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公开(公告)号:KR1020100007255A
公开(公告)日:2010-01-22
申请号:KR1020080067813
申请日:2008-07-11
Applicant: 삼성전자주식회사
CPC classification number: H01L29/0665 , B82Y10/00 , H01L29/0673 , H01L29/0676 , H01L31/03529 , Y02E10/50 , Y10S977/762 , Y10S977/774
Abstract: PURPOSE: A silicon nano wire containing silicon nano dot is provided to produce nano wire having improve various material property by controlling size, density, crystallization, and interval. CONSTITUTION: A silica nano wire contains silicon nano dot as a nano wire containing silica. The nano wire containing the silica comprises a core portion. The core portion contains silicon-rich oxide or metal nano dot. The silicon nano dot exists inside the nano wire except for the core portion. The diameter of the silicon nano dot is 1-10nm.
Abstract translation: 目的:提供含有硅纳米点的硅纳米线,以通过控制尺寸,密度,结晶度和间隔来制备具有改善各种材料性能的纳米线。 构成:二氧化硅纳米线含有硅纳米点作为含有二氧化硅的纳米线。 含有二氧化硅的纳米线包括核心部分。 芯部分含有富含氧的氧化物或金属纳米点。 硅纳米点存在于纳米线内,除了核心部分之外。 硅纳米点的直径为1-10nm。
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公开(公告)号:KR1020170045040A
公开(公告)日:2017-04-26
申请号:KR1020150144946
申请日:2015-10-16
Applicant: 삼성전자주식회사 , 성균관대학교산학협력단
CPC classification number: H01L29/778 , H01L29/1606 , H01L29/24 , H01L29/242 , H01L29/413 , H01L29/66037 , H01L29/66969 , H01L29/7311 , H01L29/7391 , H01L29/88 , H01L29/882 , H01L29/885 , H01L31/032 , H01L31/1136
Abstract: 이차원물질을포함한반도체소자가개시된다. 일실시예에따른반도체소자는기판, 기판상에형성되어있으며제1 영역과이에인접한제2 영역을갖는이차원물질층, 및이차원물질층의제1 및제2 영역과각각접촉하도록형성된소스/드레인전극을포함한다. 여기서, 제1 영역의이차원물질층의표면에흡착된산소의양인제1 산소흡착율과상기제2 영역의이차원물질층의표면에흡착된산소의양인제2 산소흡착율이서로다르다.
Abstract translation: 公开了一种包括二维材料的半导体器件。 根据一个实施例的半导体器件包括衬底,形成在衬底的第一区域和与其相邻的具有面积材料的第二二维层,并形成为与连接器1个mitje第二区域,并且每个二维材料层,一源极/ 排水电极。 这里,第一材料的两个维层的表面上的氧吸附的重新开始2氧吸附速度的量和在西班牙的二维材料层1的第2区域的区域的表面上的氧吸附的氧吸附速度的量是彼此不同的。
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公开(公告)号:KR1020160095447A
公开(公告)日:2016-08-11
申请号:KR1020150016716
申请日:2015-02-03
Applicant: 삼성전자주식회사
IPC: H01B1/02
CPC classification number: H01L51/5206 , H01B1/22 , H01L21/32131 , H01L51/0035 , H01L51/004 , H01L51/0067 , H01L51/0097 , H01L51/5234 , H01B1/02 , H01B13/0026
Abstract: 복수의금속나노체를포함하고상기각 금속나노체를둘러싸는유기물이선택적으로제거되어있으며 1.1 이하의헤이즈, 550nm에서 85% 이상의광 투과도및 100Ω/sq. 이하의면저항을동시에만족하는도전체및 상기도전체를포함하는전자소자, 그리고금속나노체및 유기물을포함하는도전성필름을준비하는단계, 그리고클러스터이온빔 스퍼터링(cluster ion beam sputtering)을사용하여상기유기물을선택적으로제거하는단계를포함하는도전체의제조방법에관한것이다.
Abstract translation: 本发明的一个实施例提供一种具有改善的电性能的导体。 本发明的另一实施例提供一种制造导体的方法。 本发明的另一实施例提供一种包括该导体的电子设备。 本发明涉及一种导体,其包含多个金属纳米结构,同时满足1.1或更低的雾度,85nm或更高的550nm光透射率和100 / sq。 或更低的表面电阻,并且从中选择性地除去环绕每个金属纳米结构的有机物质。 本发明涉及一种包括该导体的电子器件及其制造方法,包括制备包含金属纳米结构和有机物质的导电膜的步骤以及使用聚簇离子束溅射选择性除去有机物质的步骤。 因此,本发明能够改善导体的电气和光学特性。
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公开(公告)号:KR1020090083094A
公开(公告)日:2009-08-03
申请号:KR1020080009062
申请日:2008-01-29
Applicant: 삼성전자주식회사
IPC: H01L27/115 , B82Y10/00
CPC classification number: H01L45/06 , B82Y10/00 , G11C13/0004 , H01L45/1233
Abstract: A resistive memory including nanoparticle and formation method of the same are provided to control location and density of the conductive pathway changing the resistance of the dielectric layer by controlling the size, location and density of conductive nano particles. The resistivity memory comprises the switching element and storage cell. The storage cell is the lower electrode(110). The dielectric layer(120) including a plurality of conductivity nano particles(122) is formed on the lower electrode, and stores the information according to the change of the resistive state. The upper electrode(130) is formed on the dielectric layer. A plurality of conductivity nano particles is formed in an interface between the upper electrode and the dielectric layer and between the lower electrode and dielectric layer. The dielectric layer comprises the transition metal oxide. A plurality of conductivity nano particles has the size of 10Š ~ 200Š.
Abstract translation: 提供包括纳米颗粒的电阻式存储器及其形成方法,以通过控制导电纳米颗粒的尺寸,位置和密度来控制导电通路的位置和密度来改变电介质层的电阻。 电阻率存储器包括开关元件和存储单元。 存储单元是下电极(110)。 在下电极上形成包含多个导电性纳米粒子(122)的电介质层(120),根据电阻状态的变化来存储信息。 上电极(130)形成在电介质层上。 在上电极和电介质层之间以及下电极和电介质层之间的界面中形成多个导电纳米颗粒。 电介质层包含过渡金属氧化物。 多种导电纳米颗粒的尺寸为10〜200μ。
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公开(公告)号:KR101457562B1
公开(公告)日:2014-11-04
申请号:KR1020080067813
申请日:2008-07-11
Applicant: 삼성전자주식회사
CPC classification number: H01L29/0665 , B82Y10/00 , H01L29/0673 , H01L29/0676 , H01L31/03529 , Y02E10/50 , Y10S977/762 , Y10S977/774
Abstract: 실리콘 나노닷 함유 실리카 나노 와이어 및 그의 제조방법이 개시된다. 상기 나노 와이어는 커패시턴스 특성이 우수하면서도 광흡수능이 개선되므로, CTF 메모리를 비롯한 다양한 반도체 소자, 이미지 센서, 광검출소자, 발광 다이오드 및 레이저 다이오드 등 다양한 분야에 효과적으로 사용할 수 있다.
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公开(公告)号:KR1020110064701A
公开(公告)日:2011-06-15
申请号:KR1020090121407
申请日:2009-12-08
Applicant: 삼성전자주식회사 , 서울대학교산학협력단
IPC: H01L29/786 , G02F1/136
CPC classification number: H01L29/78606 , H01L29/66969 , H01L29/7869 , H01L29/78696 , H01L27/1225 , H01L29/66742
Abstract: PURPOSE: A transistor and electronic device with the same are provided to prevent the degradation of a channel layer due to an external environment, thereby obtaining superior reliability. CONSTITUTION: A channel layer(C1) includes a Zn oxide. A source and a drain(D1) contact both ends of the channel layer respectively. A gate insulating layer insulates the channel layer from a gate. The channel layer includes a first side adjacent to a substrate and a second side facing the first side. A channel layer-protection area includes a fluoride group material on the second side.
Abstract translation: 目的:提供一种晶体管及其电子器件,以防止由于外部环境导致的沟道层的劣化,从而获得优异的可靠性。 构成:沟道层(C1)包括Zn氧化物。 源极和漏极(D1)分别与沟道层的两端接触。 栅极绝缘层将沟道层与栅极绝缘。 沟道层包括与衬底相邻的第一侧和面向第一侧的第二侧。 沟道层保护区域包括在第二侧上的氟化物基材料。
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公开(公告)号:KR1020000024897A
公开(公告)日:2000-05-06
申请号:KR1019980041696
申请日:1998-10-02
Applicant: 삼성전자주식회사
IPC: H01L21/00
Abstract: PURPOSE: A polyimide baking oven is provided to bake a polyimide uniformly even in a wafer having TPIX deviation by generating a deviation of a thermal distribution on a front of the wafer. CONSTITUTION: A polyimide baking oven is constituted with: a top heat plate(11) where a wafer is placed; a bottom heat plate(12) installed below the top heat plate; a heater holder(14) which applies heat to the bottom heat plate, being installed below the bottom heat plate; and a heater(13a,13b) which emits heat, being attached to the heater holder. The heater comprises a first heater and a second heater. A polyimide is baked by controlling the temperature in order for the temperature distribution to be nonuniform.
Abstract translation: 目的:提供聚酰亚胺烘烤炉,通过产生晶片前面的热分布偏差,均匀地均匀地在具有TPIX偏差的晶片中均匀地烘烤聚酰亚胺。 构成:聚酰亚胺烘烤炉由:放置晶片的顶部加热板(11)构成; 安装在顶部加热板下方的底部加热板(12); 加热器保持器(14),其向底部加热板施加热量,安装在底部加热板的下方; 和发热的加热器(13a,13b),附着在加热器支架上。 加热器包括第一加热器和第二加热器。 通过控制温度来烘烤聚酰亚胺以使温度分布不均匀。
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公开(公告)号:KR101615636B1
公开(公告)日:2016-04-27
申请号:KR1020090121407
申请日:2009-12-08
Applicant: 삼성전자주식회사 , 서울대학교산학협력단
IPC: H01L29/786 , G02F1/136
CPC classification number: H01L29/78606 , H01L29/66969 , H01L29/7869 , H01L29/78696
Abstract: 트랜지스터및 상기트랜지스터를포함한전자장치가개시된다. 상기트랜지스터는불소계물질을포함하는채널층-보호영역을포함한다.
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