公开(公告)号：WO2015135912A3

公开(公告)日：2015-11-12

申请号：PCT/EP2015054913

申请日：2015-03-10

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK ROELOF ,  BANINE VADIM YEVGENYEVICH ,  BARTRAIJ PETRUS RUTGERUS ,  DONKER RILPHO LUDOVICUS ,  AKKERMANS JOHANNES ANTONIUS GERARDUS

IPC: G03F7/20 ,  H01S3/09 ,  H05H7/00 ,  H05H7/04

CPC classification number: G03F7/70008 ,  G03F7/70025 ,  G03F7/7005 ,  G03F7/70208 ,  G03F7/70808 ,  H01S3/0903 ,  H05H7/04

Abstract: The present invention is concerned with a free electron laser. The free electron laser comprises an electron source operable to emit a beam of electrons, a particle accelerator operable to accelerate the beam of electrons to relativistic energies, an undulator operable to guide the relativistic electron beam along a periodic path so as to stimulate emission of coherent radiation and a steering unit operable to alter the trajectory of the electron beam so as to direct the electron beam from a first path along which the electron beam propagates substantially in a first direction to a second path along which the electron beam propagates substantially in a second direction, wherein the first path and the second path are vertically separated from one another.

Abstract translation: 本发明涉及一种自由电子激光器。 自由电子激光器包括可操作以发射电子束的电子源，可操作以将电子束加速到相对论能量的粒子加速器，可操作以沿着周期性路径引导相对论电子束的波动器，以便刺激相干能量的发射 辐射和转向单元，其可操作以改变电子束的轨迹，以便引导来自第一路径的电子束，电子束沿着第一路径在第一方向上传播到第二路径，电子束沿着第二路径基本上在第二路径中传播 方向，其中第一路径和第二路径彼此垂直分离。

公开(公告)号：NL2013885A

公开(公告)日：2015-06-08

申请号：NL2013885

申请日：2014-11-27

Applicant: ASML NETHERLANDS BV

Inventor： NIKIPELOV ANDREY ALEXANDROVICH ,  BANINE VADIM YEVGENYEVICH ,  JAGER PIETER WILLEM HERMAN ,  VRIES GOSSE CHARLES ,  FRIJNS OLAV WALDEMAR VLADIMIR ,  GRIMMINCK LEONARDUS ADRIANUS GERARDUS ,  KATALENIC ANDELKO ,  AKKERMANS JOHANNES ANTONIUS GERARDUS ,  LOOPSTRA ERIK ROELOF ,  ENGELEN WOUTER JOEP ,  BARTRAIJ PETRUS RUTGERUS ,  COENEN TEIS JOHAN ,  ROOT WILHELMUS PATRICK ELISABETH MARIA

IPC: G03F7/20 ,  H01S3/00

Abstract: A photocathode comprises a substrate in which a cavity is formed and a film of material disposed on the substrate. The film of material comprises an electron emitting surface configured to emit electrons when illuminated by a beam of radiation. The electron emitting surface is on an opposite side of the film of material from the cavity.