公开(公告)号：KR1020170074784A

公开(公告)日：2017-06-30

申请号：KR1020160173533

申请日：2016-12-19

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 다카시마류이치 ,  고히라다쿠 ,  오오야요시노부

IPC: H01L21/3065 ,  H01L21/02 ,  H01L21/311 ,  H01L21/67 ,  H05H1/46 ,  H01J49/10 ,  H01L21/324

CPC classification number: H01L21/31116 ,  H01J37/32009 ,  H01J37/32165 ,  H01J2237/334 ,  H01L21/3065 ,  H01L21/31144

Abstract: 마스크막의개구폭의형상을조정하면서에칭을실행하는것을목적으로한다. 플라즈마생성용의고주파전력에의해수소함유가스, 및불소함유가스를포함하는가스로부터플라즈마를생성하고, 생성된플라즈마에의해실리콘산화막을에칭하는방법으로서, 상기불소함유가스는하이드로플루오로카본가스를포함하며, 상기하이드로플루오로카본가스로부터생성되는라디칼은사플루오르화탄소(CF)로부터생성되는라디칼보다부착계수가큰 에칭방법이제공된다.

Abstract translation: 并且在调整掩模膜的开口宽度的形状的同时进行蚀刻。 由等离子体中的氧化硅膜称作的方法产生的由含有含氢气体的气体，和一个含氟气体，通过等离子体产生的高频电力产生等离子体，将含氟气体是一个碳气体作为氢 - 氟 它包括，并且是从被从碳气体产生的氢 - 氟，提供了一个大的蚀刻方法自由基礼物氟碳（CF），导致更激进的附着系数。

公开(公告)号：KR1020140108141A

公开(公告)日：2014-09-05

申请号：KR1020140022509

申请日：2014-02-26

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 도미오카다케토시 ,  고히라다쿠 ,  마카베도시유키

IPC: H01L21/683 ,  H01L21/3065

CPC classification number: H01L21/6831 ,  H01L21/67109 ,  H01L21/6875 ,  Y10T279/23

Abstract: A purpose of the present invention is to restrain ununiformity of temperatures in a central area and an edge area of a workpiece. A mounting table includes: a base part having a flow path for a refrigerant formed therein; and an electrostatic chuck which is mounted on the base part and has a mounting surface for mounting the workpiece to electrostatically absorb the workpiece. The base part includes: a first upper surface on which the electrostatic chuck is mounted; a ring-shaped second upper surface which is located lower than the first upper side on the outside of the first upper side to mount a focus ring; and a side surface extending between the first upper surface and the second upper surface in the vertical direction. The flow path extends from the lower part of the second upper surface, and has a part extending toward the first upper surface along the side surface from the lower part of the first upper surface. The mounting surface has a plurality of dot-shaped convex parts coming in contact with the rear side of the workpiece, and in relation with the size per unit area of the area where the convex parts and the rear side of the workpiece come in contact with each other, the edge area of the mounting surface is larger than the area of the central part of the mounting surface.

Abstract translation: 本发明的目的是抑制工件的中心区域和边缘区域中的温度的不均匀性。 安装台包括：具有形成在其中的制冷剂的流路的基部; 以及安装在基座上并具有用于安装工件的安装表面以静电吸收工件的静电卡盘。 基部包括：安装有静电卡盘的第一上表面; 位于第一上侧的外侧的第一上侧的环状的第二上表面，以安装聚焦环; 以及在垂直方向上在第一上表面和第二上表面之间延伸的侧表面。 流路从第二上表面的下部延伸，并且具有从第一上表面的下部沿着侧面向第一上表面延伸的部分。 安装面具有与工件的后侧接触的多个点状凸部，并且与工件的凸部和后侧接触的区域的每单位面积的尺寸相关联 彼此之间，安装表面的边缘区域大于安装表面的中心部分的面积。

公开(公告)号：KR102112368B1

公开(公告)日：2020-05-18

申请号：KR1020140022509

申请日：2014-02-26

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 도미오카다케토시 ,  고히라다쿠 ,  마카베도시유키

IPC: H01L21/683 ,  H01L21/3065