公开(公告)号：NL2013885A

公开(公告)日：2015-06-08

申请号：NL2013885

申请日：2014-11-27

Applicant: ASML NETHERLANDS BV

Inventor： NIKIPELOV ANDREY ALEXANDROVICH ,  BANINE VADIM YEVGENYEVICH ,  JAGER PIETER WILLEM HERMAN ,  VRIES GOSSE CHARLES ,  FRIJNS OLAV WALDEMAR VLADIMIR ,  GRIMMINCK LEONARDUS ADRIANUS GERARDUS ,  KATALENIC ANDELKO ,  AKKERMANS JOHANNES ANTONIUS GERARDUS ,  LOOPSTRA ERIK ROELOF ,  ENGELEN WOUTER JOEP ,  BARTRAIJ PETRUS RUTGERUS ,  COENEN TEIS JOHAN ,  ROOT WILHELMUS PATRICK ELISABETH MARIA

IPC: G03F7/20 ,  H01S3/00

Abstract: A photocathode comprises a substrate in which a cavity is formed and a film of material disposed on the substrate. The film of material comprises an electron emitting surface configured to emit electrons when illuminated by a beam of radiation. The electron emitting surface is on an opposite side of the film of material from the cavity.