公开(公告)号：KR1020110033590A

公开(公告)日：2011-03-31

申请号：KR1020090091144

申请日：2009-09-25

Applicant: 삼성모바일디스플레이주식회사

Inventor： 심혜연 ,  지창순 ,  이종우 ,  권도성

IPC: H01L21/20 ,  H01L21/205

CPC classification number: C23C14/30 ,  C23C14/24 ,  C23C14/243 ,  C23C14/26 ,  H01L51/001 ,  H01L51/56

Abstract: PURPOSE: A deposition source is provided to prevent the splash phenomenon of a deposition material by including an accommodation member receiving a thermal transfer member to make it evenly distributed on a target material. CONSTITUTION: In a deposition source, a depositing material(120) is arranged inside a crucible(110). A thermal transfer member(150) is arranged in the upper part of the depositing material of the crucible inside. A receiving member(130) accepts the thermal transfer member. The receiving member comprises a bottom part(131), a lateral part(132), and a top part(133) which are comprised of a mesh plate smaller than the size of the particles of the thermal transfer member.

Abstract translation: 目的：提供沉积源以通过包括容纳构件来接收热转印构件以使其均匀分布在目标材料上来防止沉积材料的飞溅现象。 构成：在沉积源中，沉积材料（120）布置在坩埚（110）的内部。 热转印构件（150）设置在坩埚内部的沉积材料的上部。 接收构件（130）接受热传递构件。 接收构件包括底部（131），侧部（132）和顶部（133），其由比热传递构件的颗粒的尺寸小的网板组成。

公开(公告)号：KR101030005B1

公开(公告)日：2011-04-20

申请号：KR1020090091144

申请日：2009-09-25

Applicant: 삼성모바일디스플레이주식회사

Inventor： 심혜연 ,  지창순 ,  이종우 ,  권도성

IPC: H01L21/20 ,  H01L21/205

CPC classification number: C23C14/30 ,  C23C14/24 ,  C23C14/243 ,  C23C14/26 ,  H01L51/001 ,  H01L51/56

Abstract: 균일한 증착 특성을 확보할 수 있도록, 본 발명은 증착 재료가 내부에 배치된 도가니, 상기 도가니 내부의 상기 증착 재료 상부에 배치되는 열전달 부재 및 상기 열전달 부재를 수용하고 메쉬판을 구비하는 수용 부재를 포함하는 증착 소스를 제공한다.

公开(公告)号：KR1020100130786A

公开(公告)日：2010-12-14

申请号：KR1020090049479

申请日：2009-06-04

Applicant: 삼성모바일디스플레이주식회사

Inventor： 심혜연 ,  이종우 ,  지창순 ,  민경수 ,  조용훈 ,  권도성

IPC: C23C14/26 ,  H01L51/56 ,  H05B33/10

Abstract: PURPOSE: A deposition apparatus and a manufacturing method of an organic light emitting diode using the same are provided to facilitate the deposition on a large substrate and enable simultaneous deposition of different materials. CONSTITUTION: A deposition apparatus comprises a deposition source unit including a first deposition source(11) and a second deposition source(12). The first deposition source has a first and a second side(13,14) which meet at the right angle, wherein the first side is shorter than the second side. The second deposition source has a third and a fourth side(15,16) which meet at the right angle, wherein the third side is shorter than the fourth side. The third side is arranged adjacent to the first side.

Abstract translation: 目的：提供使用其的有机发光二极管的沉积设备和制造方法，以便于在大的衬底上沉积并且能够同时沉积不同的材料。 构成：沉积装置包括包括第一沉积源（11）和第二沉积源（12）的沉积源单元。 第一沉积源具有以直角相交的第一和第二侧（13,14），其中第一侧比第二侧短。 第二沉积源具有以直角相遇的第三和第四侧（15,16），其中第三侧比第四侧短。 第三侧被布置成与第一侧相邻。