公开(公告)号：NL2007279A

公开(公告)日：2012-03-29

申请号：NL2007279

申请日：2011-08-19

Applicant: ASML NETHERLANDS BV

Inventor： KNIJN PAULUS JOHANNES ,  CUIJPERS MARTINUS ,  HOOGENDAM CHRISTIAAN ,  LEVASIER LEON ,  BLOK ROLAND ,  SMEETS MARTIN

IPC: G03F7/20 ,  H01L21/68

Abstract: A method is used to calibrate a target surface of a position measurement system configured to measure a position of a movable object. The position measurement system includes the target surface mounted on the movable object, a stationary sensor system, and a processing device to calculate a position of the movable object on the basis of at least one measurement signal of the sensor system. The processing device includes a correction map of the target surface to correct for irregularities of the target surface. The method includes recalibrating the correction map of the target surface by measuring the target surface and determining a recalibrated correction map of the complete target surface on the basis of the measured target surface and one or more deformation modes of the target surface and/or physical objects affecting the target surface.

公开(公告)号：NL2012452A

公开(公告)日：2014-10-13

申请号：NL2012452

申请日：2014-03-17

Applicant: ASML NETHERLANDS BV

Inventor： SCHMITZ ROGER ,  LEVASIER LEON ,  DERKS SANDER

IPC: G03F7/20 ,  H01L21/683

公开(公告)号：NL2008250A

公开(公告)日：2012-09-11

申请号：NL2008250

申请日：2012-02-07

Applicant: ASML NETHERLANDS BV

Inventor： NIENHUYS HAN-KWANG ,  CUIJPERS MARTINUS ,  LEVASIER LEON ,  SCHOOT JAN ,  VIJVER YURI ,  VOZNYI OLEG ,  JANSSEN FRANCISCUS ,  PHILIPS DANNY ,  MIRANDA MARCIO ,  GALAKTIONOV OLEKSIY ,  BAL KURSAT ,  SCHMITZ ROGER ,  LEROUX ALAIN ,  RANJAN MANISH ,  RIJPMA ALBERT

IPC: G03F7/20

公开(公告)号：NL2004661A

公开(公告)日：2010-07-14

申请号：NL2004661

申请日：2010-05-04

Applicant: ASML NETHERLANDS BV

Inventor： BOEIJ WILHELMUS ,  LEVASIER LEON

IPC: G02B5/20 ,  G03F7/20 ,  G21K1/02