公开(公告)号：NL2004907A

公开(公告)日：2010-12-20

申请号：NL2004907

申请日：2010-06-17

Applicant: ASML NETHERLANDS BV

Inventor： JACOBS JOHANNES ,  JANSEN HANS ,  BRUIJSTENS JEROEN ,  THOMAS IVO ,  KUSTERS GERARDUS ,  MIRANDA MARCIO ,  TANASA GHEORGHE

IPC: G03F7/20

公开(公告)号：NL2005874A

公开(公告)日：2011-07-25

申请号：NL2005874

申请日：2010-12-17

Applicant: ASML NETHERLANDS BV

Inventor： PATEL HRISHIKESH ,  JACOBS JOHANNES ,  KUSTERS GERARDUS ,  LAURENT THIBAULT ,  MIRANDA MARCIO ,  BLOKS RUUD ,  FENG PENG ,  KUNNEN JOHAN

IPC: G03F7/20

公开(公告)号：NL2004807A

公开(公告)日：2011-01-04

申请号：NL2004807

申请日：2010-06-03

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  BENSCHOP JOZEF ,  KATE NICOLAAS ,  ROSET NIEK ,  KUSTERS GERARDUS ,  ZDRAVKOV ALEXANDER ,  PATEL HRISHIKESH ,  OPSTAL SANDER

IPC: G03F7/20

公开(公告)号：NL2006913A

公开(公告)日：2012-01-17

申请号：NL2006913

申请日：2011-06-09

Applicant: ASML NETHERLANDS BV

Inventor： LAURENT THIBAULT ,  KUNNEN JOHAN ,  BADIE RAMIN ,  KUSTERS GERARDUS ,  KNARREN BASTIAAN ,  LAFARRE RAYMOND ,  STEFFENS KOEN ,  KANEKO TAKESHI ,  VOOGD ROBBERT JAN ,  CORCORAN GREGORY ,  BLOKS RUUD

IPC: G03F7/20

公开(公告)号：NL2008751A

公开(公告)日：2012-12-10

申请号：NL2008751

申请日：2012-05-04

Applicant: ASML NETHERLANDS BV

Inventor： LAURENT THIBAULT ,  KUSTERS GERARDUS ,  KUNNEN JOHAN ,  DERKS SANDER

IPC: G03F7/20

Abstract: A temperature sensing probe including a temperature sensor in an elongate housing wherein the elongate housing of the probe is elongate in a first direction and the elongate housing is comprised of a material which has a thermal conductivity of at least 500 W/mK at 20° C. in at least one direction.