Abstract:
Provided is a semiconductor device. The semiconductor device includes a gate electrode which crosses a semiconductor fin arranged on a substrate, a gate insulating layer which is interposed between the gate electrode and the semiconductor fin, a 3D-structural channel region which is defined in the semiconductor fin under the gate electrode, a first interlayer insulator film which is formed in the semiconductor fin of both sides of the gate electrode and covers the entire surface of the substrate except the gate electrode and impurity regions separated from the gate electrode, a first contact plug which penetrates the first interlayer insulator film and touches the impurity regions, and a second interlayer insulator film which covers the gate electrode and partly fills a space between the impurity regions and the gate electrode to define an air gap between the impurity regions and the gate electrode.
Abstract:
멀티 비트 메모리 소자 및 그의 동작방법이 개시되어 있다. 개시된 멀티 비트 메모리 소자는 인가 전류에 따라 저저항상태와 고저항상태를 갖는 적어도 세 개의 단위셀(unit cell)이 순차로 적층된 적층구조물을 구비한 스토리지노드, 및 상기 적층구조물에 전류를 인가하는 수단을 포함하되, 상기 단위셀들은 그의 저항상태를 변화시키기 위한 임계 전류(critical current)가 서로 다른 메모리 소자를 제공한다.
Abstract:
A semiconductor device is provided. A first transistor and a second transistor including a nano-active region protruded from a substrate, a source region and a drain region on both ends of the nano-active region, and a channel forming region between the source region and the drain region are provided. The source region and the drain region of the first transistor are conductive type same as the source region and the drain region of the second transistor, wherein a threshold voltage of the second transistor is lower than the first transistor. The channel forming region of the second transistor includes a same kind impurity region having the same conductive type with the source region and the drain region of the second transistor, but a different conductive type with the channel forming region between the source region and the drain region of the first transistor.