公开(公告)号：NL2004527A

公开(公告)日：2011-02-28

申请号：NL2004527

申请日：2010-04-09

Applicant: ASML NETHERLANDS BV

Inventor： BUIS EDWIN ,  VRIES GOSSE ,  BOON FIDELUS

IPC: G03F7/20

Abstract: An optical apparatus has a moveable reflective element and associated actuator. The actuator includes a first magnet which is connected to the moveable reflective element such that movement of the first magnet will cause the moveable reflective element to move, and a second magnet which is connected to a motor such that operation of the motor will cause the second magnet to move. The second magnet is positioned relative to the first magnet such that moving the second magnet will cause the first magnet to move.

公开(公告)号：NL2004429A

公开(公告)日：2011-02-28

申请号：NL2004429

申请日：2010-03-18

Applicant: ASML NETHERLANDS BV

Inventor： VRIES GOSSE ,  BUIS EDWIN ,  DAM MARINUS ,  SCHOOT JAN ,  BOON FIDELUS ,  KREUWEL HERMANUS

IPC: G03F7/20

公开(公告)号：NL2010804A

公开(公告)日：2014-01-14

申请号：NL2010804

申请日：2013-05-15

Applicant: ASML NETHERLANDS BV

Inventor： BOON FIDELUS ,  HOL SVEN ANTOIN JOHAN ,  FISCHER OLOF

IPC: G03F7/20 ,  H01L21/683