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    Integrated monolithic microfabricated electrospray, and system and method for liquid chromatography
    1.
    发明专利
    Integrated monolithic microfabricated electrospray, and system and method for liquid chromatography 审中-公开
    一体化单晶微电极，以及用于液相色谱的系统和方法

    公开(公告)号：JP2006234838A

    公开(公告)日：2006-09-07

    申请号：JP2006127976

    申请日：2006-05-01

    Applicant: Advion Biosciences Inc ,  Kionix Inc ,  アドヴィオン バイオサイエンシィズ インコーポレイテッド ,  キオニックス インコーポレイテッド

    Inventor： MOON JAMES E ,  SCHULTZ GARY A ,  CORSO THOMAS N ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  LOWES STEPHEN

    IPC: G01N27/62 ,  B01D15/08 ,  G01N30/60 ,  G01N30/72 ,  G01N37/00 ,  H01J49/04

    CPC classification number: G01N30/6095 ,  G01N30/7266 ,  G01N2030/6013 ,  H01J49/0018 ,  H01J49/167 ,  Y10T436/24 ,  Y10T436/2575

    Abstract: PROBLEM TO BE SOLVED: To provide a chemical analytical system of large capacity easy to be reproduced and allowing mass production. SOLUTION: The chemical analytical system includes the first substrate having a main face, the second substrate joined or attached thereto, a liquid chromatography system integrated thereto, and constituted to receive and treat an analytical liquid to be discharged, and a monolithic electrospray device having an inlet orifice located in a injection side, a nozzle located on a discharge face opposite to the injection side, a channel extended penetrated continuously through a monolithic device, and communicated with the inlet orifice and the nozzle, and an area recessed from the discharge face to surround the nozzle. The monolithic device is integrated on the first substrate, the injection side is constituted to receive the treated liquid from the liquid chromatography system, and the main face is constituted to distribute the liquid by electrospraying the liquid. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题：提供容易复制的大容量化学分析系统，并允许批量生产。 解决方案：化学分析系统包括具有主面，第二基板接合或附着的第一基板，与其一体化的液相色谱系统，构成为接收和处理要排出的分析液，以及单片电喷雾 装置，其具有位于注射侧的入口孔，位于与注射侧相对的排出面上的喷嘴，延伸穿过单片装置连续穿过并与入口孔和喷嘴连通的区域， 排出面以围绕喷嘴。 该单片装置集成在第一基板上，注射侧构成为从液相色谱系统接收经处理的液体，并且主面构成为通过电喷雾液体来分配液体。 版权所有（C）2006，JPO＆NCIPI

    Liquid chromatography system
    3.
    发明专利
    Liquid chromatography system 未知

    公开(公告)号：HK1066863A1

    公开(公告)日：2005-04-01

    申请号：HK04109844

    申请日：2004-12-13

    Applicant: ADVION BIOSCIENCES INC ,  KIONIX INC

    Inventor： MOON JAMES E ,  SCHULTZ GARY A ,  CORSO THOMAS N ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  LOWES STEPHEN

    IPC: G01N20060101 ,  B01D20060101 ,  G01N27/62 ,  B01D15/08 ,  G01N30/60 ,  G01N30/72 ,  G01N37/00 ,  H01J20060101 ,  H01J49/04

    Abstract: An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

    INTEGRATED MONOLITHIC MICROFABRICATED DISPENSING NOZZLE AND LIQUID CHROMATOGRAPHY-ELECTROSPRAY SYSTEM AND METHOD
    4.
    发明公开
    INTEGRATED MONOLITHIC MICROFABRICATED DISPENSING NOZZLE AND LIQUID CHROMATOGRAPHY-ELECTROSPRAY SYSTEM AND METHOD 审中-公开
    集成的单片微加工配送喷嘴和FLÜSSIGKEITSCHROMATOGRAHPIE - 电喷雾系统和方法

    公开(公告)号：EP1163512A4

    公开(公告)日：2007-08-08

    申请号：EP00913655

    申请日：2000-02-29

    Applicant: ADVION BIOSCIENCES INC ,  KIONIX INC

    Inventor： SCHULTZ GARY A ,  CORSO THOMAS N ,  MOON JAMES E ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J

    IPC: G01N30/60 ,  G01N30/72 ,  H01J49/04 ,  H01J49/10

    CPC classification number: H01J49/167 ,  G01N30/6095 ,  G01N30/7266 ,  H01J49/0018

    Abstract: A droplet/electrospray device and a liquid chromatography-electrospray system are disclosed. The droplet/electrospray device (100) comprises a substrate (102) defining a channel (104) between an entrance orifice (106) on an injection surface (108) and an exit orifice on an ejection surface (112), a nozzle (110) defined by a portion recessed from the ejection surface (112) surrounding the exit orifice, and an electrode (122) for application of an electric potential to the substrate (102) to optimize and generate droplets or an electrospray (62). A plurality of these electrospray devices (100) can be used in the form of an array of miniaturized nozzles. The liquid chromatography-electrospray device (160) comprises a separation substrate (162) defining an introduction channel (164) between an entrance orifice and a reservoir (166) and a separation channel (168) between the reservoir (166) and an exit orifice (170), the separation channel (168) being populated with separation posts (174) perpendicular to the fluid flow.

    INTEGRATED MONOLITHIC MICROFABRICATED DISPENSING NOZZLE AND LIQUID CHROMATOGRAPHY-ELECTROSPRAY SYSTEM AND METHOD
    6.
    发明专利
    INTEGRATED MONOLITHIC MICROFABRICATED DISPENSING NOZZLE AND LIQUID CHROMATOGRAPHY-ELECTROSPRAY SYSTEM AND METHOD 未知

    公开(公告)号：CA2363414C

    公开(公告)日：2008-02-05

    申请号：CA2363414

    申请日：2000-02-29

    Applicant: ADVION BIOSCIENCES INC

    Inventor： CORSO THOMAS N ,  SCHULTZ GARY A ,  GALVIN GREGORY J ,  DAVIS TIMOTHY J ,  MOON JAMES E

    IPC: B05B5/025 ,  B81C1/00 ,  G01N27/26 ,  G01N27/447 ,  G01N30/60 ,  G01N30/72 ,  H01J49/04 ,  H01J49/10

    Abstract: A droplet/electrospray device and a liquid chromatography-electrospray system are disclosed. The droplet/electrospray device (100) comprises a substrate (102) defining a channel (104) between an entrance orifice (106) on an injection surface (108) and an exit orifice on an ejection surface (112), a nozzle (110) defined by a portion recessed from the ejection surface (112) surrounding the exit orifice, and an electrode (122) for application of an electric potential to the substrate (102) to optimize and generate droplets or an electrospray (62). A plurality of these electrospray devices (100) can be used in the fonn of an array of miniaturized nozzles. The liquid chromatography-electrospray device (160) comprises a separation substrate (162) defining an introduction channel (164) between an entrance orifice and a reservoir (166) and a separation channel (168) between the reservoir (166) and an exit orifice (170), the separation channel (168) being populated with separation posts (174) perpendicular to the fluid flow.

    FABRICATION OF ULTRA-SHALLOW CHANNELS FOR MICROFLUIDIC DEVICES AND SYSTEMS
    8.
    发明专利
    FABRICATION OF ULTRA-SHALLOW CHANNELS FOR MICROFLUIDIC DEVICES AND SYSTEMS 未知

    公开(公告)号：AU2003216254A1

    公开(公告)日：2003-09-04

    申请号：AU2003216254

    申请日：2003-02-12

    Applicant: KIONIX INC

    Inventor： MOON JAMES E ,  YOUNG LINCOLN C

    IPC: B01F5/06 ,  B01F13/00 ,  B01J19/00 ,  B01L3/00 ,  B81B1/00 ,  B81C1/00 ,  G01N30/60

    Abstract: A method for etching an ultra-shallow channel includes using an etch process that is selective for one material to etch a different material in order to achieve a very precise channel depth in the different material. Channels as shallow as 10 nm can be fabricated in silicon with precision of 5 nm or better using the method. Stepped channels can be fabricated where each segment is a different depth, with the segments being between 10 nm and 1000 nm in depth. The method is applied to create a fluidic channel which includes a channel substrate to which is bonded a lid substrate to confine fluids to the fluidic channels so fabricated.

    Fabrication of ultra-shallow channels for microfluidic devices and systems
    9.
    发明专利
    Fabrication of ultra-shallow channels for microfluidic devices and systems 未知

    公开(公告)号：AU2003216254A8

    公开(公告)日：2003-09-04

    申请号：AU2003216254

    申请日：2003-02-12

    Applicant: KIONIX INC

    Inventor： MOON JAMES E ,  YOUNG LINCOLN C

    IPC: B01F5/06 ,  B01F13/00 ,  B01J19/00 ,  B01L3/00 ,  B81B1/00 ,  B81C1/00 ,  G01N30/60

    Abstract: A method for etching an ultra-shallow channel includes using an etch process that is selective for one material to etch a different material in order to achieve a very precise channel depth in the different material. Channels as shallow as 10 nm can be fabricated in silicon with precision of 5 nm or better using the method. Stepped channels can be fabricated where each segment is a different depth, with the segments being between 10 nm and 1000 nm in depth. The method is applied to create a fluidic channel which includes a channel substrate to which is bonded a lid substrate to confine fluids to the fluidic channels so fabricated.

    IMPROVED METHODS OF FABRICATING MICROELECTROMECHANICAL AND MICROFLUIDIC DEVICES
    10.
    发明专利
    IMPROVED METHODS OF FABRICATING MICROELECTROMECHANICAL AND MICROFLUIDIC DEVICES 未知

    公开(公告)号：CA2374666A1

    公开(公告)日：2000-12-21

    申请号：CA2374666

    申请日：2000-06-14

    Applicant: KIONIX INC

    Inventor： MOON JAMES E ,  DAVIS TIMOTHY J ,  SHAW KEVIN A ,  GALVIN GREGORY J ,  WILSON SHARLENE A ,  WALDROP PAUL C

    IPC: G01N37/00 ,  B01D15/08 ,  B05B5/00 ,  B81B1/00 ,  B81C1/00 ,  H01L21/302 ,  H01L21/3065

    Abstract: Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence th at may be integrated in a full process. The first aspect, designated as "latent masking", defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The laten oxide pattern is then used to mask an etch. The second aspect, designated as "simultaneous multi-level etching (SMILE)", provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as "delayed LOCOS", provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequen ce that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricatean ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.

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