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公开(公告)号:KR101196791B1
公开(公告)日:2012-11-05
申请号:KR1020107017903
申请日:2008-03-13
Applicant: 소이텍
IPC: H01L29/78 , H01L21/336
CPC classification number: H01L29/78603 , H01L29/32 , H01L29/7841 , H01L31/0248
Abstract: Embodiments of the invention relate to substrates comprising a base wafer, an insulating layer and a top semiconductor layer, wherein the insulating layer comprises at least a zone wherein a density of charges is in absolute value higher than 1010 charges/cm2. The invention also relates to processes for making such substrates.
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公开(公告)号:KR1020100113117A
公开(公告)日:2010-10-20
申请号:KR1020107017903
申请日:2008-03-13
Applicant: 소이텍
IPC: H01L29/78 , H01L21/336
CPC classification number: H01L29/78603 , H01L29/32 , H01L29/7841 , H01L31/0248 , H01L27/10844
Abstract: Embodiments of the invention relate to substrates comprising a base wafer, an insulating layer and a top semiconductor layer, wherein the insulating layer comprises at least a zone wherein a density of charges is in absolute value higher than 1010 charges/cm2. The invention also relates to processes for making such substrates.
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