HOLLOW-CORE PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION GENERATOR

    公开(公告)号:WO2022122325A1

    公开(公告)日:2022-06-16

    申请号:PCT/EP2021/081952

    申请日:2021-11-17

    Abstract: A broadband light source device, being configured for generating a broadband output radiation upon receiving pump radiation, comprising: a hollow-core photonic crystal fiber (HC-PCF) comprising at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein said at least one structurally varied portion comprises at least a first structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein said at least one structurally varied portion is configured and located such that said broadband output radiation comprises wavelengths in the ultraviolet region.

    METHOD AND APPARATUS FOR COHERENCE SCRAMBLING IN METROLOGY APPLICATIONS

    公开(公告)号:WO2021073873A1

    公开(公告)日:2021-04-22

    申请号:PCT/EP2020/077340

    申请日:2020-09-30

    Abstract: Disclosed is a pupil shaping arrangement for obtaining a defined pupil intensity profile for a metrology illumination beam configured for use in a metrology application. The pupil shaping arrangement comprises an engineered diffuser (ED) having a defined far-field profile configured to impose said defined pupil intensity profile on said metrology illumination beam. The pupil shaping arrangement may further comprise a multimode fiber (MMF) and be configured to reduce spatial coherence of coherent radiation.

    HOLLOW-CORE PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION GENERATOR

    公开(公告)号:EP4012494A1

    公开(公告)日:2022-06-15

    申请号:EP21208721.7

    申请日:2021-11-17

    Abstract: A broadband light source device, being configured for generating a broadband output radiation upon receiving pump radiation, comprising: a hollow-core photonic crystal fiber (HC-PCF) comprising at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein said at least one structurally varied portion comprises at least a first structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein said at least one structurally varied portion is configured and located such that said broadband output radiation comprises wavelengths in the ultraviolet region.

    HOLLOW-CORE PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION GENERATOR

    公开(公告)号:EP4012492A1

    公开(公告)日:2022-06-15

    申请号:EP20213013.4

    申请日:2020-12-10

    Abstract: A broadband light source device, being configured for generating a broadband output radiation upon receiving pump radiation, comprising: a hollow-core photonic crystal fiber (HC-PCF) comprising at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein said at least one structurally varied portion comprises at least a first structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein said at least one structurally varied portion is configured and located such that said broadband output radiation comprises wavelengths in the ultraviolet region.

    METROLOGY APPARATUS, LITHOGRAPHIC SYSTEM, AND METHOD OF MEASURING A STRUCTURE

    公开(公告)号:EP3470926A1

    公开(公告)日:2019-04-17

    申请号:EP17196670.8

    申请日:2017-10-16

    Abstract: A metrology apparatus is disclosed that comprises an optical system to focus radiation onto the structure and direct reflected radiation from the structure to a detection system. The optical system applies a plurality of different offsets of an optical characteristic to radiation before and/or after reflection from the structure, such that a corresponding plurality of different offsets are provided to reflected radiation derived from a first point of a pupil plane field distribution relative to reflected radiation derived from a second point of the pupil plane field distribution. The detection system detects a corresponding plurality of radiation intensities resulting from interference between the reflected radiation derived from the first point of the pupil plane field distribution and the reflected radiation derived from the second point of the pupil plane field distribution. Each radiation intensity corresponds to a different one of said plurality of different offsets.

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