公开(公告)号：KR1020140147018A

公开(公告)日：2014-12-29

申请号：KR1020140071472

申请日：2014-06-12

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 몬덴다이치 ,  시모무라고우지 ,  홍석형 ,  미야가와요시히로 ,  야마시타쥰 ,  이케다다로 ,  모토무라유키

IPC: H01L21/67 ,  H01L21/687 ,  H05B6/70 ,  H05B6/74 ,  H05B6/80

CPC classification number: H05B6/74 ,  H01L21/67115 ,  H01L21/68742 ,  H01L21/68792 ,  H05B6/705 ,  H05B6/806 ,  H05B2206/044

Abstract: The present invention provides a microwave heating apparatus and a heating method, capable of uniformly and effectively heating an object to be processed. The microwave heating apparatus (1) includes a phase control unit (7) configured to change a phase of a standing wave of a microwave introduced into a process container (2) by a microwave introduction unit (3). The phase control unit (7) includes a recessed portion recessed more than an inner surface (13b) of a bottom portion (13) of the processing container (2). The phase control unit (3) is formed of the bottom portion (13), and a fixing plate (27) installed at a lower surface of the bottom portion (13) from the outer side of the process container (2). The phase of the standing wave in the process container (2) is changed by the incidence and reflection of the microwave in the recessed portion of the phase control unit (7) surrounded by a metallic wall.

Abstract translation: 本发明提供一种微波加热装置和加热方法，能够均匀有效地加热待加工物体。 微波加热装置（1）包括相位控制单元（7），其被配置为通过微波引入单元（3）改变引入到处理容器（2）中的微波的驻波的相位。 相位控制单元（7）包括比处理容器（2）的底部（13）的内表面（13b）凹陷的凹部。 相位控制单元（3）由底部（13）和从处理容器（2）的外侧安装在底部（13）的下表面处的固定板（27）形成。 处理容器（2）中的驻波的相位通过由金属壁包围的相位控制单元（7）的凹部中的微波的入射和反射而改变。