公开(公告)号：KR1020060107740A

公开(公告)日：2006-10-16

申请号：KR1020067006681

申请日：2004-12-22

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 나까지마마꼬또 ,  사이또오다까노리 ,  다끼자와쯔요시 ,  혼마마나부

IPC: H01L21/324 ,  F27B5/18

CPC classification number: F27B17/0025 ,  F27B5/04 ,  F27B5/18

Abstract: A vertical heat treatment device includes a treatment container (5) having a treatment region (A1). The treatment region (A1) is set so as to receive to-be-treated substrates (W) held at vertical intervals. The device also has a heating furnace (8) having an electric heater (15) provided so as to surround the treatment container (5) and has an electric blower (16) for blowing a cooling gas into the heating furnace (8). In order that the temperature of the treatment region (A1) converges to the target temperature, a control section (22) supplies electricity to the heater (15) to heat the treatment region (A1) up to a predetermined temperature immediately below a target temperature. When the predetermined temperature is reached, the power supply to the heater (15) is reduced, and simultaneously, the treatment region (A1) is forcibly cooled by a cooling gas supplied by the blower (16).

Abstract translation: 立式热处理装置包括具有处理区域（A1）的处理容器（5）。 处理区域（A1）被设定为接收以垂直间隔保持的被处理基板（W）。 该装置还具有加热炉（8），该加热炉具有设置成围绕处理容器（5）的电加热器（15），并具有用于将冷却气体吹入加热炉（8）的电动鼓风机（16）。 为了使处理区域（A1）的温度收敛于目标温度，控制部件（22）向加热器（15）供电以将处理区域（A1）加热到直接低于目标温度的预定温度 。 当达到预定温度时，减少对加热器（15）的供电，同时，处理区域（A1）被由鼓风机（16）供应的冷却气体强制冷却。

公开(公告)号：KR1020050031058A

公开(公告)日：2005-04-01

申请号：KR1020047004687

申请日：2002-09-27

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 사이또다까노리 ,  마끼야도시유끼 ,  오사나이히사에이 ,  다끼자와쯔요시 ,  시마즈도모히사 ,  하세베가즈히데 ,  야마모또히로유끼 ,  사이또유끼마사 ,  야마가겐이찌

IPC: H01L21/205

CPC classification number: H01L21/67109 ,  H01L21/67098

Abstract: A thermal treatment apparatus, characterized by comprising a heating furnace body having an opening part provided at the upper end thereof, a heating means installed on the inner wall of the heating furnace body, a reaction container formed of a single tube stored inside the heating furnace body, an exhaust pipe connection part formed at the upper part of the reaction container, and a first temperature control means installed on the peripheral surface of the exhaust pipe connection part.

Abstract translation: 一种热处理装置，其特征在于，包括：加热炉体，其具有设置在其上端的开口部;加热装置，其安装在所述加热炉体的内壁;反应容器，由容纳在所述加热炉内的单管形成的反应容器 形成在反应容器的上部的排气管连接部以及安装在排气管连接部的周面的第一温度控制装置。

公开(公告)号：KR100907598B1

公开(公告)日：2009-07-14

申请号：KR1020067006681

申请日：2004-12-22

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 나까지마마꼬또 ,  사이또오다까노리 ,  다끼자와쯔요시 ,  혼마마나부

IPC: H01L21/324 ,  F27B5/18

CPC classification number: F27B17/0025 ,  F27B5/04 ,  F27B5/18

Abstract: A vertical heat processing apparatus includes a process chamber ( 5 ) defining a process field (A 1 ) configured to accommodate a plurality of target substrates (W) supported at intervals in a vertical direction. The apparatus further includes a heating furnace ( 8 ) surrounding the process chamber ( 5 ) and including an electric heater ( 15 ), and an electric blower ( 16 ) configured to send a cooling gas into the heating furnace ( 8 ). A control section ( 22 ) executes, in order to converge the process field (A 1 ) to a target temperature, performing power feeding to the heater ( 15 ) to heat up the process field (A 1 ) to a predetermined temperature immediately below the target temperature, and at a time point when the process field (A 1 ) reaches the predetermined temperature, decreasing the power feeding to the heater ( 15 ), and supplying the cooling gas from the blower ( 16 ) to forcibly cool the process field (A 1 ).

Abstract translation: 一种立式热处理设备包括：处理室（5），其限定处理区域（A 1），处理区域（A 1）被构造为容纳在垂直方向上间隔地支撑的多个目标基板（W）。 该设备还包括围绕处理室（5）并包括电加热器（15）的加热炉（8）和配置成将冷却气体送入加热炉（8）的电动鼓风机（16）。 控制部（22）为了将处理区域（A 1）会聚到目标温度，执行向加热器（15）的供电以将处理区域（A 1）加热到紧接着处理区域 （A 1）达到规定温度时，减少向加热器（15）的供电，从鼓风机（16）供给冷却气体，强制地冷却处理区域（A 1） A 1）。

公开(公告)号：KR1020050091691A

公开(公告)日：2005-09-15

申请号：KR1020057001826

申请日：2002-09-27

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 마끼야도시유끼 ,  사이또오다까노리 ,  다끼자와쯔요시 ,  아이크만가루끼

IPC: H01L21/205 ,  H01L21/324

Abstract: A heat treatment method comprising a step of accommodating a holder with a plurality of works placed in multiple stage in the vertical direction in a treatment vessel and a step of performing a predetermined heat treatment by performing heating by a heating means. A specific target amount of heat generated by the heating means for performing the heat treatment of the works is determined in advance. A heat treatment device has the heat treatment vessel and a control temperature and a correction temperature sensor which are provided in the heat treatment vessel. The correction temperature sensor comprises a protective pipe body part extending in the vertical direction and a plurality of branch pipe parts extending in the horizontal direction from the protective pipe body part. A thermocouple is disposed on each branch pipe part, and the branch pipe parts are inserted between the works in height positions different from each other.

Abstract translation: 一种热处理方法，包括在处理容器中容纳具有沿垂直方向放置在多级中的多个工件的保持器的步骤，以及通过由加热装置进行加热来执行预定热处理的步骤。 预先确定由用于进行工件的热处理的加热装置产生的特定目标热量。 热处理装置具有设置在热处理容器内的热处理容器和控制温度和校正温度传感器。 校正温度传感器包括沿垂直方向延伸的保护管体部分和从保护管体部分沿水平方向延伸的多个分支管部分。 在每个支管部分上设置热电偶，并且将分支管部分插入在工件之间彼此不同的高度位置。