-
公开(公告)号:CN108886028A
公开(公告)日:2018-11-23
申请号:CN201780019216.4
申请日:2017-02-23
Applicant: 日立化成株式会社
Abstract: 提供一种可以提高绝缘可靠性的有机插入体及其制造方法。有机插入体(10)具备:含有多个有机绝缘层而成的有机绝缘层叠体(12);和在有机绝缘层叠体(12)内排列的多个配线(13),配线(13)与有机绝缘层被阻隔金属膜(14)隔开。有机绝缘层叠体(12)可以含有:具有配置有配线(13)的多个凹槽部(21a)的第一有机绝缘层(21);和按照填埋配线(13)的方式层叠在第一有机绝缘层(21)上的第二有机绝缘层(22)。
-
公开(公告)号:CN102131882B
公开(公告)日:2013-10-30
申请号:CN200980132606.8
申请日:2009-08-26
Applicant: 日立化成株式会社
IPC: C09J201/00 , C09J4/02 , C09J7/00 , C09J7/02 , C09J163/00 , C09J179/08 , C09J201/06 , H01L21/52
CPC classification number: C09J4/00 , C08G73/1042 , C08G73/1046 , C08G73/106 , C08G73/1082 , C08L63/00 , C08L79/08 , C08L2666/02 , C08L2666/20 , C08L2666/22 , C09J4/06 , C09J163/00 , C09J179/08 , G03F7/038 , G03F7/70383 , H01L21/6836 , H01L24/27 , H01L24/29 , H01L24/48 , H01L24/73 , H01L24/83 , H01L25/50 , H01L2224/16 , H01L2224/274 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2224/83191 , H01L2224/83192 , H01L2224/83194 , H01L2224/83856 , H01L2224/92247 , H01L2225/06513 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01044 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01051 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/10253 , H01L2924/12041 , H01L2924/15788 , H01L2924/181 , H01L2924/351 , Y10T428/24355 , Y10T428/287 , Y10T428/31518 , H01L2924/00 , H01L2924/3512 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明涉及可以通过在被粘接物上形成粘接剂层并利用放射线施加曝光处理及利用显影液施加显影处理而形成粘接剂图案的感光性粘接剂组合物,上述感光性粘接剂组合物具有溶解显影性,并且显影后形成的上述粘接剂图案的膜厚T1(μm)满足下述式(1)所示的条件。(T1/T0)×100≥90...(1)[式(1)中,T0表示显影处理前的粘接剂层的膜厚(μm)。]
-
公开(公告)号:CN101884104B
公开(公告)日:2014-05-28
申请号:CN200880119113.6
申请日:2008-12-02
Applicant: 日立化成株式会社
IPC: H01L25/065 , C09J4/00 , C09J179/08 , H01L21/52 , H01L25/07 , H01L25/18
CPC classification number: C09J4/00 , C08G65/3322 , C08G65/33306 , C08G2650/50 , C08L71/02 , C08L79/08 , C08L2666/20 , C08L2666/22 , C09J171/02 , C09J179/08 , H01L21/6836 , H01L23/3121 , H01L24/27 , H01L24/29 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/85 , H01L2221/68327 , H01L2224/05554 , H01L2224/274 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2224/83191 , H01L2224/83855 , H01L2224/85 , H01L2224/92247 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01015 , H01L2924/01019 , H01L2924/01023 , H01L2924/01027 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01047 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/04953 , H01L2924/0665 , H01L2924/07802 , H01L2924/181 , H01L2924/351 , H01L2924/00 , H01L2924/00012 , H01L2224/45015 , H01L2924/207 , H01L2224/45099
Abstract: 本发明的感光性粘接剂,其是通过曝光及显影来形成图案后对于被粘接物具有粘接性、可以碱显影的感光性粘接剂,用于具有以下工序的半导体装置100的制造方法,所述工序是:通过曝光及显影将设置于半导体芯片20的电路面上的感光性粘接剂1形成图案的工序,和将其他的半导体芯片21与形成图案后的所述感光性粘接剂1直接粘接的工序。
-
公开(公告)号:CN103053016A
公开(公告)日:2013-04-17
申请号:CN201180037917.3
申请日:2011-07-29
Applicant: 日立化成株式会社
IPC: H01L21/52 , C09J4/00 , C09J201/00
CPC classification number: C09J4/00 , H01L24/27 , H01L24/73 , H01L2224/32145 , H01L2224/32225 , H01L2224/48227 , H01L2224/73265 , H01L2224/83191 , H01L2924/01029 , H01L2924/10253 , H01L2924/15311 , H01L2924/15788 , H01L2924/181 , H01L2924/00012 , H01L2924/3512 , H01L2924/00
Abstract: 本发明提供一种带有粘接剂层的半导体晶片的制造方法,其包含通过丝网印刷法在半导体晶片的一面的整个表面涂布感光性粘接剂,形成感光性粘接剂层的工序;和通过曝光使所述感光性粘接剂层B阶化的工序。
-
公开(公告)号:CN103257527B
公开(公告)日:2016-08-31
申请号:CN201310088478.X
申请日:2009-07-30
Applicant: 日立化成株式会社
CPC classification number: C08G73/1042 , C08G73/1046 , C08G73/106 , C08G73/1082 , C08L63/00 , C08L79/08 , C08L2666/02 , C08L2666/22 , C09J7/20 , C09J7/22 , C09J7/38 , C09J9/00 , C09J163/00 , C09J179/08 , C09J2203/326 , C09J2205/31 , C09J2433/00 , C09J2463/00 , C09J2479/00 , C09J2479/08 , G03F7/0387 , G03F7/0388 , H01L24/27 , H01L24/29 , H01L24/48 , H01L24/73 , H01L24/83 , H01L25/0657 , H01L2224/05554 , H01L2224/274 , H01L2224/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/29298 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2224/83101 , H01L2224/83191 , H01L2224/83855 , H01L2224/92247 , H01L2924/00013 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01044 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01051 , H01L2924/01057 , H01L2924/01075 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01084 , H01L2924/014 , H01L2924/04953 , H01L2924/0665 , H01L2924/07802 , H01L2924/09701 , H01L2924/10253 , H01L2924/12041 , H01L2924/15311 , H01L2924/15788 , H01L2924/16235 , H01L2924/181 , H01L2924/351 , Y10T428/24479 , Y10T428/2809 , Y10T428/31504 , H01L2924/07025 , H01L2924/0635 , H01L2924/00 , H01L2924/00012 , H01L2924/3512 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299 , H01L2224/2929 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明涉及一种感光性粘接剂组合物,其含有(A)热塑性树脂、(B)热固性树脂、(C)放射线聚合性化合物和(D)光引发剂,所述(C)放射线聚合性化合物包含具有乙烯性不饱和基团和环氧基的化合物。
-
-
-
-
-