍射图案反射到第二磁偏转器，用于在第二磁偏转器的第二出射面（B3）中投射第二能量分散电子衍射图案。

公开(公告)号：WO2007100978A2

公开(公告)日：2007-09-07

申请号：PCT/US2007/062101

申请日：2007-02-14

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION ,  TROMP, Rudolf, M.

Inventor： TROMP, Rudolf, M.

IPC: H01J37/05 ,  H01J37/153 ,  G01N23/20 ,  G01N23/227

CPC classification number: H01J37/153 ,  H01J37/05 ,  H01J37/252 ,  H01J37/295 ,  H01J2237/055 ,  H01J2237/1534 ,  H01J2237/2538 ,  H01J2237/2544

Abstract: An aberration-correcting microscopy instrument is provided. The instrument has a first magnetic deflector disposed for reception of a first non-dispersed electron diffraction pattern. The first magnetic deflector is also configured for projection of a first energy dispersed electron diffraction pattern in an exit plane of the first magnetic deflector. The instrument also has an electrostatic lens disposed in the exit plane of a first magnetic deflector, as well as a second magnetic deflector substantially identical to the first magnetic deflector. The second magnetic deflector is disposed for reception of the first energy dispersed electron diffraction pattern from the electrostatic lens. The second magnetic deflector is also configured for projection of a second non-dispersed electron diffraction pattern in a first exit plane of the second magnetic deflector. The instrument also has an electron mirror configured for correction of one or more aberrations in the second non-dispersed electron diffraction pattern. The electron mirror is disposed for reflection of the second non-dispersed electron diffraction patter to the second magnetic deflector for projection of a second energy dispersed electron diffraction pattern in a second exit plane of the second magnetic deflector.

Abstract translation: 提供了一种像差校正显微镜仪器。 仪器具有设置用于接收第一非分散电子衍射图案的第一磁偏转器。 第一磁偏转器还被配置用于在第一磁偏转器的出射平面中投射第一能量分散电子衍射图案。 仪器还具有设置在第一磁偏转器的出射平面中的静电透镜以及与第一磁偏转器基本相同的第二磁偏转器。 第二磁偏转器被设置用于从静电透镜接收第一能量分散电子衍射图案。 第二磁偏转器还被配置用于在第二磁偏转器的第一出射平面中投射第二非分散电子衍射图案。 仪器还具有配置用于校正第二非分散电子衍射图案中的一个或多个像差的电子反射镜。 电子反射镜设置成用于将第二非分散电子衍射图案反射到第二磁偏转器，用于在第二磁偏转器的第二出射平面中投射第二能量分散电子衍射图案。