公开(公告)号：KR1020130074751A

公开(公告)日：2013-07-04

申请号：KR1020120149585

申请日：2012-12-20

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 마키준노스케 ,  야노미츠테루 ,  나카노세이지 ,  와타나베츠요시 ,  도요다야스노리 ,  에노키다수구루 ,  이이다나루아키 ,  하라다히로키

IPC: H01L21/677 ,  B65G49/07 ,  B25J13/00

CPC classification number: G06F17/00 ,  B25J13/085 ,  H01L21/67288 ,  H01L21/68707

Abstract: PURPOSE: A transfer device and a transfer method are provided to detect errors in a transfer process by moving a driven unit mounting a transferred component by the rotary power of a motor. CONSTITUTION: A driving unit (30) moves a driven unit (20) connected to a belt in a preset direction. The driving unit includes a driven side pulley which rotates by corresponding to the movement of the belt. A transfer monitoring unit (40) detects the transfer state of the driven unit. An I/F unit (50) outputs the transfer state detected by the transfer monitoring unit. A control unit (10) controls the driving unit based on a transfer condition inputted through the I/F unit. [Reference numerals] (10) Control unit; (100,110) Transfer device; (20) Driven unit; (21) Transfer arm; (30) Driving unit; (31x) X axis driving unit; (31y) Y axis driving unit; (31z) Z axis driving unit; (31θ) Rotation driving unit of a θ direction; (40) Transfer monitoring unit; (41) Transfer state detection unit; (42) Transfer state analysis unit; (50) I/F unit; (51) Input unit; (52) Output unit; (53) Display unit

Abstract translation: 目的：提供一种传送装置和传送方法，用于通过利用电动机的旋转动力移动安装传送部件的从动部件来检测传送过程中的错误。 构成：驱动单元（30）沿着预设方向移动连接到皮带的从动单元（20）。 驱动单元包括由带子的运动而旋转的从动侧皮带轮。 传送监视单元（40）检测从动单元的传送状态。 I / F单元（50）输出由传送监视单元检测的传送状态。 控制单元（10）基于通过I / F单元输入的传送条件来控制驱动单元。 （附图标记）（10）控制单元; （100,110）传输设备; （20）驱动单元; （21）转臂 （30）驾驶单位; （31x）X轴驱动单元; （31y）Y轴驱动单元; （31z）Z轴驱动单元; （31＆thgr）旋转驱动单元 方向; （40）转运监控单位; （41）传送状态检测单元; （42）转移状态分析单位; （50）I / F单位; （51）输入单元; （52）输出单元; （53）显示单元

公开(公告)号：KR101861135B1

公开(公告)日：2018-05-25

申请号：KR1020120149585

申请日：2012-12-20

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 마키준노스케 ,  야노미츠테루 ,  나카노세이지 ,  와타나베츠요시 ,  도요다야스노리 ,  에노키다수구루 ,  이이다나루아키 ,  하라다히로키

IPC: H01L21/677 ,  B65G49/07 ,  B25J13/00

CPC classification number: G06F17/00 ,  B25J13/085 ,  H01L21/67288 ,  H01L21/68707

Abstract: 모터의회전구동력에의해피반송부품을탑재한피구동수단을이동시킴으로써피반송부품을반송할경우에, 반송시에발생한이상을검출할수 있는반송장치및 반송방법을제공하는것이다. 피반송부품을피구동수단에탑재하여반송하는반송장치로서, 모터의회전구동력에의해구동측풀리를회전시킴으로써, 상기구동측풀리에걸쳐진벨트를이동시키고, 상기벨트에연결된피구동수단을소정의방향으로이동시키는구동수단과, 피구동수단의반송상태를감시하는반송감시수단을가지고, 상기반송감시수단은, 피구동수단을이동시키는데필요한상기모터의토크값을검출하고, 검출한토크값에기초하여상기토크값의시간에대한토크미분값을산출하고, 산출한토크미분값을이용하여반송상태를구분하는것을특징으로하는반송장치에의해상기의과제가달성된다.

公开(公告)号：KR1020120127220A

公开(公告)日：2012-11-21

申请号：KR1020120044434

申请日：2012-04-27

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 야노미츠테루 ,  사카구치기미나리

IPC: H01L21/677 ,  B65G49/07 ,  H01L21/027

CPC classification number: H01L21/67712 ,  B65G49/07 ,  H01L21/0273 ,  H01L21/67715 ,  H01L21/67727

Abstract: PURPOSE: A substrate transfer apparatus, a coating and developing apparatus including the same, and a substrate transfer method are provided to easily monitor the transfer of a substrate by detecting the position of a substrate holding unit which supports and transfers the substrate. CONSTITUTION: A transfer apparatus(A3) includes supporting units(13A,13B) which support a substrate. The transfer apparatus includes a base(31) which slantly supports the supporting unit. A position sensor(5) detects a position of forks(3A,3B). The position sensor comprises a light emitting unit(5L) and a light receiving unit(5D) corresponding to the light emitting unit. The light emitting unit includes a light source which generates light and a collimator.

Abstract translation: 目的：提供一种基板转印装置，包括该基板的涂布和显影装置以及基板转印方法，以便通过检测支撑并转印基板的基板保持单元的位置来容易地监视基板的转印。 构成：传送装置（A3）包括支撑基板的支撑单元（13A，13B）。 传送装置包括：倾斜地支撑支撑单元的底座（31）。 位置传感器（5）检测叉（3A，3B）的位置。 位置传感器包括对应于发光单元的发光单元（5L）和光接收单元（5D）。 发光单元包括产生光的光源和准直器。