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公开(公告)号：KR1020110080446A
公开(公告)日：2011-07-13
申请号：KR1020100000683
申请日：2010-01-06
Applicant: 서울대학교산학협력단
Abstract: PURPOSE: A bipolar plate of a fuel cell is provided to ensure strong corrosive resistance and excellent electroconductivity and to improve the lifetime and performance of a fuel cell. CONSTITUTION: A bipolar plate(35,40) of a fuel cell includes 316L stainless steel which has the nitrified surface and corrosion potential of 0.1V or more and 0.15V or less, or 316L stainless steel to which nitrogen of 15% or more and 25% or less based on the total composition ratio is impregnated to the surface thereof. A method for preparing the bipolar plate of the fuel cell comprises a step for nitrifying the surface of a substrate including stainless steel at the temperature of 270°C or more and 330°C or less.
Abstract translation: 目的：提供燃料电池的双极板，以确保强的耐腐蚀性和优异的导电性，并提高燃料电池的寿命和性能。 构成：燃料电池的双极板（35,40）包括316L不锈钢，其具有0.1V以上且0.15V以下的硝化表面和腐蚀电位，或者具有15％以上的氮的316L不锈钢，以及 基于总组成比例将25％以下浸渍到其表面。 制备燃料电池的双极板的方法包括在270℃以上且330℃以下的温度下对含有不锈钢的基板的表面进行硝化的工序。
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公开(公告)号：KR1020100128360A
公开(公告)日：2010-12-08
申请号：KR1020090046713
申请日：2009-05-28
Applicant: 서울대학교산학협력단
Abstract: PURPOSE: A method for manufacturing titanium dioxide is provided to deposit a titanium dioxide film with a desired surface roughness and crystal phase. CONSTITUTION: A method for depositing titanium dioxide on a substrate controls: the flow rate of hydrogen provided to a chamber or crystals of titanium dioxide by controlling the flow rate of hydrogen provided to a chamber; the surface roughness of titanium dioxide by controlling the flow rate of hydrogen provided to a chamber; and the deposition rate of titanium dioxide by controlling the flow rate of hydrogen provided to a chamber.
Abstract translation: 目的：提供一种制备二氧化钛的方法，以沉积具有所需表面粗糙度和结晶相的二氧化钛膜。 构成：将二氧化钛沉积在衬底上的方法控制：通过控制提供给腔室的氢气的流量，提供给腔室或二氧化钛晶体的氢气流量; 通过控制提供给腔室的氢气流量来控制二氧化钛的表面粗糙度; 以及通过控制提供给腔室的氢气的流量来确定二氧化钛的沉积速率。
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公开(公告)号：KR101352503B1
公开(公告)日：2014-01-20
申请号：KR1020120040708
申请日：2012-04-19
Applicant: 서울대학교산학협력단
Abstract: 본 발명은 저온 공정을 이용하여, 기판 상에 균일하게 분포되며, 크기가 균일하고 정확한 금속 나노 분말들 및 그 형성방법을 위하여, 기판을 준비하는 단계, 상기 기판 상에 금속물질을 포함하는 층을 형성하는 단계 및 상기 금속물질을 포함하는 층을 유도결합 플라즈마 처리함으로써 상기 금속물질을 포함하는 층으로부터 상기 금속물질의 나노 분말들을 형성하는 단계를 포함하는, 기판 상의 금속 나노 분말들을 형성하는 방법이 제공된다.
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Patent Agency Ranking
公开(公告)号：KR101752764B1
公开(公告)日：2017-07-04
申请号：KR1020160050028
申请日：2016-04-25
Applicant: 서울대학교산학협력단
Abstract: 본발명은투명전도막제조방법으로서, (a) 기판(10)을제공하는단계, (b) 기판(10) 상에금속마스크층(20)을형성하는단계, (c) 금속마스크층(20)을플라즈마처리하여디웨팅(Dewetting)하는단계, (d) 디웨팅된금속마스크층(25) 상에전도층(30)을형성하는단계, 및 (e) 디웨팅된금속마스크층(25)을제거하여전도층(30)에투과패턴(P)을형성하는단계를포함한다.
Abstract translation: （B）在衬底（10）上形成金属掩模层（20）;（c）在衬底（10）上形成金属掩模层（20） （D）在去湿金属掩模层25上形成导电层30;以及（e）形成去湿金属掩模层25， 在导电层（30）上形成贯通图案（P）。
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公开(公告)号：KR1020130084584A
公开(公告)日：2013-07-25
申请号：KR1020120040708
申请日：2012-04-19
Applicant: 서울대학교산학협력단
Abstract: PURPOSE: Nano metal particles on a substrate and a forming method thereof are provided to uniformly distribute the nano metal particles on the substrate and to accurately form the uniform size and gap of the nano metal particles using a low-temperature process. CONSTITUTION: A forming method of nano metal particles (16) on a substrate (12) is as follows: a step of preparing the substrate containing polymers; a step of forming a layer (14) containing metal materials on the substrate; and a step of forming the nano metal particles from the layer containing the metal materials by performing an inductively coupled plasma process to the layer containing metal materials. The polymers contain polystyrene.
Abstract translation: 目的：提供基板上的纳米金属颗粒及其形成方法，以将纳米金属颗粒均匀地分布在基板上，并使用低温工艺精确地形成纳米金属颗粒的尺寸和间隙。 构成：衬底（12）上的纳米金属颗粒（16）的形成方法如下：制备含有聚合物的底物的步骤; 在衬底上形成含有金属材料的层（14）的步骤; 以及通过对含有金属材料的层进行电感耦合等离子体处理从包含金属材料的层形成纳米金属颗粒的步骤。 聚合物含有聚苯乙烯。
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公开(公告)号：KR101542161B1
公开(公告)日：2015-08-05
申请号：KR1020140026768
申请日：2014-03-06
Applicant: 서울대학교산학협력단
CPC classification number: H01L24/11 , H01L23/48 , H01L23/12 , H01L2021/60
Abstract: 본발명은도전성패드가형성된소자를준비하는단계; 상기도전성패드및 상기소자의적어도일부상에절연층을형성하는단계; 상기절연층을식각하여상기도전성패드를노출시키는캐비티를구비하는절연층패턴을형성하는단계; 상기도전성패드및 상기절연층패턴상의전면에솔더층을형성하는단계; 상기솔더층에플라즈마에의한디웨팅(dewetting) 처리를하여상기절연층패턴에둘러싸인상기도전성패드와직접접촉하는솔더범프를형성하는단계; 및상기절연층패턴을제거하는단계;를포함하는, 솔더범프구조체의제조방법및 상기제조방법에의해구현되는, 솔더범프구조체를제공한다.
Abstract translation: 本发明涉及一种用于制造焊料凸块的方法及其焊料凸块结构。 该方法包括以下步骤：制备形成有导电垫的器件; 在所述上导电焊盘和所述装置的至少一部分上形成绝缘层; 形成包括通过蚀刻所述绝缘层而暴露所述导电焊盘的空腔的绝缘层图案; 在所述导电焊盘的前表面上形成焊料层和绝缘层图案; 在所述焊料层中形成焊料凸块，其中所述焊料凸块通过使用等离子体的去湿处理直接接触被所述绝缘层图案包围的所述导电焊盘; 并去除绝缘层图案。
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公开(公告)号：KR1020110113450A
公开(公告)日：2011-10-17
申请号：KR1020100032843
申请日：2010-04-09
Applicant: 서울대학교산학협력단
Abstract: 본 발명은 유도결합 플라즈마 스퍼터링 장치(Inductively coupled plasma sputtering device)를 이용한 Mo-N/Cu 박막의 제조방법 및 그 방법으로 제조된 Mo-N/Cu 박막에 관한 것으로서, 본 발명의 박막 제조방법에 의해 밀도, 경도 및 표면조도가 향상된 Mo-N/Cu 박막을 제조할 수 있다. 또한 상기 박막은 접착력이 우수하며, 마찰계수가 작으며, 마모 테스트 결과 마모량이 극히 적음을 알 수 있다.
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公开(公告)号：KR1020100128361A
公开(公告)日：2010-12-08
申请号：KR1020090046714
申请日：2009-05-28
Applicant: 서울대학교산학협력단
CPC classification number: Y02P70/56 , H01M8/0228 , C23C14/0676 , C23C14/34 , H01M8/021 , H01M8/0215 , Y02E60/50
Abstract: PURPOSE: A bipolar plate for a fuel cell is provided to improve corrosion resistance and performance of a fuel battery by comprising a titanium oxide film. CONSTITUTION: A bipolar plate(35,40) for a fuel cell comprises stainless steel and a titanium oxide layer containing titanium 43-44%, nitrogen 44-45%, and oxygen 12-14% applied on the surface of the stainless steel. A method for manufacturing the bipolar plate for a fuel cell comprises the steps of: loading a chamber containing mixed gas including oxygen, nitrogen and argon on a substrate; and coating the surface of the substrate with a titanium oxynitride film while injecting oxygen 0.2 sccm.
Abstract translation: 目的：提供一种用于燃料电池的双极板，以通过包括氧化钛膜来改善燃料电池的耐腐蚀性和性能。 构成：用于燃料电池的双极板（35,40）包括不锈钢和含有43-44％，氮44-45％的钛和氧12-14％的氧化钛层施加在不锈钢的表面上。 制造燃料电池用双极板的方法包括以下步骤：在基板上装载包含氧，氮和氩的混合气体的室; 并用氮氧化钛膜涂覆基板的表面，同时注入0.2sccm的氧气。
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