公开(公告)号：KR100523987B1

公开(公告)日：2005-10-26

申请号：KR1020030057134

申请日：2003-08-19

Applicant: 한국화학연구원

Inventor： 김윤수 ,  이영국 ,  김창균 ,  정택모 ,  오영우 ,  박정우 ,  권현구

IPC: C23C16/00

Abstract: 본 발명은 직접 액체 주입 금속 유기물 화학 증착법에 의해 티탄산바륨스트론튬 박막을 제조하는 방법에 관한 것으로서, 바륨, 스트론튬 및 티타늄의 원료로서 Ba(thd)
2 (tmeea), Sr(thd)
2 (tmeea) 및 Ti(thd)
2 (O
i Pr)
2 {thd = 2,2,6,6-테트라메틸헵탄디오네이트, tmeea = 트리스[2-(2-메톡시에톡시)에틸]아민, O
i Pr = 이소프로폭시} 각각을 혼합하여 사용하는 것을 특징으로 하는 본 발명의 방법에 의하면, 고품위의 화학량론적 티탄산바륨스트론튬 박막을 보다 온화한 조건에서 제조할 수 있다.

公开(公告)号：KR1020050019400A

公开(公告)日：2005-03-03

申请号：KR1020030057134

申请日：2003-08-19

Applicant: 한국화학연구원

Inventor： 김윤수 ,  이영국 ,  김창균 ,  정택모 ,  오영우 ,  박정우 ,  권현구

IPC: C23C16/00

CPC classification number: C23C16/409 ,  C07F3/003 ,  C07F7/28 ,  C23C16/4485 ,  C23C16/56 ,  Y10S261/65

Abstract: PURPOSE: To provide a method for preparing stoichiometric barium strontium titanate thin films of high quality by direct liquid injection metal organic chemical vapor deposition under the milder conditions using organic complexes of Ba, Sr and Ti that are capable of being vaporized together as raw materials for mixing since they have similar thermal stability, decomposition characteristics and solubility. CONSTITUTION: In a method for preparing barium strontium titanate(BaxSr1-xTiO3) thin films by direct liquid injection metal organic chemical vapor deposition, the method is characterized in that a mixture of Ba(th)2(tmeea), Sr(thd)2(tmeea) and Ti(thd)2(O¬i Pr)2 $ûthd=2,2,6,6-tetramethylheptanedionate, tmeea=tris£2-(2-methoxyethoxy)ethyl|amine, O¬i Pr=isoproxy$ý is used as raw materials of barium, strontium and titanium, wherein the method comprises the steps of: dissolving the raw materials of barium, strontium and titanium into an organic solvent; transferring the solution to an instantaneous vaporizer heated to a temperature of 200 to 250 deg.C so that the solution is vaporized; and injecting the vaporized solution into a deposition container having pressure of 0.5 to 2.0 torr so that the vaporized solution is deposited on a matrix heated to a temperature of 300 to 500 deg.C, wherein the method further comprises a step of heat treating the deposited matrix in a temperature range of 600 to 800 deg.C, and wherein the raw materials of barium, strontium and titanium are mixed in a ratio of 1 ¢¦ 2:1:5 ¢¦ 10.

Abstract translation: 目的：提供一种通过直接液体注入金属有机化学气相沉积在较温和的条件下制备化学计量的钛酸锶钛酸盐薄膜的方法，使用能够作为原料蒸发的Ba，Sr和Ti的有机络合物 因为它们具有相似的热稳定性，分解特性和溶解度。 构成：在通过直接液体注入金属有机化学气相沉积制备钛酸锶钡（BaxSr1-xTiO3）薄膜的方法中，该方法的特征在于Ba（th）2（tmeea），Sr（thd）2 （tmeea）和Ti（thd）2（OiI Pr）2 $ûth= 2,2,6,6-四甲基庚二酮，tmeea =三（2-甲氧基乙氧基）乙基|胺，O-Pr =异丙氧基 ý用作钡，锶和钛的原料，其中所述方法包括以下步骤：将钡，锶和钛的原料溶解在有机溶剂中; 将溶液转移到加热至200〜250℃的瞬时蒸发器，使溶液蒸发; 并将蒸发的溶液注入具有0.5至2.0托的压力的沉积容器中，使得蒸发的溶液沉积在加热至300至500℃的基质上，其中该方法还包括热沉处理沉积 基质在600〜800℃的温度范围内，其中钡，锶和钛的原料以1¢| 2：1：5¢| 10的比例混合。