公开(公告)号：KR1020100130786A

公开(公告)日：2010-12-14

申请号：KR1020090049479

申请日：2009-06-04

Applicant: 삼성모바일디스플레이주식회사

Inventor： 심혜연 ,  이종우 ,  지창순 ,  민경수 ,  조용훈 ,  권도성

IPC: C23C14/26 ,  H01L51/56 ,  H05B33/10

Abstract: PURPOSE: A deposition apparatus and a manufacturing method of an organic light emitting diode using the same are provided to facilitate the deposition on a large substrate and enable simultaneous deposition of different materials. CONSTITUTION: A deposition apparatus comprises a deposition source unit including a first deposition source(11) and a second deposition source(12). The first deposition source has a first and a second side(13,14) which meet at the right angle, wherein the first side is shorter than the second side. The second deposition source has a third and a fourth side(15,16) which meet at the right angle, wherein the third side is shorter than the fourth side. The third side is arranged adjacent to the first side.

Abstract translation: 目的：提供使用其的有机发光二极管的沉积设备和制造方法，以便于在大的衬底上沉积并且能够同时沉积不同的材料。 构成：沉积装置包括包括第一沉积源（11）和第二沉积源（12）的沉积源单元。 第一沉积源具有以直角相交的第一和第二侧（13,14），其中第一侧比第二侧短。 第二沉积源具有以直角相遇的第三和第四侧（15,16），其中第三侧比第四侧短。 第三侧被布置成与第一侧相邻。