公开(公告)号：WO2016162228A1

公开(公告)日：2016-10-13

申请号：PCT/EP2016/056662

申请日：2016-03-24

Applicant: ASML NETHERLANDS B.V.

Inventor： WILLEMS, Lotte, Marloes ,  BHATTACHARYYA, Kaustuve ,  BINTEVINOS, Panagiotis, Pieter ,  CHEN, Guangqing ,  EBERT, Martin ,  KNELISSEN, Pieter, Jacob, Mathias, Hendrik ,  MORGAN, Stephen ,  VAN DER SCHAAR, Maurits ,  VERSTAPPEN, Leonardus, Henricus, Marie ,  WANG, Jen-Shiang ,  WARDENIER, Peter, Hanzen

IPC: G03F7/20 ,  G03F9/00

CPC classification number: G06F17/5009 ,  G03F7/705 ,  G03F7/70625 ,  G03F7/70633 ,  G03F7/70683 ,  G03F9/7046 ,  G06F2217/16

Abstract: A method including performing a simulation to evaluate a plurality of metrology targets and/or a plurality of metrology recipes used to measure a metrology target, identifying one or more metrology targets and/or metrology recipes from the evaluated plurality of metrology targets and/or metrology recipes, receiving measurement data of the one or more identified metrology targets and/or metrology recipes, and using the measurement data to tune a metrology target parameter or metrology recipe parameter.

Abstract translation: 一种方法，包括执行模拟以评估用于测量度量目标的多个度量目标和/或多个计量学方案，从所评估的多个度量目标和/或计量学中识别一个或多个测量目标和/或计量配方 接收所述一个或多个识别的度量目标和/或度量配方的测量数据，以及使用所述测量数据来调整度量目标参数或度量配方参数。