METHOD OF ADAPTING FEED-FORWARD PARAMETERS
    4.
    发明申请

    公开(公告)号:US20200166854A1

    公开(公告)日:2020-05-28

    申请号:US16637792

    申请日:2018-07-12

    Abstract: A method for correcting values of one or more feed-forward parameters used in a process of patterning substrates, the method including: obtaining measured overlay and/or alignment error data of a patterned substrate; and calculating one or more correction values for the one or more feed-forward parameters in dependence on the measured overlay and/or alignment error data.

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