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1.发明公开
公开(公告)号：KR1020050015533A
公开(公告)日：2005-02-21
申请号：KR1020030054397
申请日：2003-08-06
Applicant: 삼성전자주식회사
IPC: H01L21/66
Abstract: PURPOSE: An apparatus of inputting and verifying of a recipe parameter of a scanning electron microscope and an inputting and verifying method using the same are provided to reduce a processing time for input and verification by utilizing a personal computer using a spreadsheet and a macro method. CONSTITUTION: A personal computer(260) includes a spreadsheet program and a macro for converting a spreadsheet to a predetermined file requested from a workstation(210) of a scanning electron microscope(220) or converting the converted file to the spreadsheet. The workstation of the scanning electron microscope is used for receiving a recipe from the personal computer to control a mechanical part of the scanning electron microscope.
Abstract translation: 目的：提供一种输入和验证扫描电子显微镜的配方参数的装置以及使用其的输入和验证方法，以便通过使用电子表格和宏观方法利用个人计算机来减少输入和验证的处理时间。 构成：个人计算机（260）包括用于将电子表格转换为从扫描电子显微镜（220）的工作站（210）请求的预定文件的电子表格程序和宏，或将转换的文件转换为电子表格。 扫描电子显微镜的工作站用于从个人计算机接收配方以控制扫描电子显微镜的机械部分。
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公开(公告)号：KR1020010068651A
公开(公告)日：2001-07-23
申请号：KR1020000000667
申请日：2000-01-07
Applicant: 삼성전자주식회사
IPC: H04L9/14
CPC classification number: H04L9/14 , H04L9/3066
Abstract: PURPOSE: A method and a device for generating a secret key in communication are provided to improve the security of a communication device by using the data, which are received with solving the encode of the encoded data by using the common secret value in a receiving side. CONSTITUTION: In the method and the device for generating the secret key in communication, a few stages are included. In the first stage, a device sends the own common key to the other device. In the second stage, the first middle secret value is generated by using the common key and is sent to the called device. In the third stage, the second middle secret value is generated by using the first middle secret value and the own personal key and is sent to the called device. And the secret value of the called device is generated by using the first middle secret value and the common key. In the fourth stage, the secret value of the called device is generated by using the first middle secret value and the personal key.
Abstract translation: 目的：提供一种用于生成通信中的秘密密钥的方法和装置，以通过使用通过使用接收侧中的公用秘密值来解码编码数据的编码而接收到的数据来提高通信装置的安全性 。 构成：在通信中产生秘密密钥的方法和装置中，包括几个阶段。 在第一阶段，设备向其他设备发送自己的公用密钥。 在第二阶段，通过使用公共密钥生成第一中间秘密值，并将其发送到被叫设备。 在第三阶段，通过使用第一中间秘密值和自己的个人密钥生成第二中间秘密值，并将其发送到被叫设备。 并且通过使用第一中间秘密值和公共密钥来生成被叫设备的秘密值。 在第四阶段中，通过使用第一中间秘密值和个人密钥来生成被叫设备的秘密值。
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公开(公告)号：KR1020080067436A
公开(公告)日：2008-07-21
申请号：KR1020070004712
申请日：2007-01-16
Applicant: 삼성전자주식회사
CPC classification number: G01B11/30 , G01N21/8806 , G01N21/956
Abstract: A method for measuring a specimen surface is provided to maximize production yield by reducing weight of distorted information corresponding to an upper surface of a pattern relative to information corresponding to both side walls of the pattern. A method for measuring a specimen surface(200) comprises the steps of: allowing first incident light(201) to be incident into the specimen formed with an arbitrary pattern in a first direction(S1); detecting first diffraction light(202) diffracted in the specimen to be incident by the first incident light(S2); allowing second incident light(203) in a second direction opposite to the first direction to be incident into the specimen; detecting second diffraction light(204) diffracted in the specimen(S3); and comparing information corresponding to the first diffraction light and the second diffraction light respectively with each other, and judging if both side walls of the pattern are parallel to each other in the first direction and the second direction when the information is the same or similar(S4).
Abstract translation: 提供了一种用于测量样品表面的方法，以通过相对于对应于图案的两个侧壁的信息减小对应于图案的上表面的失真信息的重量来最大化生产产量。 一种测量样本表面（200）的方法包括以下步骤：使第一入射光（201）入射到沿第一方向（S1）以任意图形形成的样本中; 检测在所述样本中衍射的第一衍射光（202）以入射所述第一入射光（S2）; 允许在与第一方向相反的第二方向上的第二入射光（203）入射到样品中; 检测在所述试样（S3）中衍射的第二衍射光（204）; 以及将与第一衍射光和第二衍射光相对应的信息彼此分别进行比较，并且当信息相同或相似时，判断图案的两个侧壁是否在第一方向和第二方向上彼此平行（ S4）。
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Patent Agency Ranking
公开(公告)号：KR1020080000303A
公开(公告)日：2008-01-02
申请号：KR1020060058003
申请日：2006-06-27
Applicant: 삼성전자주식회사
IPC: H01L21/66
CPC classification number: G01N21/9503 , G01N21/8422 , G01N2021/8433
Abstract: A method of detecting defects in a silicon substrate and an apparatus for performing the same are provided to identify grating defects of a silicon wafer by using a light emitting image of fluorescent materials. A silicon wafer(W) is loaded on a chuck(110) within a process chamber(100). An edge part of the silicon wafer is coated by using fluorescent materials having different coating characteristics at a defective grating part and a normal grating part of the silicon wafer. A light emitting image of a silicon wafer edge part is obtained by irradiating light onto the silicon wafer edge part coated with the fluorescent materials. A grating defect of the silicon wafer edge part is detected by identifying a coating state of the fluorescent materials of the light emitting image.
Abstract translation: 提供了一种检测硅衬底中的缺陷的方法及其执行装置，以通过使用荧光材料的发光图像来识别硅晶片的光栅缺陷。 硅晶片（W）装载在处理室（100）内的卡盘（110）上。 通过使用在硅晶片的缺陷光栅部分和普通光栅部分处具有不同涂层特性的荧光材料来涂覆硅晶片的边缘部分。 通过将光照射到涂覆有荧光材料的硅晶片边缘部分上来获得硅晶片边缘部分的发光图像。 通过识别发光图像的荧光材料的涂布状态来检测硅晶片边缘部分的光栅缺陷。
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公开(公告)号：KR100846635B1
公开(公告)日：2008-07-16
申请号：KR1020070029168
申请日：2007-03-26
Applicant: 삼성전자주식회사
CPC classification number: H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/216
Abstract: A method for adjusting a focal point of a scanning electron microscope is provided to accurately detect a size of a pattern formed on a subject by obtaining an accurate image of the subject. A scanning electron microscope includes a stage(10) for a subject(30), an inspection member, and an auto-focusing member. The inspection member includes a lens assembly(22), a detector(24), and an ADC(Analog Digital Converter)(26). The lens assembly includes an electron gun, a focusing lens, a deflection coil, an objective lens, and an auxiliary coil. The detector detects secondary electrons, which are generated by a surface reaction due to accelerated electrons on a surface of the subject. The ADC converts the signal from the detector into a digital signal.
Abstract translation: 提供了一种用于调整扫描电子显微镜的焦点的方法，通过获得对象的准确图像来精确地检测形成在被摄体上的图案的尺寸。 扫描电子显微镜包括用于被检体（30）的台（10），检查部件和自动聚焦部件。 检查构件包括透镜组件（22），检测器（24）和ADC（模数转换器）（26）。 透镜组件包括电子枪，聚焦透镜，偏转线圈，物镜和辅助线圈。 检测器检测由于受试者表面上的加速电子而由表面反应产生的二次电子。 ADC将来自检测器的信号转换为数字信号。
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公开(公告)号：KR1020040034147A
公开(公告)日：2004-04-28
申请号：KR1020020064227
申请日：2002-10-21
Applicant: 삼성전자주식회사
IPC: H01L21/68
Abstract: PURPOSE: A transfer apparatus used for manufacturing a semiconductor device is provided to be capable of considerably improving the abrasion state of a pad and easily replacing the pad with another. CONSTITUTION: A transfer apparatus used for manufacturing a semiconductor device includes a transfer part(10) having a pad(12). At this time, the pad contacts the backside of a substrate. The pad is made of predetermined rubber, wherein the predetermined rubber is mixed with soft silicon. Preferably, the soft silicon has a Shore hardness of 20-30 degrees. Preferably, at least three pads are installed at the transfer part and the outer diameter of each pad exceeds 3 π. Preferably, the pad is screw-connected with the transfer part, so that the pad is easily replaced with another.
Abstract translation: 目的：提供一种用于制造半导体器件的转印装置，其能够显着地改善衬垫的磨损状态，并且容易地用另一个替换衬垫。 构成：用于制造半导体器件的转印装置包括具有垫（12）的转印部（10）。 此时，焊盘接触衬底的背面。 衬垫由预定的橡胶制成，其中预定的橡胶与软硅混合。 优选地，软硅的肖氏硬度为20-30度。 优选地，在传送部分安装至少三个焊盘，并且每个焊盘的外径超过3π。 优选地，垫与转印部分螺纹连接，使得垫易于被另一个替换。
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公开(公告)号：KR100363253B1
公开(公告)日：2002-11-30
申请号：KR1020000000667
申请日：2000-01-07
Applicant: 삼성전자주식회사
IPC: H04L9/14
Abstract: 본 발명은 통신에서 비밀키를 생성하는 방법 및 그 장치를 개시한다.
본 발명에 의하면, 통신하는 양 측에서 각각 공개키를 상대에게 전송하고, 상대의 공개키를 이용하여 중간 비밀값을 소정의 방법으로 계산하고, 이 중간 비밀값들을 서로 교환하며, 이 중간 비밀값과 자신의 개인 키를 이용하여 공동으로 사용되는 비밀값을 생성함으로 해서, 공동의 비밀값을 이용해서 통신에 전송하는 데이터를 암호화하고 수신한 측에서는 상기의 공동의 비밀값을 이용해서 암호화된 데이터의 암호를 풀어 수신한 데이터를 사용하게 되어 통신 장치의 보안성이 대폭 향상될 수 있으며, 이를 위한 과정이 상당히 단순하여 통신 장치에 대한 부담도 작게 된다. -
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