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公开(公告)号：KR101861135B1
公开(公告)日：2018-05-25
申请号：KR1020120149585
申请日：2012-12-20
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/677 , B65G49/07 , B25J13/00
CPC classification number: G06F17/00 , B25J13/085 , H01L21/67288 , H01L21/68707
Abstract: 모터의회전구동력에의해피반송부품을탑재한피구동수단을이동시킴으로써피반송부품을반송할경우에, 반송시에발생한이상을검출할수 있는반송장치및 반송방법을제공하는것이다. 피반송부품을피구동수단에탑재하여반송하는반송장치로서, 모터의회전구동력에의해구동측풀리를회전시킴으로써, 상기구동측풀리에걸쳐진벨트를이동시키고, 상기벨트에연결된피구동수단을소정의방향으로이동시키는구동수단과, 피구동수단의반송상태를감시하는반송감시수단을가지고, 상기반송감시수단은, 피구동수단을이동시키는데필요한상기모터의토크값을검출하고, 검출한토크값에기초하여상기토크값의시간에대한토크미분값을산출하고, 산출한토크미분값을이용하여반송상태를구분하는것을특징으로하는반송장치에의해상기의과제가달성된다.
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公开(公告)号：KR101690223B1
公开(公告)日：2017-01-09
申请号：KR1020120025434
申请日：2012-03-13
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/677 , B65G49/07 , B25J15/06
CPC classification number: H01L21/6838
Abstract: 부품점수가적고간소한구조임에도불구하고, 기판에휨 또는뒤틀림이있어도안정적으로진공흡착하여보지(保持)할수 있는기판보지장치를제공하는것이다. 흡인통로(31)를가지는반송암 본체(30)와, 기판을진공흡착하여보지하는흡착면(41)과흡인구(42)를가지는흡착부(44)와, 흡인구와연통하는흡인홀(45)이형성되는원통형상의장착부(43)를구비하는패드본체(40)와, 패드본체의장착부가이동가능하게삽입가능한삽입홀(51)과, 흡인홀과흡인통로에연통하는연통로(54)가형성되고, 반송암 본체(30)에대하여고정되는패드보지부재(50)와, 패드본체의장착부에형성되는원호형상의외주홈(46)과패드보지부재의삽입홀에형성되는원호형상의내주홈(55)의사이에개재되고, 탄성변형가능한원형단면의 O링(60)을구비한다.
Abstract translation: 一种基板保持装置，包括：具有吸入路径的传送臂主体; 包括具有吸入面的吸引部和通过真空吸附保持基板的吸入口的垫体，以及形成有与吸入口连通的吸入孔的圆筒状的安装部， 衬垫保持构件，其具有插入孔，所述垫体的安装部可松动地插入该插入孔中;以及连通路，其与所述吸入孔和所述吸入路连通，并固定到所述传送臂体; 以及形成在所述垫主体的安装部分中的弧形外周槽和形成在所述垫的插入孔中的弧形的内周槽之间的具有圆形横截面的可弹性变形的环形气密保持构件 控股成员
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公开(公告)号：KR101695197B1
公开(公告)日：2017-01-11
申请号：KR1020110105075
申请日：2011-10-14
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/677 , B65G49/07
CPC classification number: H01L21/67265 , H01L21/67742
Abstract: 보지부재의형상에이상이있는지의여부를확실하고용이하게검출하는것이다. 보지부재인포크(3A)를전진시켰을때에상기포크(3A)가그 앞을통과하도록, 포크(3A)의진행방향에대하여측방에라인센서(4)를설치한다. 그리고, 포크(3A)를라인센서(4)에대하여진퇴시켰을때, 상기포크(3A)의상하방향의위치와포크(3A)의진퇴방향의위치를대응시킨데이터를취득한다. 이취득된데이터에기초하여, 상기진퇴방향의위치에대하여상하방향의위치를 2 차미분한값을연산하고, 이값에기초하여보지부재의형상의이상의유무를판정한다.
Abstract translation: 公开了一种用于检查基板输送装置的基板保持部件的变形的检查装置。 基板保持构件相对于输送基座在前后方向上移动，以穿过由光学检测单元形成的检测光的光路。 基于光检测单元的检测信号来检测基板保持部件的相对于前后方向的方向的位置。 基于表示表示基板保持部件的位置相对于前后方向的变化的第一参数与表示基板保持部件的位置的变化的第二参数之间的关系的相关数据 相对于横向于前后方向的方向，判断基板保持部件是否发生变形。
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公开(公告)号：KR101528894B1
公开(公告)日：2015-06-15
申请号：KR1020100029764
申请日：2010-04-01
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/677 , B25J15/08 , B65G49/07
Abstract: 마모량감소, 오염방지, 얼라인먼트정밀도향상또는이탈방지의기능을구비한기판보지부재, 기판반송암 및기판반송장치를제공한다. 기판반송장치의기판반송암에장착되어, 기판의주연부를재치하여기판을보지하는기판보지부재(4)로서, 기판의이면에접촉하여기판을보지하는이면보지부(5)와, 기판의단면(端面)에접촉하는단면접촉부(6)를가진다. 단면접촉부(6)는, R 형상을가지며기판의단면에접촉하여기판의이탈을규제하는 R 형상부(8)와, R 형상부(8)의상방측에설치되어차양형상으로형성된오버행부(81)를포함한다.
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公开(公告)号：KR1020100117021A
公开(公告)日：2010-11-02
申请号：KR1020100029764
申请日：2010-04-01
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/677 , B25J15/08 , B65G49/07
CPC classification number: H01L21/67742 , B25J11/0095 , B25J15/009 , H01L21/68707 , H01L21/68735 , H01L21/6875 , Y10S414/141
Abstract: PURPOSE: A substrate supporting unit, a substrate transferring arm, and a substrate transferring unit are provided to reduce the abrasion of the substrate supporting unit and the contamination of a substrate by including a cross-section contact part with an R-shaped part and an overhang part. CONSTITUTION: A rear side supporting unit(5) supports a substrate by being in contact with the rear side of the substrate. A cross-section contact part is in contact with the cross-section of the substrate. An R-shaped part(8) is formed into an R-shape and is in contact with the cross-section of the substrate in order to prevent the substrate from being escaped. An overhang part(81) is installed over the R-shaped part.
Abstract translation: 目的：提供基板支撑单元，基板转印臂和基板转印单元，以通过将截面接触部分包括R形部分和/或基板支撑单元的横截面接触部分来减少基板支撑单元的磨损和基板的污染 突出部分。 构成：后侧支撑单元（5）通过与基板的后侧接触来支撑基板。 横截面接触部分与衬底的横截面接触。 R形部分（8）形成为R形并且与衬底的横截面接触以防止衬底逸出。 突出部分（81）安装在R形部分上。
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Patent Agency Ranking
公开(公告)号：KR101862122B1
公开(公告)日：2018-05-29
申请号：KR1020130014434
申请日：2013-02-08
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/02
Abstract: 메인터넌스의작업효율의향상및 2 차재해의방지를도모할수 있도록한 기판처리장치를제공하는것이다. 처리블록(S3)은액처리모듈(21), 열처리모듈(40), 처리선반유닛(U8)과, 반송영역(R) 내에설치되고, 상기모듈과처리선반유닛에대하여웨이퍼(W)를전달하는반송암(A1)과, 처리선반유닛과액처리모듈로웨이퍼를전달하는처리용전달암(31)을구비한다. 인터페이스블록(S4)은, 인터페이스암(33)과인터페이스암의이동기구(35)를구비한다. 상기암, 반송암 및인터페이스암의이동기구를제어하는제어컴퓨터(90)에의해, 반송암의장치외부에노정되는점검·교환위치또는대기위치로의이동을행하고, 처리블록의반송영역내로의작업자의진입을가능하게하기위하여, 인터페이스암, 처리선반유닛의이동및 처리용전달암의상승을행한다.
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公开(公告)号：KR1020130096182A
公开(公告)日：2013-08-29
申请号：KR1020130014434
申请日：2013-02-08
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/02
CPC classification number: H01L21/67098 , H01L21/027 , H01L21/324 , H01L21/67742
Abstract: PURPOSE: A substrate processing device is provided to prevent secondary disasters by securing an entry space for an operator into a processing block. CONSTITUTION: A processing block (S3) includes a liquid processing module, a heat treatment module, a processing rack unit, a transfer arm (A1), and a delivery arm (31) for processing. The transfer arm transfers a wafer (W) with regard to the module and the processing rack unit. An interface block (S4) includes an interface arm (33) and a moving device of the interface arm. A control computer (90) performs the movement to an inspection and exchange position or a waiting position exposed to the outside of the transfer arm. The control computer moves the interface arm and the processing rack unit and lifts the delivery arm for processing to allow an operator to enter a transfer region of the processing block. [Reference numerals] (21) Liquid processing module; (40) Heat treatment module; (90a) Control unit; (90b) Control program storage unit; (90c) Reading unit; (90d) Display unit; (90e) Input unit; (S1) Carrier block; (S2) Multi-purpose block; (S3) Processing block; (S4) Interface block; (S5) Light exposure device
Abstract translation: 目的：提供一种基板处理装置，用于通过将操作者的进入空间固定到处理块中来防止二次灾害。 构成：处理块（S3）包括液体处理模块，热处理模块，处理架单元，传送臂（A1）和用于处理的传送臂（31）。 传送臂相对于模块和处理架单元传送晶片（W）。 接口块（S4）包括接口臂（33）和接口臂的移动装置。 控制计算机（90）执行向暴露于传送臂外部的检查和更换位置或等待位置的移动。 控制计算机移动接口臂和处理架单元并提升传送臂进行处理，以允许操作者进入处理块的传送区域。 （附图标记）（21）液体处理模块; （40）热处理模块; （90a）控制单元; （90b）控制程序存储单元; （90c）阅读单位; （90d）显示单元; （90e）输入单元; （S1）载波块; （S2）多功能块; （S3）处理块; （S4）接口块; （S5）曝光装置
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公开(公告)号：KR1020130074751A
公开(公告)日：2013-07-04
申请号：KR1020120149585
申请日：2012-12-20
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/677 , B65G49/07 , B25J13/00
CPC classification number: G06F17/00 , B25J13/085 , H01L21/67288 , H01L21/68707
Abstract: PURPOSE: A transfer device and a transfer method are provided to detect errors in a transfer process by moving a driven unit mounting a transferred component by the rotary power of a motor. CONSTITUTION: A driving unit (30) moves a driven unit (20) connected to a belt in a preset direction. The driving unit includes a driven side pulley which rotates by corresponding to the movement of the belt. A transfer monitoring unit (40) detects the transfer state of the driven unit. An I/F unit (50) outputs the transfer state detected by the transfer monitoring unit. A control unit (10) controls the driving unit based on a transfer condition inputted through the I/F unit. [Reference numerals] (10) Control unit; (100,110) Transfer device; (20) Driven unit; (21) Transfer arm; (30) Driving unit; (31x) X axis driving unit; (31y) Y axis driving unit; (31z) Z axis driving unit; (31θ) Rotation driving unit of a θ direction; (40) Transfer monitoring unit; (41) Transfer state detection unit; (42) Transfer state analysis unit; (50) I/F unit; (51) Input unit; (52) Output unit; (53) Display unit
Abstract translation: 目的：提供一种传送装置和传送方法，用于通过利用电动机的旋转动力移动安装传送部件的从动部件来检测传送过程中的错误。 构成：驱动单元（30）沿着预设方向移动连接到皮带的从动单元（20）。 驱动单元包括由带子的运动而旋转的从动侧皮带轮。 传送监视单元（40）检测从动单元的传送状态。 I / F单元（50）输出由传送监视单元检测的传送状态。 控制单元（10）基于通过I / F单元输入的传送条件来控制驱动单元。 （附图标记）（10）控制单元; （100,110）传输设备; （20）驱动单元; （21）转臂 （30）驾驶单位; （31x）X轴驱动单元; （31y）Y轴驱动单元; （31z）Z轴驱动单元; （31＆thgr）旋转驱动单元 方向; （40）转运监控单位; （41）传送状态检测单元; （42）转移状态分析单位; （50）I / F单位; （51）输入单元; （52）输出单元; （53）显示单元
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公开(公告)号：KR1020130008449A
公开(公告)日：2013-01-22
申请号：KR1020120029259
申请日：2012-03-22
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/677 , B65G49/07 , B25J15/00
CPC classification number: H01L21/67742 , B25J11/0095 , B25J19/0075 , H01L21/68707 , Y10S414/141
Abstract: PURPOSE: A substrate transfer device is provided to prevent particles from flying when a holding member is broken. CONSTITUTION: A substrate holding member comprises a plate and a flying preventing unit. A metal line(5) is installed in a plate. A guide member(31) is fixed at the end part of the right and the left fork(21,22). The guide member guides the peripheral part of the wafer. A groove portion is formed in the substrate holding member.
Abstract translation: 目的：提供一种基板传送装置，以防止在保持构件断裂时颗粒飞散。 构成：基板保持构件包括板和防飞行单元。 金属线（5）安装在板中。 引导构件（31）固定在右叉和左叉（21,22）的端部处。 引导构件引导晶片的周边部分。 在基板保持部件上形成有槽部。
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公开(公告)号：KR1020120106586A
公开(公告)日：2012-09-26
申请号：KR1020120025434
申请日：2012-03-13
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/677 , B65G49/07 , B25J15/06
CPC classification number: H01L21/6838 , B25J15/0616 , B25J15/0683
Abstract: PURPOSE: A substrate holding device is provided to stably hold a substrate by elastically deforming an O ring interposed between an outer groove formed in a pad body and an inner groove formed in a pad holding member. CONSTITUTION: A transfer arm body(30) has a suction path. A pad body(40) includes an absorbing unit with an absorbing surface and a suction hole, and a cylindrical mounting unit. A pad holding member includes an insertion hole and a connection path and is fixed to the transfer arm body. An O ring is elastically deformed and is interposed between an arced outer groove(46) formed in the mounting unit and an arced inner groove(55) formed in the insertion hole of the pad holding member.
Abstract translation: 目的：提供一种基板保持装置，通过弹性变形形成在垫体的外槽之间的O形环和形成在垫保持构件中的内槽的弹性变形来稳定地保持基板。 构成：传送臂体（30）具有吸引路径。 垫体（40）包括具有吸收表面和吸入孔的吸收单元和圆柱形安装单元。 垫保持构件包括插入孔和连接路径，并且固定到传送臂主体。 O形环弹性变形，并且插入在形成在安装单元中的弧形外槽（46）和形成在垫保持构件的插入孔中的弧形内槽（55）之间。
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