Abstract:
본 발명은 인쇄회로기판 및 그 제조방법을 제공한다. 구체적으로는, 본 발명의 대표적인 구현 예에 따른 인쇄회로기판에 있어서, 회로패턴의 시드층의 양쪽 측면에 식각홈이 형성된 상기 인쇄회로기판은 상기 회로패턴의 선폭을 보호하고, 언더컷을 억제하는 효과를 나타낼 수 있다.
Abstract:
Disclosed are a vacuum degas chamber and a cassette having uniform temperature distribution. The cassette includes a top frame and a bottom frame which are separately arranged in a vertical direction; guide frames which are arranged to face each other between both end parts of the top frame and the bottom frame and in which multiple guide slots guiding the outer circumference of a substrate are separately arranged corresponding to each other; and a docking pipe installed on the bottom center of the bottom frame to be docked on a cassette holder and receiving heat from the cassette holder. Therefore, the cassette has an effect of improving the uniformity of the inner temperature of the cassette by conducting the heat to the cassette itself as a heat block is installed on the cassette holder.
Abstract:
The present invention relates to a method of removing a seed layer in a printed circuit board manufacturing process. The method of removing a seed layer in a printed circuit board manufacturing process according to the present invention includes the steps of: forming a photoresist layer on a printed circuit board in which a seed layer is formed on a surface thereof; removing the photoresist layer in a predetermined shape; forming a plating layer for a circuit in the predetermined pattern in which the photoresist layer is formed; forming corrosion layers on surfaces of the seed layer and the plating layer by bringing the board from which the seed layer is exposed in a reactor filled with a gas into a chemical reaction; and removing the seed layer by projecting a laser beam to the corrosion layers to remove the corrosion layers. According to the present invention, laser ablation as a dry etching method instead of a conventional wet etching method is employed when a copper seed layer is removed, a precise wire pattern can be obtained even with low energy by causing a chemical reaction by gas to produce a chloride corrosion layer on a seed layer and performing laser ablation, and damage to a copper plating layer can be prevented. [Reference numerals] (AA) Start; (BB) End; (S101) Form a photoresist on a printed circuit board in which a seed layer is formed on a surface thereof; (S102) Remove the photoresist layer in a predetermined pattern; (S103) Form a circuit plating layer in the predetermined pattern from which the photoresist layer is removed; (S104) Expose the seed layer by removing the photoresist layer around the plating layer; (S105) Form Chloride corrosion layers on surfaces of the seed layer and the plating layer by bringing the board from which the seed layer is exposed into a chemical reaction in a reactor filled with a chloride (Cl2) gas; (S106) Remove the seed layer by projecting a laser beam to the chloride corrosion layer and removing the chloride corrosion layer