公开(公告)号：NL2012452A

公开(公告)日：2014-10-13

申请号：NL2012452

申请日：2014-03-17

Applicant: ASML NETHERLANDS BV

Inventor： SCHMITZ ROGER ,  LEVASIER LEON ,  DERKS SANDER

IPC: G03F7/20 ,  H01L21/683

公开(公告)号：NL2009189A

公开(公告)日：2013-02-19

申请号：NL2009189

申请日：2012-07-16

Applicant: ASML NETHERLANDS BV

Inventor： KUNNEN JOHAN ,  HOUBEN MARTIJN ,  LAURENT THIBAULT ,  ABEELEN HENDRIKUS ,  DASSEN ARMAND ,  DERKS SANDER

IPC: G03F7/20 ,  H01L21/68

公开(公告)号：NL2008751A

公开(公告)日：2012-12-10

申请号：NL2008751

申请日：2012-05-04

Applicant: ASML NETHERLANDS BV

Inventor： LAURENT THIBAULT ,  KUSTERS GERARDUS ,  KUNNEN JOHAN ,  DERKS SANDER

IPC: G03F7/20

Abstract: A temperature sensing probe including a temperature sensor in an elongate housing wherein the elongate housing of the probe is elongate in a first direction and the elongate housing is comprised of a material which has a thermal conductivity of at least 500 W/mK at 20° C. in at least one direction.