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1.发明申请
公开(公告)号：WO2021078690A1
公开(公告)日：2021-04-29
申请号：PCT/EP2020/079383
申请日：2020-10-19
Applicant: ASML NETHERLANDS B.V.
Inventor： UEBEL, Patrick, Sebastian , GÖTZ, Peter, Maximilian , BAUERSCHMIDT, Sebastian, Thomas , BALTIS, Coen, Hubertus, Matheus , RAVENSBERGEN, Janneke
Abstract: Disclosed are optical components and methods of manufacture thereof. A first optical component comprises a hollow-core photonic crystal fiber comprising internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner diameter over at least a portion of said output end section than an inner diameter of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component comprises a hollow-core photonic crystal fiber and a sleeve arrangement.
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公开(公告)号：WO2018219639A1
公开(公告)日：2018-12-06
申请号：PCT/EP2018/062547
申请日：2018-05-15
Applicant: ASML NETHERLANDS B.V.
Inventor： RAVENSBERGEN, Janneke , PANDEY, Nitesh , ZHOU, Zili , KOOLEN, Armand, Eugene, Albert , GOORDEN, Sebastianus, Adrianus , FAGGINGER AUER, Bastiaan, Onne , MATHIJSSEN, Simon, Gijsbert, Josephus
Abstract: A metrology apparatus is disclosed that measures a structure formed on a substrate to determine a parameter of interest. The apparatus comprises an optical system configured to focus radiation onto the structure and direct radiation after reflection from the structure onto a detector, wherein: the optical system is configured such that the detector detects a radiation intensity resulting from interference between radiation from at least two different points in a pupil plane field distribution, wherein the interference is such that a component of the detected radiation intensity containing information about the parameter of interest is enhanced relative to one or more other components of the detected radiation intensity.
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公开(公告)号：WO2023274630A1
公开(公告)日：2023-01-05
申请号：PCT/EP2022/063971
申请日：2022-05-24
Applicant: ASML NETHERLANDS B.V.
IPC: C03B37/012 , B29D11/00 , C03B37/027 , C03B2203/14 , C03B2203/16 , C03B2203/42 , C03B37/01208 , C03B37/0124 , C03B37/02781 , C03B37/0279
Abstract: A method of producing photonic crystal fibers (PCFs) is disclosed, the method comprising the following steps: 1) obtaining an intermediate PCF having an initial outer fiber diameter of less than 1.0 mm; and 2) elongating the intermediate PCF so as to controllably reduce at least one dimension of the intermediate PCF.
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公开(公告)号：WO2022122325A1
公开(公告)日：2022-06-16
申请号：PCT/EP2021/081952
申请日：2021-11-17
Applicant: ASML NETHERLANDS B.V. [NL]/[NL]
Abstract: A broadband light source device, being configured for generating a broadband output radiation upon receiving pump radiation, comprising: a hollow-core photonic crystal fiber (HC-PCF) comprising at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein said at least one structurally varied portion comprises at least a first structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein said at least one structurally varied portion is configured and located such that said broadband output radiation comprises wavelengths in the ultraviolet region.
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公开(公告)号：WO2021073873A1
公开(公告)日：2021-04-22
申请号：PCT/EP2020/077340
申请日：2020-09-30
Applicant: ASML NETHERLANDS B.V.
Inventor： ZHOU, Zili , RAVENSBERGEN, Janneke
Abstract: Disclosed is a pupil shaping arrangement for obtaining a defined pupil intensity profile for a metrology illumination beam configured for use in a metrology application. The pupil shaping arrangement comprises an engineered diffuser (ED) having a defined far-field profile configured to impose said defined pupil intensity profile on said metrology illumination beam. The pupil shaping arrangement may further comprise a multimode fiber (MMF) and be configured to reduce spatial coherence of coherent radiation.
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Patent Agency Ranking
公开(公告)号：EP4012494A1
公开(公告)日：2022-06-15
申请号：EP21208721.7
申请日：2021-11-17
Applicant: ASML Netherlands B.V.
Abstract: A broadband light source device, being configured for generating a broadband output radiation upon receiving pump radiation, comprising: a hollow-core photonic crystal fiber (HC-PCF) comprising at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein said at least one structurally varied portion comprises at least a first structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein said at least one structurally varied portion is configured and located such that said broadband output radiation comprises wavelengths in the ultraviolet region.
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公开(公告)号：EP3410212A1
公开(公告)日：2018-12-05
申请号：EP17174269.5
申请日：2017-06-02
Applicant: ASML Netherlands B.V.
Inventor： RAVENSBERGEN, Janneke , PANDEY, Nitesh , ZHOU, Zili , KOOLEN, Armand Eugene Albert , GOORDEN, Sebastianus Adrianus , FAGGINGER AUER, Bastiaan Onne , MATHIJSSEN, Simon Gijsbert Josephus
CPC classification number: G03F7/70633 , G01B11/02 , G01N21/9501 , G03F7/70625
Abstract: A metrology apparatus is disclosed that measures a structure formed on a substrate to determine a parameter of interest. The apparatus comprises an optical system configured to focus radiation onto the structure and direct radiation after reflection from the structure onto a detector, wherein: the optical system is configured such that the detector detects a radiation intensity resulting from interference between radiation from at least two different points in a pupil plane field distribution, wherein the interference is such that a component of the detected radiation intensity containing information about the parameter of interest is enhanced relative to one or more other components of the detected radiation intensity.
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公开(公告)号：EP4012492A1
公开(公告)日：2022-06-15
申请号：EP20213013.4
申请日：2020-12-10
Applicant: ASML Netherlands B.V.
Abstract: A broadband light source device, being configured for generating a broadband output radiation upon receiving pump radiation, comprising: a hollow-core photonic crystal fiber (HC-PCF) comprising at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein said at least one structurally varied portion comprises at least a first structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein said at least one structurally varied portion is configured and located such that said broadband output radiation comprises wavelengths in the ultraviolet region.
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9.发明公开
公开(公告)号：EP3812807A1
公开(公告)日：2021-04-28
申请号：EP20202598.7
申请日：2020-10-19
Applicant: ASML Netherlands B.V.
Inventor： UEBEL, Patrick Sebastian , GÖTZ, Peter Maximilian , BAUERSCHMIDT, Sebastian Thomas , BALTIS, Coen Hubertus Matheus , RAVENSBERGEN, Janneke
Abstract: Disclosed are optical components and methods of manufacture thereof. A first optical component comprises a hollow-core photonic crystal fiber comprising internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner diameter over at least a portion of said output end section than an inner diameter of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component comprises a hollow-core photonic crystal fiber and a sleeve arrangement.
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公开(公告)号：EP3470926A1
公开(公告)日：2019-04-17
申请号：EP17196670.8
申请日：2017-10-16
Applicant: ASML Netherlands B.V.
Inventor： RAVENSBERGEN, Janneke , AKBULUT, Duygu , PANDEY, Nitesh
IPC: G03F7/20
Abstract: A metrology apparatus is disclosed that comprises an optical system to focus radiation onto the structure and direct reflected radiation from the structure to a detection system. The optical system applies a plurality of different offsets of an optical characteristic to radiation before and/or after reflection from the structure, such that a corresponding plurality of different offsets are provided to reflected radiation derived from a first point of a pupil plane field distribution relative to reflected radiation derived from a second point of the pupil plane field distribution. The detection system detects a corresponding plurality of radiation intensities resulting from interference between the reflected radiation derived from the first point of the pupil plane field distribution and the reflected radiation derived from the second point of the pupil plane field distribution. Each radiation intensity corresponds to a different one of said plurality of different offsets.
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