公开(公告)号：SG182052A1

公开(公告)日：2012-07-30

申请号：SG2011085982

申请日：2011-11-21

Applicant: ASML NETHERLANDS BV

Inventor： VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS ,  DE GROOT ANTONIUS FRANCISCUS JOHANNES ,  CADEE THEODORUS PETRUS MARIA ,  DE BOEIJ JEROEN

Abstract: Lithography apparatus comprising a projection system a carrier; and a drive system for moving the carrier relative to the projection system in a plane defined by reference to orthogonal axes X and Y, wherein: the drive system comprises: a shuttle constructed and arranged to move parallel to the Y-axis; a shuttle connector for connecting the shuttle to the carrier, the shuttle connector being such as to allow movement of the carrier in a direction parallel to the X-axis relative to the shuttle; and a shuttle driver for driving movement of the shuttle parallel to the Y-axis, wherein: the shuttle is located to one side only of the carrier in a direction parallel to the X-axis and only one of the shuttle is connected to the carrier; and the shuttle driver and shuttle connector are configured to supply at least 10% of the Y-component of forces applied to the carrier by the drive system.Fig. 1

公开(公告)号：SG183609A1

公开(公告)日：2012-09-27

申请号：SG2012006169

申请日：2012-01-27

Applicant: ASML NETHERLANDS BV

Inventor： HOL SVEN ANTOIN JOHAN ,  VAN EIJK JAN ,  VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS ,  NIJSSE GERARD JOHANNES PIETER ,  HUANG YANG-SHAN ,  KOOT MICHAEL WILHELMUS THEODORUS ,  DE BOEIJ JEROEN ,  KIMMAN MAARTEN HARTGER ,  ZHOU WEI ,  MARTENS SIMON BERNARDUS CORNELIS MARIA

Abstract: An electromagnetic actuator includes a first and second magnetic members that are displaceable relative to each other and are arranged to provide a magnetic circuit; and a coil configured to, in use, receive a current to generate a magnetic flux through the magnetic circuit, thereby generating a force between the first and second magnetic members in a first direction, the magnetic flux, in use, being transferred between the first and second magnetic members through a first surface of the first magnetic member and a second surface of the second magnetic member, the first and second surface being separated by an airgap, wherein the first surface and the second surface are arranged relative to each other such that an outer dimension of the first surface extends beyond an outer dimension of the second surface in a second direction substantially perpendicular to the first direction.Figure 1