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    액 처리 장치, 액 처리 방법 및 액 처리용 기억 매체
    1.
    发明公开
    액 처리 장치, 액 처리 방법 및 액 처리용 기억 매체 有权
    액처리장치，액처리방법및액처리용기억매체

    公开(公告)号：KR1020140080423A

    公开(公告)日：2014-06-30

    申请号：KR1020130157133

    申请日：2013-12-17

    Applicant: 도쿄엘렉트론가부시키가이샤

    Inventor： 다카야나기고지 ,  미네카와유키에 ,  요시다유이치 ,  요시하라고오스케 ,  데라시타유이치 ,  후루쇼도시노부 ,  사사다카시

    IPC: H01L21/302

    CPC classification number: H01L21/67017 ,  F04B43/0081 ,  F04B49/065 ,  F04B2205/503 ,  H01L21/6715

    Abstract: A filtration efficiency, which is similar to the filtration efficiency obtained when a plurality of filters are provided, can be obtained by one filter, and decrease in throughput can be prevented. Based on a control signal from a control unit (101), a resist liquid (L) is sucked into a pump (70) through a filter. A part of the resist liquid sucked in the pump is discharged from a discharge nozzle (7). The remaining resist liquid is returned to a supply conduit (51b) on a primary side of the filter. A process is synthesized by adding a replenishment amount equal to the discharge amount to the return amount. The discharge of the synthesized resist liquid and the filtration thereof by the filter are performed the number of times corresponding to a rate between the discharge amount and the return amount.

    Abstract translation: 可以通过一个过滤器获得与设置多个过滤器时获得的过滤效率类似的过滤效率，并且可以防止吞吐量的降低。 基于来自控制单元（101）的控制信号，抗蚀剂液体（L）通过过滤器被吸入到泵（70）中。 吸入到泵中的抗蚀剂液体的一部分从排出喷嘴（7）排出。 剩余的抗蚀剂液体返回到过滤器初级侧上的供应导管（51b）。 通过将等于放电量的补充量添加到返回量来合成处理。 合成的抗蚀剂液体的排出和由过滤器的过滤被执行与排出量和返回量之间的比率对应的次数。

    액 처리 장치, 액 처리 방법 및 액 처리용 기억 매체
    2.
    发明公开
    액 처리 장치, 액 처리 방법 및 액 처리용 기억 매체 审中-实审
    液体加工设备，液体加工方法和液体加工储存介质

    公开(公告)号：KR1020140080469A

    公开(公告)日：2014-06-30

    申请号：KR1020140064224

    申请日：2014-05-28

    Applicant: 도쿄엘렉트론가부시키가이샤

    Inventor： 다카야나기고지 ,  미네카와유키에 ,  요시다유이치 ,  요시하라고오스케 ,  데라시타유이치 ,  후루쇼도시노부 ,  사사다카시

    IPC: H01L21/302 ,  H01L21/02

    CPC classification number: H01L21/67017 ,  F04B43/0081 ,  F04B49/065 ,  F04B2205/503 ,  H01L21/6715

    Abstract: A filtration efficiency, which is similar to the filtration efficiency obtained when a plurality of filters are provided, can be obtained by one filter, and decrease in throughput can be prevented. Based on a control signal from a control unit (101), a resist liquid (L) is sucked into a pump (70) through a filter. A part of the resist liquid sucked in the pump is discharged from a discharge nozzle (7). The remaining resist liquid is returned to a supply conduit (51b) on a primary side of the filter. A process is synthesized by adding a replenishment amount equal to the discharge amount to the return amount. The discharge of the synthesized resist liquid and the filtration thereof by the filter are performed the number of times corresponding to a rate between the discharge amount and the return amount.

    Abstract translation: 通过一个过滤器可以获得与提供多个过滤器时获得的过滤效率类似的过滤效率，并且可以防止生产量的降低。 基于来自控制单元（101）的控制信号，通过过滤器将抗蚀剂液体（L）吸入泵（70）。 吸入泵中的抗蚀剂液体的一部分从排出喷嘴（7）排出。 剩余的抗蚀剂液体返回到过滤器的初级侧的供给管道（51b）。 通过将等于排出量的补充量加到返回量来合成过程。 对合成的抗蚀剂液体的排出及其过滤器的过滤进行与排出量与返回量之间的比例对应的次数。

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